DE60105403D1 - Integrierte wellenlängen-überwachungsvorrichtung - Google Patents

Integrierte wellenlängen-überwachungsvorrichtung

Info

Publication number
DE60105403D1
DE60105403D1 DE60105403T DE60105403T DE60105403D1 DE 60105403 D1 DE60105403 D1 DE 60105403D1 DE 60105403 T DE60105403 T DE 60105403T DE 60105403 T DE60105403 T DE 60105403T DE 60105403 D1 DE60105403 D1 DE 60105403D1
Authority
DE
Germany
Prior art keywords
interference filter
wavelength
detector
integrated
position sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60105403T
Other languages
English (en)
Other versions
DE60105403T2 (de
Inventor
Krister Froejdh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Telefonaktiebolaget LM Ericsson AB
Original Assignee
Telefonaktiebolaget LM Ericsson AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Telefonaktiebolaget LM Ericsson AB filed Critical Telefonaktiebolaget LM Ericsson AB
Publication of DE60105403D1 publication Critical patent/DE60105403D1/de
Application granted granted Critical
Publication of DE60105403T2 publication Critical patent/DE60105403T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/02016—Circuit arrangements of general character for the devices
    • H01L31/02019—Circuit arrangements of general character for the devices for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02024—Position sensitive and lateral effect photodetectors; Quadrant photodiodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
    • H01L31/02165—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors using interference filters, e.g. multilayer dielectric filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/0014—Monitoring arrangements not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0262—Photo-diodes, e.g. transceiver devices, bidirectional devices
    • H01S5/0264—Photo-diodes, e.g. transceiver devices, bidirectional devices for monitoring the laser-output

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Communication System (AREA)
  • Lasers (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Light Receiving Elements (AREA)
  • Glass Compositions (AREA)
DE60105403T 2000-01-10 2001-01-08 Integrierte wellenlängen-überwachungsvorrichtung Expired - Lifetime DE60105403T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SE0000041A SE517341C2 (sv) 2000-01-10 2000-01-10 Integrerad våglängdsmonitor för laserljus
SE0000041 2000-01-10
PCT/SE2001/000018 WO2001052369A1 (en) 2000-01-10 2001-01-08 Integrated wavelength monitor

Publications (2)

Publication Number Publication Date
DE60105403D1 true DE60105403D1 (de) 2004-10-14
DE60105403T2 DE60105403T2 (de) 2005-09-29

Family

ID=20278043

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60105403T Expired - Lifetime DE60105403T2 (de) 2000-01-10 2001-01-08 Integrierte wellenlängen-überwachungsvorrichtung

Country Status (10)

Country Link
US (1) US6639679B2 (de)
EP (1) EP1269586B1 (de)
JP (1) JP2003520439A (de)
CN (1) CN1178342C (de)
AT (1) ATE275764T1 (de)
AU (1) AU2001227209A1 (de)
DE (1) DE60105403T2 (de)
SE (1) SE517341C2 (de)
TW (1) TW484269B (de)
WO (1) WO2001052369A1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7075656B2 (en) 2001-12-11 2006-07-11 Adc Telecommunications, Inc. Method and algorithm for continuous wavelength locking
US7038782B2 (en) 2001-12-11 2006-05-02 Adc Telecommunications, Inc. Robust wavelength locker for control of laser wavelength
US6859469B2 (en) * 2001-12-11 2005-02-22 Adc Telecommunications, Inc. Method and apparatus for laser wavelength stabilization
US6864980B2 (en) * 2002-01-22 2005-03-08 Digital Optics Corp. Linear filter based wavelength locking optical sub-assembly and associated methods
CN100564592C (zh) * 2003-09-19 2009-12-02 应用材料公司 对无电沉积的终点进行检测的装置和方法
US7522786B2 (en) 2005-12-22 2009-04-21 Palo Alto Research Center Incorporated Transmitting light with photon energy information
US7310153B2 (en) * 2004-08-23 2007-12-18 Palo Alto Research Center, Incorporated Using position-sensitive detectors for wavelength determination
US7315667B2 (en) * 2005-12-22 2008-01-01 Palo Alto Research Center Incorporated Propagating light to be sensed
US7433552B2 (en) * 2005-12-22 2008-10-07 Palo Alto Research Center Incorporated Obtaining analyte information
US8437582B2 (en) 2005-12-22 2013-05-07 Palo Alto Research Center Incorporated Transmitting light with lateral variation
US7718948B2 (en) * 2006-12-04 2010-05-18 Palo Alto Research Center Incorporated Monitoring light pulses
US8821799B2 (en) 2007-01-26 2014-09-02 Palo Alto Research Center Incorporated Method and system implementing spatially modulated excitation or emission for particle characterization with enhanced sensitivity
US9164037B2 (en) 2007-01-26 2015-10-20 Palo Alto Research Center Incorporated Method and system for evaluation of signals received from spatially modulated excitation and emission to accurately determine particle positions and distances
US7936463B2 (en) 2007-02-05 2011-05-03 Palo Alto Research Center Incorporated Containing analyte in optical cavity structures
US7817276B2 (en) * 2007-02-05 2010-10-19 Palo Alto Research Center Incorporated Distinguishing objects
US7471399B2 (en) * 2007-02-05 2008-12-30 Palo Alto Research Center Incorporated Photosensing optical cavity output light
US7554673B2 (en) * 2007-02-05 2009-06-30 Palo Alto Research Center Incorporated Obtaining information about analytes using optical cavity output light
US7633629B2 (en) * 2007-02-05 2009-12-15 Palo Alto Research Center Incorporated Tuning optical cavities
US7817281B2 (en) * 2007-02-05 2010-10-19 Palo Alto Research Center Incorporated Tuning optical cavities
US7852490B2 (en) * 2007-02-05 2010-12-14 Palo Alto Research Center Incorporated Implanting optical cavity structures
US8320983B2 (en) 2007-12-17 2012-11-27 Palo Alto Research Center Incorporated Controlling transfer of objects affecting optical characteristics
US8629981B2 (en) 2008-02-01 2014-01-14 Palo Alto Research Center Incorporated Analyzers with time variation based on color-coded spatial modulation
US8373860B2 (en) 2008-02-01 2013-02-12 Palo Alto Research Center Incorporated Transmitting/reflecting emanating light with time variation
US8723140B2 (en) 2011-08-09 2014-05-13 Palo Alto Research Center Incorporated Particle analyzer with spatial modulation and long lifetime bioprobes
US9029800B2 (en) 2011-08-09 2015-05-12 Palo Alto Research Center Incorporated Compact analyzer with spatial modulation and multiple intensity modulated excitation sources
WO2019053959A1 (ja) * 2017-09-13 2019-03-21 株式会社カネカ 光電変換素子および光電変換装置
JP7163306B2 (ja) 2017-11-15 2022-10-31 株式会社カネカ 光電変換装置
DE102019210950A1 (de) * 2019-07-24 2021-01-28 Robert Bosch Gmbh LIDAR-Sensor zur optischen Erfassung eines Sichtfeldes und Verfahren zur optischen Erfassung eines Sichtfeldes
DE102020202824A1 (de) 2020-03-05 2021-09-09 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Sensorvorrichtung unter verwendung der winkelabhängigkeit eines dichroitischen filters

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2086303T3 (es) * 1987-02-03 1996-07-01 Fujitsu Ltd Dispositivo de desviacion holografico.
DE3885134D1 (de) * 1987-03-30 1993-12-02 Siemens Ag Anordnung zur Steuerung oder Regelung einer Emissionswellenlänge und emittierten Leistung eines Halbleiterlasers.
JP2840709B2 (ja) * 1989-12-28 1998-12-24 京セラ株式会社 集積型半導体レーザ
JPH05275731A (ja) * 1992-03-25 1993-10-22 Sharp Corp フォトダイオード
AT396841B (de) 1992-04-02 1993-12-27 Rsf Elektronik Gmbh Anordnung zur stabilisierung der wellenlänge des von einer laserdiode abgegebenen lichtstrahlesund laser-interferometer
WO1995020144A1 (en) 1994-01-20 1995-07-27 British Telecommunications Public Limited Company Optical wavelength sensor
JPH07226524A (ja) * 1994-02-10 1995-08-22 Olympus Optical Co Ltd 光電変換装置
US5825792A (en) * 1996-07-11 1998-10-20 Northern Telecom Limited Wavelength monitoring and control assembly for WDM optical transmission systems
JP3745097B2 (ja) 1997-10-14 2006-02-15 富士通株式会社 波長のモニタリング及び波長制御のための光デバイス
US6186937B1 (en) * 1999-07-30 2001-02-13 Lucent Technologies, Inc. Method and device for obtaining a desired phase of optical characteristic of a fabry-perot etalon

Also Published As

Publication number Publication date
SE517341C2 (sv) 2002-05-28
EP1269586A1 (de) 2003-01-02
CN1404640A (zh) 2003-03-19
SE0000041L (sv) 2001-07-11
JP2003520439A (ja) 2003-07-02
ATE275764T1 (de) 2004-09-15
WO2001052369A1 (en) 2001-07-19
CN1178342C (zh) 2004-12-01
US6639679B2 (en) 2003-10-28
TW484269B (en) 2002-04-21
EP1269586B1 (de) 2004-09-08
US20010007501A1 (en) 2001-07-12
DE60105403T2 (de) 2005-09-29
AU2001227209A1 (en) 2001-07-24
SE0000041D0 (sv) 2000-01-10

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Legal Events

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