DE60045467D1 - Mikroelektromechanische optische Isolatoren - Google Patents

Mikroelektromechanische optische Isolatoren

Info

Publication number
DE60045467D1
DE60045467D1 DE60045467T DE60045467T DE60045467D1 DE 60045467 D1 DE60045467 D1 DE 60045467D1 DE 60045467 T DE60045467 T DE 60045467T DE 60045467 T DE60045467 T DE 60045467T DE 60045467 D1 DE60045467 D1 DE 60045467D1
Authority
DE
Germany
Prior art keywords
optical isolators
microelectromechanical optical
microelectromechanical
isolators
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60045467T
Other languages
English (en)
Inventor
David John Bishop
Randy Clinton Giles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia of America Corp
Original Assignee
Lucent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucent Technologies Inc filed Critical Lucent Technologies Inc
Application granted granted Critical
Publication of DE60045467D1 publication Critical patent/DE60045467D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/3552—1x1 switch, e.g. on/off switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3598—Switching means directly located between an optoelectronic element and waveguides, including direct displacement of either the element or the waveguide, e.g. optical pulse generation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Optical Communication System (AREA)
DE60045467T 1999-11-10 2000-10-30 Mikroelektromechanische optische Isolatoren Expired - Lifetime DE60045467D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16445799P 1999-11-10 1999-11-10
US09/515,412 US6441360B1 (en) 1999-11-10 2000-02-29 MEMS optical isolators

Publications (1)

Publication Number Publication Date
DE60045467D1 true DE60045467D1 (de) 2011-02-17

Family

ID=26860579

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60045467T Expired - Lifetime DE60045467D1 (de) 1999-11-10 2000-10-30 Mikroelektromechanische optische Isolatoren

Country Status (5)

Country Link
US (1) US6441360B1 (de)
EP (1) EP1099971B1 (de)
JP (1) JP2001194597A (de)
CA (1) CA2324836C (de)
DE (1) DE60045467D1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6449406B1 (en) 1999-05-28 2002-09-10 Omm, Inc. Micromachined optomechanical switching devices
US6445840B1 (en) 1999-05-28 2002-09-03 Omm, Inc. Micromachined optical switching devices
US6445841B1 (en) 1999-05-28 2002-09-03 Omm, Inc. Optomechanical matrix switches including collimator arrays
US6850664B2 (en) * 2001-12-14 2005-02-01 General Electric Company Fiber optic converters for incremental shaft encoders
KR100541090B1 (ko) * 2003-10-17 2006-01-10 삼성전기주식회사 광감쇠기 일체형 파장분할다중화장치
JP5027617B2 (ja) * 2007-10-30 2012-09-19 エーエルティー株式会社 共振周波数および最大光学振り角の測定方法
US8260151B2 (en) * 2008-04-18 2012-09-04 Freescale Semiconductor, Inc. Optical communication integration
US8014682B2 (en) * 2008-04-18 2011-09-06 Freescale Semiconductor, Inc. Free-space optical communication system
US8724201B2 (en) 2011-07-20 2014-05-13 Brian Albus MEMS actuator and MEMS actuated shutter mechanism

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4580873A (en) * 1983-12-30 1986-04-08 At&T Bell Laboratories Optical matrix switch
FR2618914B1 (fr) * 1987-07-31 1991-12-06 Alain Souloumiac Perfectionnements apportes aux interrupteurs optomagnetiques
DE19728598C2 (de) * 1997-07-04 2000-12-14 Bosch Gmbh Robert Mikromechanische Spiegeleinrichtung
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
US6137105A (en) * 1998-06-02 2000-10-24 Science Applications International Corporation Multiple parallel source scanning device

Also Published As

Publication number Publication date
CA2324836C (en) 2003-12-23
EP1099971B1 (de) 2011-01-05
EP1099971A3 (de) 2003-05-21
US6441360B1 (en) 2002-08-27
EP1099971A2 (de) 2001-05-16
JP2001194597A (ja) 2001-07-19
CA2324836A1 (en) 2001-05-10

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