DE60041778D1 - Gasreinigungsvorrichtung mit integrierter sorptions- und filtervorrichtung - Google Patents

Gasreinigungsvorrichtung mit integrierter sorptions- und filtervorrichtung

Info

Publication number
DE60041778D1
DE60041778D1 DE60041778T DE60041778T DE60041778D1 DE 60041778 D1 DE60041778 D1 DE 60041778D1 DE 60041778 T DE60041778 T DE 60041778T DE 60041778 T DE60041778 T DE 60041778T DE 60041778 D1 DE60041778 D1 DE 60041778D1
Authority
DE
Germany
Prior art keywords
integrated
gas cleaning
manufacture
cleaning device
simpler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60041778T
Other languages
English (en)
Inventor
Piere J Arquin
Nels W Lindahl
Mark A Canaan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris GP Inc
Original Assignee
SAES Pure Gas Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAES Pure Gas Inc filed Critical SAES Pure Gas Inc
Application granted granted Critical
Publication of DE60041778D1 publication Critical patent/DE60041778D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • C01B23/0036—Physical processing only
    • C01B23/0052—Physical processing only by adsorption in solids
    • C01B23/0084—Physical processing only by adsorption in solids in getters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
    • B01D46/0036—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions by adsorption or absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B01D46/4263—Means for active heating or cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B01D46/4272—Special valve constructions adapted to filters or filter elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/66—Regeneration of the filtering material or filter elements inside the filter
    • B01D46/80—Chemical processes for the removal of the retained particles, e.g. by burning
    • B01D46/84—Chemical processes for the removal of the retained particles, e.g. by burning by heating only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0423—Beds in columns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0438—Cooling or heating systems
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C01B21/0405—Purification or separation processes
    • C01B21/0433—Physical processing only
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C01B21/0405—Purification or separation processes
    • C01B21/0433—Physical processing only
    • C01B21/045—Physical processing only by adsorption in solids
    • C01B21/0483—Physical processing only by adsorption in solids in getters
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • C01B23/0036—Physical processing only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/112—Metals or metal compounds not provided for in B01D2253/104 or B01D2253/106
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/10—Nitrogen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/18—Noble gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/108—Hydrogen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40007—Controlling pressure or temperature swing adsorption
    • B01D2259/40009—Controlling pressure or temperature swing adsorption using sensors or gas analysers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/65—Employing advanced heat integration, e.g. Pinch technology
    • B01D2259/652—Employing advanced heat integration, e.g. Pinch technology using side coolers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0446—Means for feeding or distributing gases
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/0053—Hydrogen
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/10—Process efficiency
    • Y02P20/129—Energy recovery, e.g. by cogeneration, H2recovery or pressure recovery turbines
DE60041778T 1999-07-12 2000-07-12 Gasreinigungsvorrichtung mit integrierter sorptions- und filtervorrichtung Expired - Lifetime DE60041778D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14337799P 1999-07-12 1999-07-12
PCT/US2000/019044 WO2001003812A1 (en) 1999-07-12 2000-07-12 Gas purification system with an integrated hydrogen sorption and filter assembly

Publications (1)

Publication Number Publication Date
DE60041778D1 true DE60041778D1 (de) 2009-04-23

Family

ID=22503810

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60041778T Expired - Lifetime DE60041778D1 (de) 1999-07-12 2000-07-12 Gasreinigungsvorrichtung mit integrierter sorptions- und filtervorrichtung

Country Status (12)

Country Link
EP (1) EP1242165B1 (de)
JP (1) JP2003505221A (de)
KR (1) KR100642389B1 (de)
CN (1) CN1147346C (de)
AT (1) ATE424917T1 (de)
AU (1) AU6093200A (de)
CA (1) CA2377329C (de)
DE (1) DE60041778D1 (de)
MY (1) MY127037A (de)
NO (1) NO20016212L (de)
TW (1) TW518250B (de)
WO (1) WO2001003812A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE462484T1 (de) * 2001-04-30 2010-04-15 Battelle Memorial Institute Schnell zyklisches temperaturwechsel- sorptionsverfahren und dessen vorrichtung zur trennung/reinigung von fluiden
FR2855758B1 (fr) * 2003-06-05 2005-07-22 Biomerieux Sa Composition comprenant la polyproteine ns3/ns4 et le polypeptide ns5b du vhc, vecteurs d'expression incluant les sequences nucleiques correspondantes et leur utilisation en therapeutique
JP4788924B2 (ja) * 2005-02-14 2011-10-05 国立大学法人九州工業大学 原子状水素吸着除去方法およびその装置
JP6577848B2 (ja) * 2014-12-26 2019-09-18 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． ガス吸着材、及びこれを用いた真空断熱材
CN109141043B (zh) * 2018-07-13 2020-02-04 温州申汇合金有限公司 一种合金精炼设备的废气回收处理设备
CN110345635A (zh) * 2019-07-18 2019-10-18 大连中鼎化学有限公司 一种气体加热器
CN110368751A (zh) * 2019-07-18 2019-10-25 大连中鼎化学有限公司 一种气体快速加热纯化装置
CN110302631A (zh) * 2019-07-18 2019-10-08 大连中鼎化学有限公司 一种可在线更换吸附柱的氩气、氦气和氢气的纯化装置及其工艺
CN112584597A (zh) * 2019-09-30 2021-03-30 中国科学院大连化学物理研究所 加热与射频放电等离子体激活大体积吸气剂并增强吸附速率的装置
CN112584595A (zh) * 2019-09-30 2021-03-30 中国科学院大连化学物理研究所 射频放电等离子体激活吸气剂并增强其吸附速率的装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2701624A (en) * 1951-04-16 1955-02-08 Selas Corp Of America Gas cleaner
IT1115156B (it) * 1979-04-06 1986-02-03 Getters Spa Leghe zr-fe per l'assorbimento di idrogeno a basse temperature
US4687650A (en) * 1981-07-02 1987-08-18 Ergenics, Inc. Methods of extracting hydrogen from a gas
JPS61107919A (ja) * 1984-10-30 1986-05-26 Taiyo Sanso Kk ガス精製装置
US4942019A (en) * 1988-09-28 1990-07-17 Ergenics, Inc. Gas purifier
JPH02293310A (ja) * 1989-05-09 1990-12-04 Japan Pionics Co Ltd 希ガスの高純度精製装置
US5238469A (en) * 1992-04-02 1993-08-24 Saes Pure Gas, Inc. Method and apparatus for removing residual hydrogen from a purified gas
CA2117319A1 (en) * 1993-07-12 1995-01-13 John D. Baker Method for the purification of noble gases, nitrogen and hydrogen
JP3462560B2 (ja) * 1994-03-04 2003-11-05 日本パイオニクス株式会社 水素ガスの精製方法
AU6595096A (en) * 1995-07-21 1997-02-18 Ultrapure Systems, Inc. Single gas purifier vessel and heat exchanger
US5902561A (en) * 1995-09-29 1999-05-11 D.D.I. Limited Low temperature inert gas purifier
WO1997035805A1 (en) * 1996-03-28 1997-10-02 Saes Pure Gas, Inc. Method and apparatus for purifying hydrogen gas
US6068685A (en) * 1997-10-15 2000-05-30 Saes Pure Gas, Inc. Semiconductor manufacturing system with getter safety device

Also Published As

Publication number Publication date
TW518250B (en) 2003-01-21
CN1361709A (zh) 2002-07-31
NO20016212D0 (no) 2001-12-19
CA2377329A1 (en) 2001-01-18
CN1147346C (zh) 2004-04-28
CA2377329C (en) 2008-07-08
EP1242165B1 (de) 2009-03-11
NO20016212L (no) 2002-03-05
AU6093200A (en) 2001-01-30
KR20020026537A (ko) 2002-04-10
MY127037A (en) 2006-11-30
JP2003505221A (ja) 2003-02-12
KR100642389B1 (ko) 2006-11-03
WO2001003812A1 (en) 2001-01-18
EP1242165A4 (de) 2003-01-15
EP1242165A1 (de) 2002-09-25
ATE424917T1 (de) 2009-03-15

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