DE60027740D1 - Glasfasergekoppeltes elektronen-bildaufnahmegerät mit reduziertem streulicht unter verwendung von glasfasern mit absorbierender umhüllung - Google Patents

Glasfasergekoppeltes elektronen-bildaufnahmegerät mit reduziertem streulicht unter verwendung von glasfasern mit absorbierender umhüllung

Info

Publication number
DE60027740D1
DE60027740D1 DE60027740T DE60027740T DE60027740D1 DE 60027740 D1 DE60027740 D1 DE 60027740D1 DE 60027740 T DE60027740 T DE 60027740T DE 60027740 T DE60027740 T DE 60027740T DE 60027740 D1 DE60027740 D1 DE 60027740D1
Authority
DE
Germany
Prior art keywords
opticed
fiber
recording device
image recording
glass fibers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60027740T
Other languages
English (en)
Other versions
DE60027740T2 (de
Inventor
E Mooney
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gatan Inc
Original Assignee
Gatan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gatan Inc filed Critical Gatan Inc
Application granted granted Critical
Publication of DE60027740D1 publication Critical patent/DE60027740D1/de
Publication of DE60027740T2 publication Critical patent/DE60027740T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging ; Apparatus specially adapted therefor, e.g. cameras, TV-cameras, photographic equipment, exposure control; Optical subsystems specially adapted therefor, e.g. microscopes for observing image on luminescent screen
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
DE60027740T 1999-09-30 2000-09-29 Glasfasergekoppeltes elektronen-bildaufnahmegerät mit reduziertem streulicht unter verwendung von glasfasern mit absorbierender umhüllung Expired - Lifetime DE60027740T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15679999P 1999-09-30 1999-09-30
US156799P 1999-09-30
PCT/US2000/026902 WO2001024218A1 (en) 1999-09-30 2000-09-29 Electron image detector coupled by optical fibers with absorbing outer cladding to reduce blurring

Publications (2)

Publication Number Publication Date
DE60027740D1 true DE60027740D1 (de) 2006-06-08
DE60027740T2 DE60027740T2 (de) 2006-09-21

Family

ID=22561140

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60027740T Expired - Lifetime DE60027740T2 (de) 1999-09-30 2000-09-29 Glasfasergekoppeltes elektronen-bildaufnahmegerät mit reduziertem streulicht unter verwendung von glasfasern mit absorbierender umhüllung

Country Status (4)

Country Link
US (2) US6455860B1 (de)
EP (1) EP1218919B1 (de)
DE (1) DE60027740T2 (de)
WO (1) WO2001024218A1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000131444A (ja) * 1998-10-28 2000-05-12 Canon Inc 放射線検出装置、放射線検出システム、及び放射線検出装置の製造方法
EP1218919B1 (de) * 1999-09-30 2006-05-03 Gatan, Inc. Glasfasergekoppeltes elektronen-bildaufnahmegerät mit reduziertem streulicht unter verwendung von glasfasern mit absorbierender umhüllung
US6800870B2 (en) * 2000-12-20 2004-10-05 Michel Sayag Light stimulating and collecting methods and apparatus for storage-phosphor image plates
US6927859B2 (en) 2001-03-08 2005-08-09 The Hong Kong Polytechnic University Microdensitometer system with micrometer resolution for reading radiochromic films
US6770885B2 (en) * 2001-08-29 2004-08-03 General Electric Company Systems and methods for detecting ionizing radiation with an imaging system
TW589723B (en) * 2001-09-10 2004-06-01 Ebara Corp Detecting apparatus and device manufacturing method
JP3870156B2 (ja) * 2002-02-07 2007-01-17 キヤノン株式会社 ファイバープレートとその製造方法、放射線撮像装置、及び放射線撮像システム
US7352909B2 (en) * 2003-06-02 2008-04-01 Seiko Epson Corporation Weighted overcomplete de-noising
US7091492B2 (en) * 2004-12-13 2006-08-15 Ropintassco Holdings, L.P. Imaging device comprising optically coupled fiber optic plate assembly
US7324278B2 (en) * 2005-02-07 2008-01-29 Huei-Pei Kuo Black matrix light guide screen display
US8477906B2 (en) * 2007-03-05 2013-07-02 Trustees Of Boston University High definition scintillation detector for medicine, homeland security and non-destructive evaluation
US8320704B2 (en) * 2007-09-21 2012-11-27 Gatan, Inc. Method for creating reference images in electron microscopes
US7745786B2 (en) * 2008-03-19 2010-06-29 Fama Leo A Method and apparatus allowing simultaneous direct observation and electronic capture of scintillation images in an electron microscope
US20110006205A1 (en) * 2009-07-12 2011-01-13 Raymond Browning Ambient pressure photoelectron microscope
US8558207B2 (en) * 2009-09-29 2013-10-15 Carestream Health, Inc. Photostimulable plate reading device
US8431897B2 (en) * 2011-01-26 2013-04-30 The University Of Tokyo Transmission electron microscope
EP2521157A1 (de) * 2011-05-05 2012-11-07 Fei Company Segmentierter Detektor aus Szintillatormaterial für geladene Partikel
WO2013192608A1 (en) 2012-06-22 2013-12-27 Edax, Inc. Method and apparatus for electron pattern imaging
WO2014205538A1 (en) * 2013-06-28 2014-12-31 Teledyne Dalsa, Inc. Method and system for assembly of radiological imaging sensor
KR101816581B1 (ko) * 2013-12-23 2018-01-09 엘지전자 주식회사 측정장치
US10809393B2 (en) 2015-04-23 2020-10-20 Fermi Research Alliance, Llc Monocrystal-based microchannel plate image intensifier
US11282671B2 (en) * 2016-07-28 2022-03-22 Hitachi High-Tech Corporation Charged-particle beam apparatus
US11183314B2 (en) 2018-05-14 2021-11-23 University Of Florida Research Foundation, Inc. Methods and compositions for minimizing x-ray scattering artifacts
JP2022115300A (ja) * 2021-01-28 2022-08-09 浜松ホトニクス株式会社 発光素子、光検出モジュール、発光素子の製造方法、及び走査型電子顕微鏡

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2825260A (en) 1954-11-19 1958-03-04 O'brien Brian Optical image forming devices
US3703660A (en) * 1971-08-19 1972-11-21 Corning Glass Works Photochromic fiber optic image storage device
US4946238A (en) 1984-01-27 1990-08-07 University Of Pittsburgh Fiber optic coupler
US5846638A (en) 1988-08-30 1998-12-08 Onyx Optics, Inc. Composite optical and electro-optical devices
US5852622A (en) 1988-08-30 1998-12-22 Onyx Optics, Inc. Solid state lasers with composite crystal or glass components
US4962306A (en) * 1989-12-04 1990-10-09 Intenational Business Machines Corporation Magnetically filtered low loss scanning electron microscopy
US5754716A (en) 1992-02-07 1998-05-19 Baxter International Inc. Optical mode mixer using fiber optic bundle
US5319731A (en) * 1992-10-02 1994-06-07 Eastman Kodak Company Fiber-optic array of limited acceptance angle
US5635720A (en) 1995-10-03 1997-06-03 Gatan, Inc. Resolution-enhancement device for an optically-coupled image sensor for an electron microscope
US5990483A (en) * 1997-10-06 1999-11-23 El-Mul Technologies Ltd. Particle detection and particle detector devices
EP1218919B1 (de) * 1999-09-30 2006-05-03 Gatan, Inc. Glasfasergekoppeltes elektronen-bildaufnahmegerät mit reduziertem streulicht unter verwendung von glasfasern mit absorbierender umhüllung

Also Published As

Publication number Publication date
US6570164B2 (en) 2003-05-27
DE60027740T2 (de) 2006-09-21
US20020190219A1 (en) 2002-12-19
EP1218919A1 (de) 2002-07-03
US6455860B1 (en) 2002-09-24
WO2001024218A1 (en) 2001-04-05
EP1218919B1 (de) 2006-05-03

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