DE60001068D1 - Elektrodenmaterial für einen Gasentladungslaser und Gaslaser - Google Patents
Elektrodenmaterial für einen Gasentladungslaser und GaslaserInfo
- Publication number
- DE60001068D1 DE60001068D1 DE60001068T DE60001068T DE60001068D1 DE 60001068 D1 DE60001068 D1 DE 60001068D1 DE 60001068 T DE60001068 T DE 60001068T DE 60001068 T DE60001068 T DE 60001068T DE 60001068 D1 DE60001068 D1 DE 60001068D1
- Authority
- DE
- Germany
- Prior art keywords
- laser
- gas
- electrode material
- gas discharge
- discharge laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007772 electrode material Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70025—Production of exposure light, i.e. light sources by lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0388—Compositions, materials or coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Lasers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP20000109570 EP1174965B1 (de) | 2000-05-04 | 2000-05-04 | Elektrodenmaterial für einen Gasentladungslaser und Gaslaser |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60001068D1 true DE60001068D1 (de) | 2003-01-30 |
DE60001068T2 DE60001068T2 (de) | 2004-06-03 |
Family
ID=8168625
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE2000601068 Expired - Fee Related DE60001068T2 (de) | 2000-05-04 | 2000-05-04 | Elektrodenmaterial für einen Gasentladungslaser und Gaslaser |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP1174965B1 (de) |
DE (1) | DE60001068T2 (de) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6184882A (ja) * | 1984-10-02 | 1986-04-30 | Matsushita Electric Ind Co Ltd | ガスレ−ザ発振装置 |
DE3817145C2 (de) * | 1987-06-03 | 1996-02-01 | Lambda Physik Forschung | Elektrode für gepulste Gas-Laser und ihre Verwendung |
JPH0322578A (ja) * | 1989-06-20 | 1991-01-30 | Matsushita Electric Ind Co Ltd | ガスレーザ発振装置 |
JP3017301B2 (ja) * | 1991-02-18 | 2000-03-06 | 大阪酸素工業株式会社 | 不動態膜の形成方法 |
JPH07226550A (ja) * | 1994-02-14 | 1995-08-22 | Mitsubishi Electric Corp | 放電励起エキシマレーザ装置 |
JP3874123B2 (ja) * | 1996-03-07 | 2007-01-31 | キヤノン株式会社 | 放電電極並びにエキシマレーザー発振装置及びステッパー |
-
2000
- 2000-05-04 DE DE2000601068 patent/DE60001068T2/de not_active Expired - Fee Related
- 2000-05-04 EP EP20000109570 patent/EP1174965B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1174965B1 (de) | 2002-12-18 |
EP1174965A1 (de) | 2002-01-23 |
DE60001068T2 (de) | 2004-06-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de | ||
8370 | Indication of lapse of patent is to be deleted | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |