DE518372T1 - Vorrichtung zur bewegungsbeschraenkung eines rollenkaefigs. - Google Patents

Vorrichtung zur bewegungsbeschraenkung eines rollenkaefigs.

Info

Publication number
DE518372T1
DE518372T1 DE199292109949T DE92109949T DE518372T1 DE 518372 T1 DE518372 T1 DE 518372T1 DE 199292109949 T DE199292109949 T DE 199292109949T DE 92109949 T DE92109949 T DE 92109949T DE 518372 T1 DE518372 T1 DE 518372T1
Authority
DE
Germany
Prior art keywords
limiting
movement
roll cage
cage
roll
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE199292109949T
Other languages
English (en)
Inventor
Donald J. Deceased Us Mccarthy
Manuel Berkeley Ca 94708 Us Pastor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Etec Systems Inc
Original Assignee
Etec Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Etec Systems Inc filed Critical Etec Systems Inc
Publication of DE518372T1 publication Critical patent/DE518372T1/de
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/306—Means to synchronise movements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/04—Ball or roller bearings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Bearings For Parts Moving Linearly (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE199292109949T 1991-06-12 1992-06-12 Vorrichtung zur bewegungsbeschraenkung eines rollenkaefigs. Pending DE518372T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/713,929 US5180230A (en) 1991-06-12 1991-06-12 Rolling element cage constraint

Publications (1)

Publication Number Publication Date
DE518372T1 true DE518372T1 (de) 1993-07-22

Family

ID=24868117

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69207074T Expired - Fee Related DE69207074T2 (de) 1991-06-12 1992-06-12 Vorrichtung zur Bewegungsbeschränkung eines Rollenkäfigs
DE199292109949T Pending DE518372T1 (de) 1991-06-12 1992-06-12 Vorrichtung zur bewegungsbeschraenkung eines rollenkaefigs.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69207074T Expired - Fee Related DE69207074T2 (de) 1991-06-12 1992-06-12 Vorrichtung zur Bewegungsbeschränkung eines Rollenkäfigs

Country Status (5)

Country Link
US (1) US5180230A (de)
EP (1) EP0518372B1 (de)
JP (1) JPH05217874A (de)
CA (1) CA2071085C (de)
DE (2) DE69207074T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3455016B2 (ja) * 1996-06-20 2003-10-06 シグマ光機株式会社 直線運動ステージの鋼球ガイド溝加工方法およびその装置
JP3077605B2 (ja) * 1996-10-18 2000-08-14 日新電機株式会社 ホルダ駆動装置
TWI242112B (en) * 1999-04-19 2005-10-21 Asml Netherlands Bv Lithographic projection apparatus and method of operating a lithographic projection apparatus
NL1013116C2 (nl) * 1999-09-22 2001-04-03 Onstream B V Rechtgeleiding.
JP2004028329A (ja) * 2003-03-28 2004-01-29 Sigma Koki Kk 直線運動ステージ
JP5955964B2 (ja) * 2011-09-12 2016-07-20 マッパー・リソグラフィー・アイピー・ビー．ブイ． ターゲット処理ツールのためのガイダンス
WO2019193759A1 (ja) 2018-04-06 2019-10-10 オリンパス株式会社 スライドアクチュエータ
CN209380278U (zh) * 2018-12-07 2019-09-13 惠州迪芬尼声学科技股份有限公司 一种滑动导轨
WO2020179018A1 (ja) * 2019-03-06 2020-09-10 オリンパス株式会社 スライドアクチュエータ
WO2021102295A1 (en) 2019-11-21 2021-05-27 Thomas Baer Systems and methods for detecting running and walking strides and foot strikes

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1065748B (de) * 1957-09-14 1959-09-17 Robert Blohm, Hamburg-Bergedorf Wälzlagerung für Werkzeug-, insbesondere Schleifmaschinentische
US3563617A (en) * 1969-06-09 1971-02-16 James L Pritchard Antifriction
SU750161A1 (ru) * 1978-01-06 1980-07-23 Предприятие П/Я В-2572 Упора качени дл возвратно-поступательного перемещени
JPS5551119A (en) * 1978-10-12 1980-04-14 Toshiba Corp Linear bearing device
JPS5948888B2 (ja) * 1978-10-31 1984-11-29 株式会社東芝 リニアベアリング
DE3433460A1 (de) * 1984-08-22 1986-03-06 Parke, Davis & Co., Morris Plains, N.J. Fuehrungseinrichtung
JPS62155325A (ja) * 1985-12-27 1987-07-10 Makino Milling Mach Co Ltd リニアベアリング装置
DE3637955A1 (de) * 1986-11-07 1988-05-11 Skf Linearsysteme Gmbh Linearwaelzlager
US4974291A (en) * 1988-09-22 1990-12-04 R. J. McNerney Shipping carton for further processing of product
DE4028383A1 (de) * 1989-09-12 1991-03-21 Hydrel Ag Waelz-linearfuehrung

Also Published As

Publication number Publication date
CA2071085A1 (en) 1992-12-13
EP0518372A1 (de) 1992-12-16
EP0518372B1 (de) 1995-12-27
JPH05217874A (ja) 1993-08-27
US5180230A (en) 1993-01-19
CA2071085C (en) 1998-11-24
DE69207074T2 (de) 1996-05-15
DE69207074D1 (de) 1996-02-08

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