DE502007000650D1 - Vorrichtung zur erzeugung eines plasma-jets - Google Patents

Vorrichtung zur erzeugung eines plasma-jets

Info

Publication number
DE502007000650D1
DE502007000650D1 DE502007000650T DE502007000650T DE502007000650D1 DE 502007000650 D1 DE502007000650 D1 DE 502007000650D1 DE 502007000650 T DE502007000650 T DE 502007000650T DE 502007000650 T DE502007000650 T DE 502007000650T DE 502007000650 D1 DE502007000650 D1 DE 502007000650D1
Authority
DE
Germany
Prior art keywords
plasma jet
generating
discharge tube
suppressed
electrically conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE502007000650T
Other languages
English (en)
Inventor
Andrej Ignatkov
Jens Raacke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maschinenfabrik Reinhausen GmbH
Scheubeck GmbH and Co
Original Assignee
Maschinenfabrik Reinhausen GmbH
Maschinenfabrik Reinhausen Gebrueder Scheubeck GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Maschinenfabrik Reinhausen GmbH, Maschinenfabrik Reinhausen Gebrueder Scheubeck GmbH and Co KG filed Critical Maschinenfabrik Reinhausen GmbH
Priority to DE502007000650T priority Critical patent/DE502007000650D1/de
Publication of DE502007000650D1 publication Critical patent/DE502007000650D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/245—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using internal electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/246—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using external electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Fluid Mechanics (AREA)
  • Plasma Technology (AREA)
  • Surgical Instruments (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
DE502007000650T 2006-03-16 2007-02-17 Vorrichtung zur erzeugung eines plasma-jets Active DE502007000650D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE502007000650T DE502007000650D1 (de) 2006-03-16 2007-02-17 Vorrichtung zur erzeugung eines plasma-jets

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102006012100A DE102006012100B3 (de) 2006-03-16 2006-03-16 Vorrichtung zur Erzeugung eines Plasma-Jets
DE502007000650T DE502007000650D1 (de) 2006-03-16 2007-02-17 Vorrichtung zur erzeugung eines plasma-jets
PCT/EP2007/001386 WO2007104404A1 (de) 2006-03-16 2007-02-17 Vorrichtung zur erzeugung eines plasma-jets

Publications (1)

Publication Number Publication Date
DE502007000650D1 true DE502007000650D1 (de) 2009-06-04

Family

ID=38066583

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102006012100A Expired - Fee Related DE102006012100B3 (de) 2006-03-16 2006-03-16 Vorrichtung zur Erzeugung eines Plasma-Jets
DE502007000650T Active DE502007000650D1 (de) 2006-03-16 2007-02-17 Vorrichtung zur erzeugung eines plasma-jets

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE102006012100A Expired - Fee Related DE102006012100B3 (de) 2006-03-16 2006-03-16 Vorrichtung zur Erzeugung eines Plasma-Jets

Country Status (8)

Country Link
US (1) US20090155137A1 (de)
EP (1) EP1994807B1 (de)
JP (1) JP2009529772A (de)
KR (1) KR20080104225A (de)
CN (1) CN101326863A (de)
AT (1) ATE429799T1 (de)
DE (2) DE102006012100B3 (de)
WO (1) WO2007104404A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007046214B4 (de) 2007-09-27 2012-05-31 Maschinenfabrik Reinhausen Gmbh Vorrichtung zur Plasmabehandlung
DE102008009171B4 (de) * 2008-02-14 2014-07-17 Maschinenfabrik Reinhausen Gmbh Verfahren zum Verkleben von Silikon- und Elastomerbauteilen
DE102008028167A1 (de) 2008-06-12 2009-12-31 Maschinenfabrik Reinhausen Gmbh Vorrichtung zur Erzeugung eines Plasma-Jets
DE202008018264U1 (de) 2008-06-12 2012-07-04 Maschinenfabrik Reinhausen Gmbh Vorrichtung zur Erzeugung eines Plasma-Jets
CA3198302A1 (en) 2009-02-08 2010-08-12 Ap Solutions, Inc. Plasma source and method for removing materials from substrates utilizing pressure waves
CN101652016B (zh) * 2009-08-27 2011-12-28 中国科学技术大学 常压线状冷等离子体射流产生装置
DE102012104137A1 (de) 2012-05-11 2013-11-14 Maschinenfabrik Reinhausen Gmbh Feldgesteuerter Verbundisolator
US9378928B2 (en) * 2014-05-29 2016-06-28 Applied Materials, Inc. Apparatus for treating a gas in a conduit
CN104846171A (zh) * 2015-06-04 2015-08-19 马钢(集团)控股有限公司 一种电工钢退火还原用氢等离子发生装置及其还原方法
CN105744713B (zh) * 2016-03-28 2018-10-23 大连民族大学 一种阵列针-板式液相等离子体射流发生装置
CN105848399B (zh) * 2016-05-19 2018-08-14 北京交通大学 一种辉光放电射流等离子体生成结构
CN106304588A (zh) * 2016-08-31 2017-01-04 大连民族大学 一种等离子体射流装置
CN107801287B (zh) * 2017-11-29 2019-07-26 浙江省农业科学院 一种杀菌降农残低温等离子体发生器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3642375A1 (de) * 1986-12-11 1988-06-23 Castolin Sa Verfahren zur aufbringung einer innenbeschichtung in rohre od. dgl. hohlraeume engen querschnittes sowie plasmaspritzbrenner dafuer
DE4136297A1 (de) * 1991-11-04 1993-05-06 Plasma Electronic Gmbh, 7024 Filderstadt, De Vorrichtung zur lokalen erzeugung eines plasmas in einer behandlungskammer mittels mikrowellenanregung
FR2707824B1 (fr) * 1993-07-15 1995-12-01 Frederic Girard Torche plasma transféré (PTA) à cathode radiale.
DE19503205C1 (de) * 1995-02-02 1996-07-11 Muegge Electronic Gmbh Vorrichtung zur Erzeugung von Plasma
DE19722272A1 (de) * 1997-05-28 1998-12-03 Leybold Systems Gmbh Vorrichtung zur Erzeugung von Plasma
AT4599U1 (de) * 2000-06-21 2001-09-25 Inocon Technologie Gmbh Plasmabrenner
US6372298B1 (en) * 2000-07-21 2002-04-16 Ford Global Technologies, Inc. High deposition rate thermal spray using plasma transferred wire arc
US6896854B2 (en) * 2002-01-23 2005-05-24 Battelle Energy Alliance, Llc Nonthermal plasma systems and methods for natural gas and heavy hydrocarbon co-conversion
DE102004029081A1 (de) * 2004-06-16 2006-01-05 Je Plasmaconsult Gmbh Vorrichtung zur Bearbeitung eines Substrates mittels mindestens eines Plasma-Jets

Also Published As

Publication number Publication date
WO2007104404A1 (de) 2007-09-20
ATE429799T1 (de) 2009-05-15
EP1994807B1 (de) 2009-04-22
KR20080104225A (ko) 2008-12-02
US20090155137A1 (en) 2009-06-18
DE102006012100B3 (de) 2007-09-20
CN101326863A (zh) 2008-12-17
EP1994807A1 (de) 2008-11-26
JP2009529772A (ja) 2009-08-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition