DE502006002609D1 - VACUUM PUMP - Google Patents

VACUUM PUMP

Info

Publication number
DE502006002609D1
DE502006002609D1 DE502006002609T DE502006002609T DE502006002609D1 DE 502006002609 D1 DE502006002609 D1 DE 502006002609D1 DE 502006002609 T DE502006002609 T DE 502006002609T DE 502006002609 T DE502006002609 T DE 502006002609T DE 502006002609 D1 DE502006002609 D1 DE 502006002609D1
Authority
DE
Germany
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE502006002609T
Other languages
German (de)
Inventor
Alois Greven
Thomas Longerich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of DE502006002609D1 publication Critical patent/DE502006002609D1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
DE502006002609T 2005-09-01 2006-08-15 VACUUM PUMP Active DE502006002609D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005041500A DE102005041500A1 (en) 2005-09-01 2005-09-01 vacuum pump
PCT/EP2006/065315 WO2007025854A1 (en) 2005-09-01 2006-08-15 Vacuum pump

Publications (1)

Publication Number Publication Date
DE502006002609D1 true DE502006002609D1 (en) 2009-02-26

Family

ID=37115720

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102005041500A Withdrawn DE102005041500A1 (en) 2005-09-01 2005-09-01 vacuum pump
DE502006002609T Active DE502006002609D1 (en) 2005-09-01 2006-08-15 VACUUM PUMP

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE102005041500A Withdrawn DE102005041500A1 (en) 2005-09-01 2005-09-01 vacuum pump

Country Status (6)

Country Link
US (1) US20100303640A1 (en)
EP (1) EP1920160B1 (en)
JP (1) JP2009507166A (en)
CN (1) CN100585188C (en)
DE (2) DE102005041500A1 (en)
WO (1) WO2007025854A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007053980A1 (en) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh vacuum pump
DE102008019472A1 (en) * 2008-04-17 2009-10-22 Oerlikon Leybold Vacuum Gmbh vacuum pump
DE102008019451A1 (en) * 2008-04-17 2009-10-22 Oerlikon Leybold Vacuum Gmbh vacuum pump
CN103038984A (en) * 2010-05-04 2013-04-10 瑞美技术有限责任公司 Electric machine component temperature monitoring
FR2964164B1 (en) * 2010-09-01 2014-05-09 Snecma TURBOMACHINE COMPRISING A ROTATING ELEMENT SUBJECT TO EXTREME CONDITIONS
US20120075070A1 (en) * 2010-09-27 2012-03-29 General Electric Company Real time measurement of rotor surface
DE102010049138A1 (en) * 2010-10-22 2012-04-26 Ksb Aktiengesellschaft Device for pump monitoring
DE102011112748B3 (en) * 2011-09-07 2012-12-27 Maschinenfabrik Reinhausen Gmbh Motor drive for actuating a tap changer
US9046431B2 (en) * 2012-06-28 2015-06-02 Honeywell International Inc. Single ear stator antenna for wireless torque measurement system
CN104005968B (en) * 2014-06-05 2016-01-20 核工业理化工程研究院 The towed molecular pump of rotor surface temperature can be surveyed
CN104612984B (en) * 2015-01-26 2017-02-22 核工业理化工程研究院 Rotor end surface temperature measuring device for traction type molecular pumps
JP2018035684A (en) * 2016-08-29 2018-03-08 株式会社島津製作所 Vacuum pump
EP3443993A1 (en) * 2017-08-17 2019-02-20 Berlin Heart GmbH Pump with a rotor sensor for recording physiologic parameters, flow and motion parameters

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3824857A (en) * 1972-08-07 1974-07-23 Electric Machinery Mfg Co Temperature measuring system for rotating machines
US4723445A (en) * 1986-05-19 1988-02-09 Neotech Industries, Inc. Vehicle wheel and tire pressure monitor
US5252962A (en) * 1990-08-03 1993-10-12 Bio Medic Data Systems System monitoring programmable implantable transponder
US5160925C1 (en) * 1991-04-17 2001-03-06 Halliburton Co Short hop communication link for downhole mwd system
DE4309018A1 (en) * 1993-03-20 1994-09-22 Balzers Pfeiffer Gmbh Temperature measuring arrangement
US5844130A (en) * 1996-04-03 1998-12-01 Ssi Technologies Apparatus for maintaining a constant radial distance between a transmitting circuit and an antenna coil
JP2000064986A (en) * 1998-08-12 2000-03-03 Seiko Seiki Co Ltd Turbo-molecular pump
US6558444B1 (en) * 1998-12-03 2003-05-06 Psi Global Ltd. Fluid filters having a concealed machine-readable identification
DE19857453B4 (en) * 1998-12-12 2008-03-20 Pfeiffer Vacuum Gmbh Temperature monitoring on rotors of vacuum pumps
US6369712B2 (en) * 1999-05-17 2002-04-09 The Goodyear Tire & Rubber Company Response adjustable temperature sensor for transponder
DE10018513A1 (en) * 2000-04-14 2001-10-18 Knorr Bremse Systeme Brake disc monitoring device and monitoring method for monitoring the temperature of brake discs
JP3632561B2 (en) * 2000-05-12 2005-03-23 株式会社デンソー Air pressure detection device and tire condition monitoring system
JP2002039088A (en) * 2000-07-26 2002-02-06 Seiko Instruments Inc Device for body of revolution
DE10114969A1 (en) * 2001-03-27 2002-10-10 Leybold Vakuum Gmbh Turbo molecular pump
JP2003269367A (en) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd Vacuum pump
DE20206267U1 (en) * 2002-04-20 2003-08-28 Leybold Vakuum Gmbh vacuum pump
US6739840B2 (en) * 2002-05-22 2004-05-25 Applied Materials Inc Speed control of variable speed pump
JP4082345B2 (en) * 2003-12-12 2008-04-30 トヨタ自動車株式会社 Wheel state detection device, wheel and vehicle body
US20060078435A1 (en) * 2004-08-19 2006-04-13 Metropolitan Industries Pump monitoring system
US7336153B2 (en) * 2005-06-30 2008-02-26 Hewlett-Packard Development Company, L.P. Wireless temperature monitoring for an electronics system
EP1949053A2 (en) * 2005-10-07 2008-07-30 Chemimage Corporation System and method for a chemical imaging threat assessor with a probe

Also Published As

Publication number Publication date
EP1920160B1 (en) 2009-01-07
US20100303640A1 (en) 2010-12-02
CN100585188C (en) 2010-01-27
EP1920160A1 (en) 2008-05-14
WO2007025854A1 (en) 2007-03-08
DE102005041500A1 (en) 2007-03-08
JP2009507166A (en) 2009-02-19
CN101253332A (en) 2008-08-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition