CN101253332A - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
- Publication number
- CN101253332A CN101253332A CNA2006800316385A CN200680031638A CN101253332A CN 101253332 A CN101253332 A CN 101253332A CN A2006800316385 A CNA2006800316385 A CN A2006800316385A CN 200680031638 A CN200680031638 A CN 200680031638A CN 101253332 A CN101253332 A CN 101253332A
- Authority
- CN
- China
- Prior art keywords
- pump
- rotor
- measuring transducer
- transmitting antenna
- pump rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
Abstract
A vacuum pump (10) according to the invention has a pump rotor (14) and a pump stator (12). The pump rotor (14) has an electrical measuring transducer (44), for example a temperature sensor. A transmitting antenna (40), which is provided with the measuring transducer (44), is provided on the pump rotor (14). A receiving antenna (30), which receives measurement values of the measuring transducer (44) from the transmitting antenna (40), is provided on the pump stator (12) so as to be situated opposite the transmitting antenna (40). In this way, accurate measurement values can be transmitted from the pump rotor (14) to the pump stator (12).
Description
Technical field
The present invention relates to a kind of vacuum pump that comprises pump rotor and pump stator.
Background technique
Against vacuum pump-especially atwirl turbomolecular pump, pump rotor may the heating owing to compression heat, frictional heat and other possible influence.The risk that too high temperature of rotor increase pump rotor is damaged, other characteristic that causes fatigue of materials and change pump rotor.Reason if necessary, must monitoring also write down temperature of rotor for this reason.
Temperature of rotor can be measured by relatively more expensive high temperature measurement mode.Alternatively, can be by measuring stator temperature and coming to determine indirectly temperature of rotor from stator temperature derivation temperature of rotor.Measurement is not very accurate and is not suitable for the fast temperature variation of monitoring pump rotor indirectly.
Summary of the invention
Given this, the purpose of this invention is to provide a kind of vacuum pump, wherein, can economy and the measurand of accurate way testing pump rotor.
According to the present invention, this purpose realizes by the feature of claim 1.
According to the present invention, pump rotor comprises the electrical measurement transducer and is connected to the transmitting antenna of measuring transducer.Receiving antenna is arranged on the pump stator place, and receiving antenna is from the measured value of transmitting antenna reception measuring transducer, and transmitting antenna transmits the measured value that is recorded by measuring transducer.Between pump rotor and pump stator, set up the dedicated radio link that is used for the transmission measurement value in this way.Therefore, can the variable physical parameter of pump rotor not carried out expensive high temperature measurement or coarse indirect measurement.Because measuring transducer is positioned at next-door neighbour's pump rotor place, so can very accurately detect relevant parameters.Measured value is transferred to receiving antenna with analog form or digital form from transmitting antenna, can guarantee safety, quick, accurately errorless transmission thus.
Preferably, measuring transducer is a temperature transducer, but it also can be the combination of acceleration transducer or vibration transducer or strain transducer or above-mentioned a plurality of sensors.
In a preferred embodiment, pump stator and pump rotor all are provided with corresponding energy transfer coil, coil on the pump rotor side is connected with measuring transducer by transformer, makes electric energy to be transferred to pump rotor from pump stator by wireless mode, so that be measuring transducer supply electric energy.Two energy transmission line circles form the primary wire and the secondary wire of transformer.By corresponding alternating voltage being supplied to the energy transfer coil on the pump stator side, described alternating voltage just is transferred to the energy transfer coil on the pump rotor side, makes to have electric energy in the pump rotor so that give measuring transducer and other assembly power supply.
Two energy transfer coils also can be the parts of drive motor, and promptly they can be formed by the part of the rotor coil on stator coil on the motor stator side and the engine rotor side.Transmitting antenna and receiving antenna also can be used as the energy transfer coil.
Transmitting antenna and receiving antenna can relative to each other be provided with vertically or radially.Transmitting antenna and receiving antenna can be arranged near the axial plane of pump rotor.But transmitting antenna and receiving antenna also can be arranged to be positioned at the axial plane outside of pump rotor and away from the axial plane of pump rotor.Preferably, one of described antenna is an annular shape.If two antennas are located around rotor shaft, then this is essential.In order to ensure the sufficiently long transmission time, especially when the high rotation speed that per minute more than 10000 changes, the whole circumference of two antennas or most of circumference are overlapping.This make it possible between transmitting antenna and the receiving antenna for a long time or under possible situation transmission measurement value continuously.If two antennas all are annular shape, but discrete, then they can be used separately as primary air and the secondary winding that is used for energy transfer simultaneously.
In a preferred embodiment, transponder is arranged on the pump rotor place, and described transponder only is transmitted to receiving antenna via test oneself the in the future measured value of quantitative change parallel operation of transmitting antenna receiving when request.In this way, the control of corresponding stator side can be adjusted to transmitting measured values with the relevant position at interval and be complementary.Therefore, keep alap transmitting measured values number of times, keep the power requirement of alap rotor thus.Therefore, just can get the component design that is used for to the rotor supplying energy less.
Description of drawings
Embodiments of the present invention hereinafter are described in detail in detail with reference to the accompanying drawings.
Accompanying drawing is the schematic representation of vacuum pump.
Embodiment
Accompanying drawing illustrates the vacuum pump 10 that is designed to turbomolecular pump.Vacuum pump 10 has the pump part that is mainly formed by pump stator 12 and pump rotor 14.Further, vacuum pump has driving and bearing part, and two bearings 16,18 and drive motor 20 wherein are set.
Receiving antenna 30 is set on stator side, receiving antenna 30 that be configured to open wide and around rotor shaft 22 with the circular pattern setting.The receiving antenna 30 of stator side is electrically connected to control module 32, and control module 32 is used to control transmission, reception and the evaluation operation of the signal that is received by receiving antenna 30.
On rotor-side-exactly corresponding annular transmitting antenna 40 is set in relative with receiving antenna 30 vertically position.Further, pump rotor 14 comprises the temperature transducer that is connected to transponder 42, and transponder 42 is connected to transmitting antenna 40 again.
Receiving antenna 30 also is configured to the ring-shaped article that opens wide, and except as receiving antenna 30 function of antenna also as the secondary winding of transformer, receiving antenna 30 forms the primary air of these transformers.Control gear 32 is fed to corresponding alternating voltage in the receiving antenna 30, goes out this alternating voltage at transmitting antenna 40 internal inductions.Axial distance between receiving antenna 30 and the transmitting antenna 40 be several millimeters and can in addition less than 1mm.
In pump rotor 14, transformer 46 is set, 46 pairs of alternating voltages that receive of transformer carry out rectification, this alternating voltage are controlled to constant supply voltage and give measuring transducer 44 and transponder 42 via power line with feeding electric energy.
The wireless radio transmission of the measured value that is provided by the measuring transducer on the pump rotor side makes it possible to comprehensively, accurately and in real time monitors pump rotor.Therefore, when facing damage dangerous because rotor is overheated, motor controller can move rapidly and can avoid to damage or the damage vacuum pump.Further, especially can follow the tracks of and calculate the degree of aging of pump rotor by monitoring and record pump rotor temperature, perhaps the actual life that prolongs vacuum pump significantly by avoiding the pump rotor temperature to raise.
Claims (6)
1. a vacuum pump (10) comprises pump rotor (14) and pump stator (12),
It is characterized in that,
Described pump rotor (14) comprises electrical measurement transducer (44),
Transmitting antenna (40) is arranged on described pump rotor (14) and locates, and described transmitting antenna (40) is connected to described measuring transducer (44), and
Receiving antenna (30) is arranged on described pump stator (12) and locates, and described receiving antenna (30) receives the measured value that is recorded by described measuring transducer (44) from described transmitting antenna (40).
2. vacuum pump as claimed in claim 1 (10), it is characterized in that, corresponding energy transfer coil is arranged on described pump stator (12) and described pump rotor (14) is located, coil on the described pump rotor side is that described measuring transducer (44) provides electric energy, makes electric energy to be transferred to described pump rotor (14) with wireless mode so that give described measuring transducer (44) supply electric energy from described pump stator (12).
3. vacuum pump as claimed in claim 1 or 2 (10) is characterized in that, at least one is an annular shape in described two antennas (30,40).
4. as each described vacuum pump (10) in the claim 1 to 3, it is characterized in that, transponder (42) is arranged on described pump rotor (14) and locates, described transponder (42) is connected to described measuring transducer (44) and described transmitting antenna (40), and is receiving described transponder of when request (42) via the measured value of described transmitting antenna (40) transmission from described measuring transducer.
5. as each described vacuum pump (10) in the claim 1 to 4, it is characterized in that described measuring transducer (44) is a temperature transducer.
6. as each described vacuum pump (10) in the claim 1 to 5, it is characterized in that described vacuum pump (10) is a turbomolecular pump.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102005041500A DE102005041500A1 (en) | 2005-09-01 | 2005-09-01 | vacuum pump |
| DE102005041500.8 | 2005-09-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101253332A true CN101253332A (en) | 2008-08-27 |
| CN100585188C CN100585188C (en) | 2010-01-27 |
Family
ID=37115720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200680031638A Expired - Fee Related CN100585188C (en) | 2005-09-01 | 2006-08-15 | Vacuum pump |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20100303640A1 (en) |
| EP (1) | EP1920160B1 (en) |
| JP (1) | JP2009507166A (en) |
| CN (1) | CN100585188C (en) |
| DE (2) | DE102005041500A1 (en) |
| WO (1) | WO2007025854A1 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103249952A (en) * | 2010-10-22 | 2013-08-14 | Ksb股份公司 | Device for monitoring a pump |
| CN104005968A (en) * | 2014-06-05 | 2014-08-27 | 核工业理化工程研究院 | Traction type molecular pump facilitating measurement of surface temperature of rotor |
| CN104612984A (en) * | 2015-01-26 | 2015-05-13 | 核工业理化工程研究院 | Rotor end surface temperature measuring device for traction type molecular pumps |
| CN107795499A (en) * | 2016-08-29 | 2018-03-13 | 株式会社岛津制作所 | Vavuum pump |
| CN111032110A (en) * | 2017-08-17 | 2020-04-17 | 柏林心脏有限公司 | Pump having rotor sensor for detecting physiological, flow and movement parameters |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007053980A1 (en) * | 2007-11-13 | 2009-05-14 | Pfeiffer Vacuum Gmbh | vacuum pump |
| DE102008019451A1 (en) * | 2008-04-17 | 2009-10-22 | Oerlikon Leybold Vacuum Gmbh | vacuum pump |
| DE102008019472A1 (en) * | 2008-04-17 | 2009-10-22 | Oerlikon Leybold Vacuum Gmbh | vacuum pump |
| MX2012012313A (en) * | 2010-05-04 | 2013-02-26 | Remy Technologies Llc | Electric machine component temperature monitoring. |
| FR2964164B1 (en) * | 2010-09-01 | 2014-05-09 | Snecma | TURBOMACHINE COMPRISING A ROTATING ELEMENT SUBJECT TO EXTREME CONDITIONS |
| US20120075070A1 (en) * | 2010-09-27 | 2012-03-29 | General Electric Company | Real time measurement of rotor surface |
| DE102011112748B3 (en) * | 2011-09-07 | 2012-12-27 | Maschinenfabrik Reinhausen Gmbh | Motor drive for actuating a tap changer |
| US9046431B2 (en) * | 2012-06-28 | 2015-06-02 | Honeywell International Inc. | Single ear stator antenna for wireless torque measurement system |
Family Cites Families (21)
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| US3824857A (en) * | 1972-08-07 | 1974-07-23 | Electric Machinery Mfg Co | Temperature measuring system for rotating machines |
| US4723445A (en) * | 1986-05-19 | 1988-02-09 | Neotech Industries, Inc. | Vehicle wheel and tire pressure monitor |
| US5252962A (en) * | 1990-08-03 | 1993-10-12 | Bio Medic Data Systems | System monitoring programmable implantable transponder |
| US5160925C1 (en) * | 1991-04-17 | 2001-03-06 | Halliburton Co | Short hop communication link for downhole mwd system |
| DE4309018A1 (en) * | 1993-03-20 | 1994-09-22 | Balzers Pfeiffer Gmbh | Temperature measuring arrangement |
| US5844130A (en) * | 1996-04-03 | 1998-12-01 | Ssi Technologies | Apparatus for maintaining a constant radial distance between a transmitting circuit and an antenna coil |
| JP2000064986A (en) * | 1998-08-12 | 2000-03-03 | Seiko Seiki Co Ltd | Turbo-molecular pump |
| DE69909507T2 (en) * | 1998-12-03 | 2004-06-09 | Psi Global Ltd., Bowburn | COMPRESSOR OR VACUUM PUMP USING A FLUID FILTER WITH HIDDEN MACHINE READABLE IDENTIFICATION |
| DE19857453B4 (en) * | 1998-12-12 | 2008-03-20 | Pfeiffer Vacuum Gmbh | Temperature monitoring on rotors of vacuum pumps |
| US6369712B2 (en) * | 1999-05-17 | 2002-04-09 | The Goodyear Tire & Rubber Company | Response adjustable temperature sensor for transponder |
| DE10018513A1 (en) * | 2000-04-14 | 2001-10-18 | Knorr Bremse Systeme | Brake disc monitoring device and monitoring method for monitoring the temperature of brake discs |
| JP3632561B2 (en) * | 2000-05-12 | 2005-03-23 | 株式会社デンソー | Air pressure detection device and tire condition monitoring system |
| JP2002039088A (en) * | 2000-07-26 | 2002-02-06 | Seiko Instruments Inc | Device for body of revolution |
| DE10114969A1 (en) * | 2001-03-27 | 2002-10-10 | Leybold Vakuum Gmbh | Turbo molecular pump |
| JP2003269367A (en) * | 2002-03-13 | 2003-09-25 | Boc Edwards Technologies Ltd | Vacuum pump |
| DE20206267U1 (en) * | 2002-04-20 | 2003-08-28 | Leybold Vakuum Gmbh | vacuum pump |
| US6739840B2 (en) * | 2002-05-22 | 2004-05-25 | Applied Materials Inc | Speed control of variable speed pump |
| JP4082345B2 (en) * | 2003-12-12 | 2008-04-30 | トヨタ自動車株式会社 | Wheel state detection device, wheel and vehicle body |
| US20060078435A1 (en) * | 2004-08-19 | 2006-04-13 | Metropolitan Industries | Pump monitoring system |
| US7336153B2 (en) * | 2005-06-30 | 2008-02-26 | Hewlett-Packard Development Company, L.P. | Wireless temperature monitoring for an electronics system |
| WO2007044593A2 (en) * | 2005-10-07 | 2007-04-19 | Chemimage Corporation | System and method for a chemical imaging threat assessor with a probe |
-
2005
- 2005-09-01 DE DE102005041500A patent/DE102005041500A1/en not_active Withdrawn
-
2006
- 2006-08-15 US US11/991,222 patent/US20100303640A1/en not_active Abandoned
- 2006-08-15 WO PCT/EP2006/065315 patent/WO2007025854A1/en active Application Filing
- 2006-08-15 JP JP2008528456A patent/JP2009507166A/en active Pending
- 2006-08-15 CN CN200680031638A patent/CN100585188C/en not_active Expired - Fee Related
- 2006-08-15 DE DE502006002609T patent/DE502006002609D1/en active Active
- 2006-08-15 EP EP06792816A patent/EP1920160B1/en not_active Not-in-force
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103249952A (en) * | 2010-10-22 | 2013-08-14 | Ksb股份公司 | Device for monitoring a pump |
| CN103249952B (en) * | 2010-10-22 | 2016-01-20 | Ksb股份公司 | For the device of pump monitoring |
| CN104005968A (en) * | 2014-06-05 | 2014-08-27 | 核工业理化工程研究院 | Traction type molecular pump facilitating measurement of surface temperature of rotor |
| CN104612984A (en) * | 2015-01-26 | 2015-05-13 | 核工业理化工程研究院 | Rotor end surface temperature measuring device for traction type molecular pumps |
| CN107795499A (en) * | 2016-08-29 | 2018-03-13 | 株式会社岛津制作所 | Vavuum pump |
| CN111032110A (en) * | 2017-08-17 | 2020-04-17 | 柏林心脏有限公司 | Pump having rotor sensor for detecting physiological, flow and movement parameters |
Also Published As
| Publication number | Publication date |
|---|---|
| DE502006002609D1 (en) | 2009-02-26 |
| WO2007025854A1 (en) | 2007-03-08 |
| EP1920160A1 (en) | 2008-05-14 |
| US20100303640A1 (en) | 2010-12-02 |
| EP1920160B1 (en) | 2009-01-07 |
| JP2009507166A (en) | 2009-02-19 |
| DE102005041500A1 (en) | 2007-03-08 |
| CN100585188C (en) | 2010-01-27 |
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Granted publication date: 20100127 Termination date: 20100815 |
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