DE50103423D1 - Verfahren zur herstellung von trichlorsilan - Google Patents
Verfahren zur herstellung von trichlorsilanInfo
- Publication number
- DE50103423D1 DE50103423D1 DE50103423T DE50103423T DE50103423D1 DE 50103423 D1 DE50103423 D1 DE 50103423D1 DE 50103423 T DE50103423 T DE 50103423T DE 50103423 T DE50103423 T DE 50103423T DE 50103423 D1 DE50103423 D1 DE 50103423D1
- Authority
- DE
- Germany
- Prior art keywords
- trichlorsilane
- producing
- producing trichlorsilane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
- C01B33/10715—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by reacting chlorine with silicon or a silicon-containing material
- C01B33/10731—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by reacting chlorine with silicon or a silicon-containing material with the preferential formation of trichlorosilane
- C01B33/10736—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by reacting chlorine with silicon or a silicon-containing material with the preferential formation of trichlorosilane from silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
- C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
- C01B33/10757—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane
- C01B33/10763—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane from silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE50103423T DE50103423D1 (de) | 2000-09-14 | 2001-09-07 | Verfahren zur herstellung von trichlorsilan |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10045365 | 2000-09-14 | ||
| DE10048794A DE10048794A1 (de) | 2000-09-14 | 2000-10-02 | Verfahren zur Herstellung von Trichlorsilan |
| DE50103423T DE50103423D1 (de) | 2000-09-14 | 2001-09-07 | Verfahren zur herstellung von trichlorsilan |
| PCT/EP2001/010359 WO2002022501A1 (de) | 2000-09-14 | 2001-09-07 | Verfahren zur herstellung von trichlorsilan |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE50103423D1 true DE50103423D1 (de) | 2004-09-30 |
Family
ID=7656115
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE10048794A Withdrawn DE10048794A1 (de) | 2000-09-14 | 2000-10-02 | Verfahren zur Herstellung von Trichlorsilan |
| DE50103423T Expired - Lifetime DE50103423D1 (de) | 2000-09-14 | 2001-09-07 | Verfahren zur herstellung von trichlorsilan |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE10048794A Withdrawn DE10048794A1 (de) | 2000-09-14 | 2000-10-02 | Verfahren zur Herstellung von Trichlorsilan |
Country Status (1)
| Country | Link |
|---|---|
| DE (2) | DE10048794A1 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008041974A1 (de) | 2008-09-10 | 2010-03-11 | Evonik Degussa Gmbh | Vorrichtung, deren Verwendung und ein Verfahren zur energieautarken Hydrierung von Chlorsilanen |
-
2000
- 2000-10-02 DE DE10048794A patent/DE10048794A1/de not_active Withdrawn
-
2001
- 2001-09-07 DE DE50103423T patent/DE50103423D1/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE10048794A1 (de) | 2002-03-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: EVONIK DEGUSSA GMBH, 45128 ESSEN, DE |