DE50003903D1 - TREATMENT DEVICE FOR SILICON WINDOWS - Google Patents

TREATMENT DEVICE FOR SILICON WINDOWS

Info

Publication number
DE50003903D1
DE50003903D1 DE50003903T DE50003903T DE50003903D1 DE 50003903 D1 DE50003903 D1 DE 50003903D1 DE 50003903 T DE50003903 T DE 50003903T DE 50003903 T DE50003903 T DE 50003903T DE 50003903 D1 DE50003903 D1 DE 50003903D1
Authority
DE
Germany
Prior art keywords
treatment device
silicon windows
windows
silicon
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE50003903T
Other languages
German (de)
Inventor
Frank Werfel
Juergen Seeberger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Decker & Co KG Geb GmbH
Original Assignee
Decker & Co KG Geb GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Decker & Co KG Geb GmbH filed Critical Decker & Co KG Geb GmbH
Priority to DE50003903T priority Critical patent/DE50003903D1/en
Priority claimed from PCT/EP2000/003351 external-priority patent/WO2000065637A2/en
Application granted granted Critical
Publication of DE50003903D1 publication Critical patent/DE50003903D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C37/00—Cooling of bearings
    • F16C37/005—Cooling of bearings of magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/0408—Passive magnetic bearings
    • F16C32/0436—Passive magnetic bearings with a conductor on one part movable with respect to a magnetic field, e.g. a body of copper on one part and a permanent magnet on the other part
    • F16C32/0438—Passive magnetic bearings with a conductor on one part movable with respect to a magnetic field, e.g. a body of copper on one part and a permanent magnet on the other part with a superconducting body, e.g. a body made of high temperature superconducting material such as YBaCuO
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2300/00—Application independent of particular apparatuses
    • F16C2300/30—Application independent of particular apparatuses related to direction with respect to gravity
    • F16C2300/32—Horizontal, e.g. bearings for supporting a horizontal shaft

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
DE50003903T 1999-04-27 2000-04-13 TREATMENT DEVICE FOR SILICON WINDOWS Expired - Fee Related DE50003903D1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE50003903T DE50003903D1 (en) 1999-04-27 2000-04-13 TREATMENT DEVICE FOR SILICON WINDOWS

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE19918922 1999-04-27
DE19959299A DE19959299A1 (en) 1999-04-27 1999-12-09 Treatment device for silicon wafers
DE50003903T DE50003903D1 (en) 1999-04-27 2000-04-13 TREATMENT DEVICE FOR SILICON WINDOWS
PCT/EP2000/003351 WO2000065637A2 (en) 1999-04-27 2000-04-13 Device for treating silicon wafers

Publications (1)

Publication Number Publication Date
DE50003903D1 true DE50003903D1 (en) 2003-11-06

Family

ID=7905905

Family Applications (3)

Application Number Title Priority Date Filing Date
DE19959299A Withdrawn DE19959299A1 (en) 1999-04-27 1999-12-09 Treatment device for silicon wafers
DE10006228A Withdrawn DE10006228A1 (en) 1999-04-27 2000-02-11 Magnetic bearing for rotor shaft e.g. in semiconductor processing apparatus has rotor bearing part which partially surrounds stator bearing part to allow exchange of rotor
DE50003903T Expired - Fee Related DE50003903D1 (en) 1999-04-27 2000-04-13 TREATMENT DEVICE FOR SILICON WINDOWS

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE19959299A Withdrawn DE19959299A1 (en) 1999-04-27 1999-12-09 Treatment device for silicon wafers
DE10006228A Withdrawn DE10006228A1 (en) 1999-04-27 2000-02-11 Magnetic bearing for rotor shaft e.g. in semiconductor processing apparatus has rotor bearing part which partially surrounds stator bearing part to allow exchange of rotor

Country Status (1)

Country Link
DE (3) DE19959299A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20318389U1 (en) * 2003-11-27 2004-02-26 Nexans Magnetic storage
DE102010004904A1 (en) 2010-01-19 2011-09-15 Schaeffler Technologies Gmbh & Co. Kg Permanent magnetic bearing for supporting shaft at housing, has auxiliary bearing provided in superconductor made of superconducting material, and permanent magnet whose magnetic field is formed in region of superconductor
DE102014001528A1 (en) * 2014-02-07 2015-08-13 Festo Ag & Co. Kg Axle
DE112015006241B4 (en) * 2015-05-20 2021-02-11 Festo Se & Co. Kg Valve device
DE102022109175A1 (en) 2022-04-14 2023-10-19 Ilmenauer Mechatronik GmbH Work table and method for aligning it
CN114810828B (en) * 2022-06-02 2024-03-19 中国科学院电工研究所 Superconducting magnetic suspension rotor supporting magnetic field shaping device

Also Published As

Publication number Publication date
DE10006228A1 (en) 2000-11-02
DE19959299A1 (en) 2000-11-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee