DE4213118C1 - - Google Patents

Info

Publication number
DE4213118C1
DE4213118C1 DE4213118A DE4213118A DE4213118C1 DE 4213118 C1 DE4213118 C1 DE 4213118C1 DE 4213118 A DE4213118 A DE 4213118A DE 4213118 A DE4213118 A DE 4213118A DE 4213118 C1 DE4213118 C1 DE 4213118C1
Authority
DE
Germany
Prior art keywords
silicon wafer
silicon
groove
saw
etched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE4213118A
Other languages
German (de)
English (en)
Inventor
Andreas Dipl.-Ing. Woerner (Fh), 7153 Weissach, De
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
ANT Nachrichtentechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ANT Nachrichtentechnik GmbH filed Critical ANT Nachrichtentechnik GmbH
Priority to DE4213118A priority Critical patent/DE4213118C1/de
Priority to EP93105737A priority patent/EP0566929A1/de
Application granted granted Critical
Publication of DE4213118C1 publication Critical patent/DE4213118C1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/64—Wet etching of semiconductor materials
    • H10P50/642—Chemical etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Coupling Of Light Guides (AREA)
DE4213118A 1992-04-21 1992-04-21 Expired - Fee Related DE4213118C1 (enExample)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE4213118A DE4213118C1 (enExample) 1992-04-21 1992-04-21
EP93105737A EP0566929A1 (de) 1992-04-21 1993-04-07 Verfahren zum Herstellen von mikromechanischen Strukturen in einkristallinem Halbleitermaterial

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4213118A DE4213118C1 (enExample) 1992-04-21 1992-04-21

Publications (1)

Publication Number Publication Date
DE4213118C1 true DE4213118C1 (enExample) 1993-06-24

Family

ID=6457170

Family Applications (1)

Application Number Title Priority Date Filing Date
DE4213118A Expired - Fee Related DE4213118C1 (enExample) 1992-04-21 1992-04-21

Country Status (2)

Country Link
EP (1) EP0566929A1 (enExample)
DE (1) DE4213118C1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996023238A3 (en) * 1995-01-27 1996-09-26 Cambridge Consultants Miniature mounting device
CN112397616A (zh) * 2020-12-03 2021-02-23 宣城睿晖宣晟企业管理中心合伙企业(有限合伙) 一种晶体硅电池片的切割方法及结构

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE9304145D0 (sv) * 1993-12-10 1993-12-10 Pharmacia Lkb Biotech Sätt att tillverka hålrumsstrukturer
SE506163C2 (sv) * 1995-04-27 1997-11-17 Ericsson Telefon Ab L M Anordning vid ett kiselsubstrat med ett urtag för upptagande av ett element jämte förfarande för framställande av en dylik anordning
DE19716480B4 (de) * 1997-04-19 2004-03-25 Micronas Semiconductor Holding Ag Verfahren zum Herstellen einer Vorrichtung mit einem Hohlraum zur Aufnahme eines Lichtwellenleiters

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4522682A (en) * 1982-06-21 1985-06-11 Rockwell International Corporation Method for producing PNP type lateral transistor separated from substrate by O.D.E. for minimal interference therefrom
US4604161A (en) * 1985-05-02 1986-08-05 Xerox Corporation Method of fabricating image sensor arrays

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026903B1 (enExample) * 1968-09-14 1975-09-04

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4522682A (en) * 1982-06-21 1985-06-11 Rockwell International Corporation Method for producing PNP type lateral transistor separated from substrate by O.D.E. for minimal interference therefrom
US4604161A (en) * 1985-05-02 1986-08-05 Xerox Corporation Method of fabricating image sensor arrays

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
"New Microstructures in Silicon using Laser Machining and Anisotropic Etching" von M. Alavi, S. Büttgenbach, A. Schu- macher, H.-J. Wagner, Hahn-Schickard-Gesellschaft für angewandte Forschung e.V., W-7000 Stuttgart, 199, S. 322-324 *
R. Krahn, H. Reich. (Hrsg.): "Micro System Techno-logies 91" (Vote-Verlag) *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5961849A (en) * 1995-01-25 1999-10-05 Cambridge Consultants Ltd. Miniature mounting device and method
WO1996023238A3 (en) * 1995-01-27 1996-09-26 Cambridge Consultants Miniature mounting device
CN112397616A (zh) * 2020-12-03 2021-02-23 宣城睿晖宣晟企业管理中心合伙企业(有限合伙) 一种晶体硅电池片的切割方法及结构

Also Published As

Publication number Publication date
EP0566929A1 (de) 1993-10-27

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Legal Events

Date Code Title Description
8100 Publication of patent without earlier publication of application
D1 Grant (no unexamined application published) patent law 81
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ROBERT BOSCH GMBH, 70469 STUTTGART, DE

8339 Ceased/non-payment of the annual fee