DE4033233A1 - Prodn. of microstructural body e.g. shaping tool - by forming intersecting recesses and/or grooves in machinable substrate surface using diamond tools - Google Patents

Abstract

Prodn. of a microstructured body (esp. shaping tool) with burr-free microstructures involves forming intersecting grooves or intersecting grooves and recesses in a machineable (esp. metalalic) substrate using diamond tools. (a) after structuring (grooves (a) in a first machining direction (Y), the substrate (1) is coated with a fluid hardenable plastics; (b) after hardening of the plastics, structuring is carried out in a second machining direction (X); and (c) residual plastics is removed with a solvent. The plastics is suitably a rapid hardening adhesive, e.g. cyanacrylate, pref. having a machinability after hardening similar to that of the substrate. USE/ADVANTAGE - The process is useful for prodn. of microstructured masters for electroforming or plastics moulding. Provision of the plastics coating prevents burr formation at the edges of the microstructures.

Description

The invention relates to a method for producing a Mi microstructure body, in particular a microstructured Ab molding tool, with burr-free microstructures, by means of mold diamonds according to the preamble of claim 1.

DE 37 09 278 C2 describes a process for the production of Known fine structure, in which zer in the surface Machinable, preferably metallic foil grooves of high shape accuracy can be incorporated with shape diamonds. Thereby be carries the shape accuracy with groove lengths of more than 1000 µm with regard to the groove width approx. ± 1 µm with the smallest lateral Dimensions of approximately 15 µm.

DE 38 42 610 C1 describes the production of a microstructure rated impression tool described and shown. Here a sheet of AlMg₃ is used as a machinable substrate det, in their surface by crosswise processing with wedge-shaped micro-shaped diamond grooves can be incorporated. This creates closely adjacent, truncated pyramids Microstructures that galvanically or with a plastic can be shaped. When working in the grooves in the two th machining direction that is perpendicular to the previously turned on worked grooves, there is a risk of un desired burr formation. The ridges usually arise long along the edges of the micro pyramids along which the Shape diamond in the previously made groove of the first machining direction. These ridges that deal with konventio nellen methods, e.g. B. ultrasound treatment or thermo shock, not or not completely removed, affects impact the shape of the microstructures and interfere especially the subsequent molding with plastic.

The invention has the task of the generic method so to improve that the burr formation on the edges of the Mi is effectively prevented from crostructing.

This task is carried out with the characteristic measures of the contractor spell 1 solved. The related sub-claims be contain advantageous embodiments of this solution. Since the Form diamond now always cuts into full material, the burr formation is completely suppressed; an aftercare lung is not necessary. Advantageously, the Pairing substrate / plastic chosen so that both materials a comparable machinability with good against side adhesion, e.g. B. brass and a quick glue like cyanoacrylate. Leave cyanoacrylate, but also "Zaponlack" deal with common solvents, e.g. B. with acetone, back remove from the metallic microstructure without standing.

Exemplary embodiments of the invention are described below of the drawings:

Figs. 1 to 4 show schematically and in greatly to magnified TEM scale manufacturing burr-free, pyramidenstumpfförmi ger microstructures.

Figs. 5 to 7 show the production of closely spaced, parallel webs which are enclosed by a lower edge.

Fig. 1 shows a metallic substrate 1 , the device via a ground sintered metal plate 2 and a vacuum clamping device 3 , to which a vacuum line 4 is connected, is clamped on a processing table 5 . The processing table 5 can be placed in two mutually perpendicular directions X and Y and swiveled in the S direction relative to a milling spindle 6 . The milling spindle 6 , which is adjustable in height (arrows Z), carries at its free end one or more form diamonds 7 with a wedge-shaped profile.

As can be seen from Fig. 1, in the surface 1 b of the substrate 1 are first incorporated in the first machining direction Y with the shape diamonds 7, a plurality of parallel grooves 1 a, which have a depth of about 250 microns. The mutual spacing of the grooves (grid) is approx. 100 µm. Then the grooved substrate surface is poured over with a flowable, curable plastic 8 , which penetrates into the grooves 1 a and adheres firmly to the substrate surface ( Fig. 2). After the hardening of the plastic 8 and pivoting of the substrate by 90 °, parallel grooves 1 c with the form diamonds 7 are machined into the plastic covered substrate surface in the second machining direction X, which runs perpendicular to the first perpendicular direction ( FIG. 3).

The form diamond 7 always cuts through solid material, as a result of which no undesirable burrs form on the edges of the metallic microstructures. Then the remaining plastic 8 a is removed with a solvent. The final microstructure body 9 with the truncated pyramid-shaped micro-structures 9 shows a Fig. 4.

FIG. 5 shows a substrate 10 , in the edge regions of which are opposite each other, a step-shaped recess 10 a and 10 b was first machined in the Y direction. After overcoating the substrate with a curable, flowable plastic 12 are c in the raised portion 10 of the substrate 10 in the X direction parallel to each other, rectangular grooves 10 d and two peripheral recesses 10 e, 10 f incorporated (Fig. 6). The remaining plastic is then removed with a solvent. The ready-structured micro structure body 11 with parallel webs 11 a and a peripheral edge 11 b is shown in FIG. 7. Also in this case intersect the form of diamond in machining in the X-direction always in solid material, so that no burrs of the end edges Form webs 11 a.

Reference symbol list

1 substrate
1 a grooves in the Y direction in the substrate 1
1 b surface of the substrate
1 c grooves in the X direction in the substrate 1
2 sintered metal plate
3 vacuum clamping device
4 vacuum line
5 processing table
6 milling spindle
7 shape diamond
8 plastic
8 a remaining plastic
9 microstructure body
9 a microstructures of the microstructure body
10 substrate
10 a step-shaped edge recess
10 b step-shaped edge recess
10 c raised part of the substrate 10
10 d rectangular grooves in the substrate 10
10 e edge recess
10 f edge recess
11 microstructure body
11 a raised webs of the microstructure body 11
11 b peripheral edge of the microstructure body 11
12 plastic

Claims (3)

1. A method for producing a microstructure body, in particular a microstructured impression tool, with burr-free microstructures, in which, in the surface of a machinable substrate, in particular a metallic substrate, diamonds running in two machining directions, intersecting grooves or intersecting grooves and recesses are incorporated are characterized by
that after the structuring (grooves 1a) in the first machining direction (Y), the substrate ( 1 ) is covered with a flowable, hardenable plastic ( 8 ),
that after the hardening of the plastic ( 8 ) the structuring (grooves 1c) takes place in the second machining direction (X) and
then the remaining plastic ( 8 a) is removed with a solvent. 2. The method according to claim 1, characterized in that as a plastic ( 8 ) a quick adhesive, for. B. cyanoacrylate is used. 3. The method according to claim 1, characterized in that a material is used as the plastic ( 8 ) which after hardening has a comparable machinability as the substrate ( 1 ).