DE4029285A1 - Ultrasonic machining appts. for hard brittle work - has silicon machining tool pref. with protective layer of silicon nitride in holder, and ultrasonic transducer - Google Patents

Ultrasonic machining appts. for hard brittle work - has silicon machining tool pref. with protective layer of silicon nitride in holder, and ultrasonic transducer

Info

Publication number
DE4029285A1
DE4029285A1 DE19904029285 DE4029285A DE4029285A1 DE 4029285 A1 DE4029285 A1 DE 4029285A1 DE 19904029285 DE19904029285 DE 19904029285 DE 4029285 A DE4029285 A DE 4029285A DE 4029285 A1 DE4029285 A1 DE 4029285A1
Authority
DE
Germany
Prior art keywords
tool
silicon
machining
ultrasonic
protective layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19904029285
Other languages
German (de)
Inventor
Fritz Dipl Ing Breimesser
Johann Dipl Ing Eibl
Josef Niersberger
Bertram Sachs
Dietrich Dr Stephani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19904029285 priority Critical patent/DE4029285A1/en
Publication of DE4029285A1 publication Critical patent/DE4029285A1/en
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B3/00—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B35/00—Machines or devices designed for superfinishing surfaces on work, i.e. by means of abrading blocks reciprocating with high frequency
    • B24B35/005—Machines or devices designed for superfinishing surfaces on work, i.e. by means of abrading blocks reciprocating with high frequency for making three-dimensional objects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/047—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by ultrasonic cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The mechanism has an ultrasound generator, an ultrasonic transducer, an ultrasonic transfermer, a sonotrude (2), a tool holder (4), and a machining tool (6), which is made of silicon, at least partly, pref. of monocrystalline silicon. The shape of the tool may be formed by microstructure The machining tool surface (10) may technique contain a protective coating layer (129 of silicon nitride. The sonotrode is coupled to the ultra sound generator to amplify its amplitude. It carries the tool holder and tool. A lapping mixt. (16) in supplied between the tool surface and work (8). USE/ADVANTAGE - For machining e.g. ceramic, glass, glass ceramic, quartx, for prodn. of microstructured ultrasonic transducers e.g. in ring arrays for medical diagnosis. Allows high precision in sub-millimetre range. (3pp Dwg.No. 1/1)

Description

Die Erfindung bezieht sich auf eine Anordnung zur Ultraschall­ bearbeitung insbesondere hartspröder Werkstoffe, bei dem das Bearbeitungswerkzeug wenigstens teilweise aus Silicium besteht.The invention relates to an arrangement for ultrasound machining in particular hard brittle materials, in which the Machining tool consists at least partially of silicon.

Aus "Keramikbearbeitung", Carl Hanser Verlag, München 1989, Seiten 423 bis 443, ist ein Verfahren bekannt, mit dem hart­ spröde Werkstoffe, beispielsweise Keramik, Glas, Glaskeramik oder auch Quarze, mit Hilfe des Ultraschallschwingläppens bearbeitet werden. Dabei werden die benötigten mechanischen Schwingungen durch ein Schwingungssystem erzeugt, das im we­ sentlichen aus einem Ultraschallgenerator, einem Ultraschall­ wandler, einem Ultraschalltransformator und einer Sonotrode mit einem Bearbeitungswerkzeug besteht. Zwischen dem Bearbeitungs­ werkzeug und einem Werkstück ist ein Läppgemisch vorgesehen. Das formübertragende Bearbeitungswerkzeug läßt dabei infolge seiner longitudinalen Schwingungen die in einer Flüssigkeit dispergierten Läppkörner, die beispielsweise aus Borcarbid oder auch Diamant bestehen können, mit ihren Spitzen stoßartig in die Werkstücksrandzone eingreifen, so daß kleinste Späne in­ folge Mikrorißbildung und fluiddynamischer Effekte abgetrennt und mit der Läppsuspension aus dem Wirkspalt gespült werden. Zeitlich und räumlich aufsummiert führen diese Mikrorisse zur Abbildung des Profilwerkzeugs im Werkstück. Als Werkzeugmate­ rial kann dabei beispielsweise eine Chrom-Nickel- oder Chrom- Vanadium-Legierung vorgesehen sein.From "Keramikverarbeitung", Carl Hanser Verlag, Munich 1989, Pages 423 to 443, a method is known by which hard brittle materials, for example ceramics, glass, glass ceramics or quartz, with the help of ultrasonic vibratory lapping to be edited. The required mechanical Vibrations generated by a vibration system, which in the we mainly from an ultrasound generator, an ultrasound transducer, an ultrasonic transformer and a sonotrode with a processing tool. Between editing a lapping mixture is provided for the tool and a workpiece. The shape-transferring processing tool leaves as a result its longitudinal vibrations are in a liquid dispersed lapping grains, for example made of boron carbide or can also exist diamond, with their tips jerky in engage the workpiece edge zone so that the smallest chips in follow microcracking and fluid dynamic effects separated and rinsed out of the active gap with the lapping suspension. These microcracks add up in time and space Illustration of the profile tool in the workpiece. As a tool mat For example, a chrome-nickel or chrome Vanadium alloy can be provided.

Bei diesem bekannten Verfahren kann auch am Werkzeug ein Ver­ schleiß auftreten, dessen Ausmaß von den Härten der beteilig­ ten Oberflächen abhängt. Wegen dieses unvermeidlichen Ver­ schleißes ist besonders die Wirtschaftlichkeit der Werkzeugher­ stellung von Bedeutung. Beispielsweise in der Feinwerktechnik und insbesondere in der Mikrosystemtechnik sowie der Vakuum-Mi­ kroelektronik sind dabei jedoch Bearbeitungsschritte erforder­ lich, die bei den bekannten Werkzeugmaterialien nur schwer oder überhaupt nicht durchgeführt werden können.In this known method, a Ver Wear occur, the extent of which depends on the hardness of the involved depends on the surface. Because of this inevitable ver wear is particularly the cost-effectiveness of toolmakers  position of importance. For example in precision engineering and especially in microsystem technology and vacuum mi However, microelectronics require processing steps Lich, difficult or with the known tool materials can't be done at all.

Der Erfindung liegt nun die Aufgabe zugrunde, das bekannte Ver­ fahren zur Ultraschallbearbeitung zu verbessern, insbesondere soll ein Werkzeugmaterial angegeben werden, das auch zur Her­ stellung komplexer Formen mit hoher Präzision geeignet ist, deren kritische Abmessungen im Bereich zwischen einigen 10µm und 100µm liegen können.The invention is based on the object, the known Ver drive to improve ultrasound processing, in particular a tool material is to be specified, position complex shapes with high precision, their critical dimensions in the range between a few 10 µm and can be 100µm.

Die Erfindung beruht nun auf der Erkenntnis, daß sich Sili­ cium als Ausgangsmaterial zur Ausbildung komplexer Formen im Submillimeterbereich besonders eignet und sie besteht in dem kennzeichnenden Merkmal des Anspruchs 1. Vorzugsweise ist monokristallines Silicium vorgesehen. Die Form des Werkzeuges kann mit den bekannten Verfahren der Mikrostrukturtechnik, beispielsweise der Photolithographie, dem isotropen oder aniso­ tropen Ätzen, dem Sputtern oder auch dem Aufdampfen ausgebildet werden.The invention is now based on the knowledge that Sili cium as a starting material for the formation of complex forms in Submillimeter range is particularly suitable and it consists in the characterizing feature of claim 1. Preferably monocrystalline silicon provided. The shape of the tool can with the known methods of microstructure technology, for example photolithography, isotropic or aniso tropical etching, sputtering or vapor deposition will.

In einer vorteilhaften Ausführungsform ist die Oberfläche des Werkzeuges mit einer Schutzschicht versehen. Diese Schutz­ schicht kann beispielsweise aus Siliciumnitrid bestehen, das bei guter Haftung eine größere Härte als Silicium aufweist und sich somit gut zur Oberflächenvergütung eignet.In an advantageous embodiment, the surface of the Apply a protective layer to the tool. This protection Layer can for example consist of silicon nitride has a greater hardness than silicon with good adhesion and is therefore well suited for surface treatment.

Zur weiteren Erläuterung der Erfindung wird auf die Zeichnung Bezug genommen, in deren Figur eine Anordnung zur Ultraschall­ bearbeitung mit einem Werkzeugmaterial gemäß der Erfindung schematisch veranschaulicht ist. To further explain the invention, reference is made to the drawing Reference, in the figure an arrangement for ultrasound machining with a tool material according to the invention is illustrated schematically.  

In der dargestellten Anordnung ist eine Sonotrode 2 mit einem in der Figur nicht dargestellten Ultraschallgenerator verbun­ den. Diese Sonotrode 2 verstärkt die Amplitude der vom Ultra­ schallgenerator erzeugten Ultraschallschwingung. Die Sonotrode 2 ist mit einem Werkzeughalter 4 versehen, der ein Bearbei­ tungswerkzeug 6 trägt, das in den Werkzeughalter 4 beispiels­ weise eingespannt oder auch eingeschraubt ist. Das Bearbeitungs­ werkzeug 6 besteht erfindungsgemäß aus Silicium und ist in ei­ ner bevorzugten Ausführungsform an seiner auf ein Werkstück 8 wirkenden formgebenden Oberfläche 10 mit einer Schutzschicht 12 versehen, die beispielsweise aus Siliciumnitrid, Siliciumcar­ bid, Titannitrid oder auch Chromcarbid besteht. Diese Schutz­ schicht 12 kann beispielsweise nach der Ausgestaltung des Be­ arbeitungswerkzeuges 6 auf dessen Oberfläche 10 abgeschieden werden, und ihre Dicke wird beispielsweise 0,1µ nicht wesent­ lich unterschreiten und nicht wesentlich mehr als 15µ betra­ gen. Zwischen die formgebende Oberfläche 10 des Bearbeitungs­ werkzeugs 6 und das Werkstück 8 wird von einer Läppgemischzu­ führung 14 ein Läppgemisch 16 gebracht.In the arrangement shown, a sonotrode 2 is connected to an ultrasound generator (not shown in the figure). This sonotrode 2 amplifies the amplitude of the ultrasonic vibration generated by the ultrasonic generator. The sonotrode 2 is provided with a tool holder 4 , which carries a machining tool 6 , which is clamped or screwed in the tool holder 4, for example. The machining tool 6 is made of silicon according to the invention and in a preferred embodiment is provided on its shaping surface 10 acting on a workpiece 8 with a protective layer 12 which consists, for example, of silicon nitride, silicon carbide, titanium nitride or chromium carbide. This protective layer 12 may, for example, processing tool are deposited on the surface 10 6 according to the embodiment of Be, and its thickness is, for example, 0,1μ not fall below Wesent Lich and not substantially more Betra gen than 15μ. Between the shaping surface 10 of the machining tool 6 and the workpiece 8 is brought from a lapping mixture guide 14 a lapping mixture 16 .

Da die formgebende Oberfläche 10 des Bearbeitungswerkzeuges 6 vorteilhaft beispielsweise mit den bekannten Methoden der Mik­ krostrukturtechnologie ausgestaltet sein kann, können in das Werkstück 8 auch Formen mit kritischen Abmessungen im Mikrome­ ter-Bereich eingeprägt werden. Somit eignet sich dieses Verfah­ ren beispielsweise auch zur Fertigung mikrostrukturierter Ul­ traschallwandler, wie sie beispielsweise in Ringarrays für die medizinische Diagnostik eingesetzt werden.Since the shaping surface 10 of the machining tool 6 can advantageously be designed, for example, using the known methods of microstructure technology, shapes with critical dimensions in the micrometer range can also be embossed into the workpiece 8 . This process is therefore also suitable, for example, for the production of microstructured ultrasound transducers, such as those used in ring arrays for medical diagnostics.

Claims (5)

1. Anordnung zur Ultraschallbearbeitung insbesondere hartsprö­ der Werkstoffe mit einem Ultraschallgenerator, einem Ultra­ schallwandler, einem Ultraschalltransformator, einer Sonotrode (2), einem Werkzeughalter (4) sowie ein Bearbeitungswerkzeug (6), dadurch gekennzeichnet, daß das Bearbeitungswerkzeug (6) wenigstens teilweise aus Silicium be­ steht.1. Arrangement for ultrasound processing, in particular hartsprö the materials with an ultrasound generator, an ultrasonic transducer, an ultrasound transformer, a sonotrode ( 2 ), a tool holder ( 4 ) and a processing tool ( 6 ), characterized in that the processing tool ( 6 ) at least partially Silicon exists. 2. Anordnung nach Anspruch 1, dadurch gekenn­ zeichnet, daß das Bearbeitungswerkzeug (6) wenigstens teilweise aus einkristallinem Silicium besteht.2. Arrangement according to claim 1, characterized in that the processing tool ( 6 ) consists at least partially of single-crystal silicon. 3. Anordnung nach Anspruch 1 oder 2, dadurch ge­ kennzeichnet, daß die Form des Bearbeitungswerk­ zeuges (6) in Mikrostrukturtechnik ausgebildet ist.3. Arrangement according to claim 1 or 2, characterized in that the shape of the processing tool ( 6 ) is formed in microstructure technology. 4. Anordnung nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß die Oberfläche (10) des Bearbeitungswerkzeuges (6) mit einer Schutzschicht (12) ver­ sehen ist.4. Arrangement according to one of claims 1 to 3, characterized in that the surface ( 10 ) of the machining tool ( 6 ) with a protective layer ( 12 ) is seen ver. 5. Anordnung nach Anspruch 4, dadurch gekenn­ zeichnet, daß diese Schutzschicht (12) aus Silicium­ nitrid besteht.5. Arrangement according to claim 4, characterized in that this protective layer ( 12 ) consists of silicon nitride.
DE19904029285 1990-09-14 1990-09-14 Ultrasonic machining appts. for hard brittle work - has silicon machining tool pref. with protective layer of silicon nitride in holder, and ultrasonic transducer Withdrawn DE4029285A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19904029285 DE4029285A1 (en) 1990-09-14 1990-09-14 Ultrasonic machining appts. for hard brittle work - has silicon machining tool pref. with protective layer of silicon nitride in holder, and ultrasonic transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19904029285 DE4029285A1 (en) 1990-09-14 1990-09-14 Ultrasonic machining appts. for hard brittle work - has silicon machining tool pref. with protective layer of silicon nitride in holder, and ultrasonic transducer

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DE4029285A1 true DE4029285A1 (en) 1992-03-19

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4332065A1 (en) * 1992-09-24 1994-03-31 Thera Ges Fuer Patente Ceramic tooth prosthesis mfg system - using ultrasonic machining process with two successively activated profiled sonotrode crowns
DE19937707A1 (en) * 1999-08-10 2001-03-01 Baerlocher Gmbh Tool surfaces of machines or equipment used for processing materials, especially polymers, have a microstructure reducing actual contact area between polymer and surface
EP1289009A2 (en) * 2001-08-25 2003-03-05 Schott Glas Mechanical structuring of cover materials for use in electrical component assemblies
DE10141709A1 (en) * 2001-08-25 2003-03-06 Schott Glas Process for structuring a covering material for applying on a support substrate comprises preparing a planar plate as covering material and forming grooves on the material so that the grooves are arranged along dissection lines
WO2006058518A1 (en) * 2004-12-02 2006-06-08 Mtu Aero Engines Gmbh Method and device for hardening the surfaces of components
DE102005038108A1 (en) * 2005-08-11 2007-02-15 Multi Orbital Systems Gmbh Surface polishing assembly for e.g. glass, metal, paint, previous stones has two oscillating frames operating in a predefined phase sequence
DE102009018988A1 (en) * 2009-04-25 2010-10-28 Mtu Aero Engines Gmbh Hardening a surface of a complex thin-walled component with varying cross-section by hardening critical surface area using an ultrasonic vibrator and a tool, comprises delivering high-frequency local mechanical impulse to the component
DE102011010297A1 (en) * 2011-02-04 2012-08-09 Mtu Aero Engines Gmbh Method for generating microstructure for blade for turbomachine, involves forming several cutting edges of various heights in side by side on sonotrode used for performing ultrasonic shock treatment

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4332065A1 (en) * 1992-09-24 1994-03-31 Thera Ges Fuer Patente Ceramic tooth prosthesis mfg system - using ultrasonic machining process with two successively activated profiled sonotrode crowns
US5490810A (en) * 1992-09-24 1996-02-13 Thera Patent Gmbh & Co. Kg Gesellschaft Fur Industrielle Schutzrechte Process and device for manufacturing a structural part, especially of a ceramic tooth restoration, and a process of making sonotrode crowns
DE4332065C2 (en) * 1992-09-24 1998-07-09 Thera Ges Fuer Patente Ultrasonic processing device and method for processing workpieces using the ultrasonic processing device
DE19937707A1 (en) * 1999-08-10 2001-03-01 Baerlocher Gmbh Tool surfaces of machines or equipment used for processing materials, especially polymers, have a microstructure reducing actual contact area between polymer and surface
DE19937707C2 (en) * 1999-08-10 2003-03-27 Baerlocher Gmbh Tool surfaces with a defined microstructure for the rejection of deposits
EP1289009A2 (en) * 2001-08-25 2003-03-05 Schott Glas Mechanical structuring of cover materials for use in electrical component assemblies
DE10141709A1 (en) * 2001-08-25 2003-03-06 Schott Glas Process for structuring a covering material for applying on a support substrate comprises preparing a planar plate as covering material and forming grooves on the material so that the grooves are arranged along dissection lines
EP1289009A3 (en) * 2001-08-25 2004-09-08 Schott Glas Mechanical structuring of cover materials for use in electrical component assemblies
WO2006058518A1 (en) * 2004-12-02 2006-06-08 Mtu Aero Engines Gmbh Method and device for hardening the surfaces of components
DE102005038108A1 (en) * 2005-08-11 2007-02-15 Multi Orbital Systems Gmbh Surface polishing assembly for e.g. glass, metal, paint, previous stones has two oscillating frames operating in a predefined phase sequence
DE102009018988A1 (en) * 2009-04-25 2010-10-28 Mtu Aero Engines Gmbh Hardening a surface of a complex thin-walled component with varying cross-section by hardening critical surface area using an ultrasonic vibrator and a tool, comprises delivering high-frequency local mechanical impulse to the component
DE102011010297A1 (en) * 2011-02-04 2012-08-09 Mtu Aero Engines Gmbh Method for generating microstructure for blade for turbomachine, involves forming several cutting edges of various heights in side by side on sonotrode used for performing ultrasonic shock treatment

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