DE3925711C1 - - Google Patents
Info
- Publication number
- DE3925711C1 DE3925711C1 DE3925711A DE3925711A DE3925711C1 DE 3925711 C1 DE3925711 C1 DE 3925711C1 DE 3925711 A DE3925711 A DE 3925711A DE 3925711 A DE3925711 A DE 3925711A DE 3925711 C1 DE3925711 C1 DE 3925711C1
- Authority
- DE
- Germany
- Prior art keywords
- recipient
- samples
- cathode sputtering
- receptacle
- rods
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3925711A DE3925711C1 (pt-PT) | 1989-08-03 | 1989-08-03 | |
EP90109079A EP0411256B1 (de) | 1989-08-03 | 1990-05-14 | Kathodenzerstäubungsanlage |
AT90109079T ATE102265T1 (de) | 1989-08-03 | 1990-05-14 | Kathodenzerstaeubungsanlage. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3925711A DE3925711C1 (pt-PT) | 1989-08-03 | 1989-08-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3925711C1 true DE3925711C1 (pt-PT) | 1990-04-19 |
Family
ID=6386449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3925711A Expired - Fee Related DE3925711C1 (pt-PT) | 1989-08-03 | 1989-08-03 |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0411256B1 (pt-PT) |
AT (1) | ATE102265T1 (pt-PT) |
DE (1) | DE3925711C1 (pt-PT) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD111409A1 (pt-PT) * | 1974-05-02 | 1975-02-12 |
-
1989
- 1989-08-03 DE DE3925711A patent/DE3925711C1/de not_active Expired - Fee Related
-
1990
- 1990-05-14 AT AT90109079T patent/ATE102265T1/de not_active IP Right Cessation
- 1990-05-14 EP EP90109079A patent/EP0411256B1/de not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD111409A1 (pt-PT) * | 1974-05-02 | 1975-02-12 |
Also Published As
Publication number | Publication date |
---|---|
EP0411256A3 (en) | 1991-10-23 |
EP0411256B1 (de) | 1994-03-02 |
EP0411256A2 (de) | 1991-02-06 |
ATE102265T1 (de) | 1994-03-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8100 | Publication of patent without earlier publication of application | ||
D1 | Grant (no unexamined application published) patent law 81 | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |