DE3917396C2 - - Google Patents

Info

Publication number
DE3917396C2
DE3917396C2 DE3917396A DE3917396A DE3917396C2 DE 3917396 C2 DE3917396 C2 DE 3917396C2 DE 3917396 A DE3917396 A DE 3917396A DE 3917396 A DE3917396 A DE 3917396A DE 3917396 C2 DE3917396 C2 DE 3917396C2
Authority
DE
Germany
Prior art keywords
valve
electrodes
plate
plates
openings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3917396A
Other languages
German (de)
English (en)
Other versions
DE3917396A1 (de
Inventor
Bernd 7515 Linkenheim De Kowanz
Dirk Dr. 7513 Stutensee De Schmidt
Wolfgang Dipl.-Phys. Dr. 7500 Karlsruhe De Ehrfeld
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Karlsruher Institut fuer Technologie KIT
Original Assignee
Kernforschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungszentrum Karlsruhe GmbH filed Critical Kernforschungszentrum Karlsruhe GmbH
Priority to DE3917396A priority Critical patent/DE3917396A1/de
Priority to DE59007736T priority patent/DE59007736D1/de
Priority to US07/527,194 priority patent/US5054522A/en
Priority to DK90109887.1T priority patent/DK0400482T3/da
Priority to EP90109887A priority patent/EP0400482B1/de
Priority to JP2138170A priority patent/JPH0379878A/ja
Publication of DE3917396A1 publication Critical patent/DE3917396A1/de
Application granted granted Critical
Publication of DE3917396C2 publication Critical patent/DE3917396C2/de
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D90/00—Component parts, details or accessories for large containers
    • B65D90/54—Gates or closures
    • B65D90/58—Gates or closures having closure members sliding in the plane of the opening
    • B65D90/587—Gates or closures having closure members sliding in the plane of the opening having a linear motion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D90/00—Component parts, details or accessories for large containers
    • B65D90/54—Gates or closures
    • B65D90/58—Gates or closures having closure members sliding in the plane of the opening
    • B65D90/60—Gates or closures having closure members sliding in the plane of the opening and having one or more openings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0011—Gate valves or sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86718—Dividing into parallel flow paths with recombining
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86718—Dividing into parallel flow paths with recombining
    • Y10T137/86759—Reciprocating

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
DE3917396A 1989-05-29 1989-05-29 Mikroventil Granted DE3917396A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE3917396A DE3917396A1 (de) 1989-05-29 1989-05-29 Mikroventil
DE59007736T DE59007736D1 (de) 1989-05-29 1990-05-23 Mikroventil.
US07/527,194 US5054522A (en) 1989-05-29 1990-05-23 Microvalve
DK90109887.1T DK0400482T3 (da) 1989-05-29 1990-05-23 Mikroventil
EP90109887A EP0400482B1 (de) 1989-05-29 1990-05-23 Mikroventil
JP2138170A JPH0379878A (ja) 1989-05-29 1990-05-28 マイクロ弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3917396A DE3917396A1 (de) 1989-05-29 1989-05-29 Mikroventil

Publications (2)

Publication Number Publication Date
DE3917396A1 DE3917396A1 (de) 1990-12-06
DE3917396C2 true DE3917396C2 (enExample) 1991-03-28

Family

ID=6381575

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3917396A Granted DE3917396A1 (de) 1989-05-29 1989-05-29 Mikroventil
DE59007736T Expired - Fee Related DE59007736D1 (de) 1989-05-29 1990-05-23 Mikroventil.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE59007736T Expired - Fee Related DE59007736D1 (de) 1989-05-29 1990-05-23 Mikroventil.

Country Status (5)

Country Link
US (1) US5054522A (enExample)
EP (1) EP0400482B1 (enExample)
JP (1) JPH0379878A (enExample)
DE (2) DE3917396A1 (enExample)
DK (1) DK0400482T3 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4101575A1 (de) * 1991-01-21 1992-07-23 Bosch Gmbh Robert Mikroventil
DE112004003058B4 (de) * 2004-08-18 2009-05-07 Agilent Technologies Inc., Santa Clara Mikrofluidisches Kopplungsgerät mit variablem Flusswiderstand und mikrofluidische Anordnung
DE102011109944B4 (de) 2011-08-10 2018-10-25 Bürkert Werke GmbH Fertigungsverfahren für Mikroventile

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* Cited by examiner, † Cited by third party
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DE4041579A1 (de) * 1990-12-22 1992-06-25 Bosch Gmbh Robert Mikroventil
US5400824A (en) * 1991-01-21 1995-03-28 Robert Bosch Gmbh Microvalve
US5230367A (en) * 1991-10-31 1993-07-27 Xemet, Incorporated Quiet high pressure reducing valve
JP2532907Y2 (ja) * 1992-02-10 1997-04-16 動力炉・核燃料開発事業団 幅広パルスノズル
DE4222660C2 (de) * 1992-07-10 1996-03-21 Kernforschungsz Karlsruhe Verfahren zur Herstellung eines Mikroventils
US5412265A (en) * 1993-04-05 1995-05-02 Ford Motor Company Planar micro-motor and method of fabrication
US5349986A (en) * 1993-08-23 1994-09-27 The United States Of America As Represented By The Secretary Of The Navy Valve mechanism for an acoustic modulator
US6230501B1 (en) 1994-04-14 2001-05-15 Promxd Technology, Inc. Ergonomic systems and methods providing intelligent adaptive surfaces and temperature control
US6019437A (en) * 1996-05-29 2000-02-01 Kelsey-Hayes Company Vehicle hydraulic braking systems incorporating micro-machined technology
US6533366B1 (en) 1996-05-29 2003-03-18 Kelsey-Hayes Company Vehicle hydraulic braking systems incorporating micro-machined technology
DE19621796A1 (de) * 1996-05-30 1997-12-04 Nass Magnet Gmbh Ventil
US5929542A (en) * 1997-02-03 1999-07-27 Honeywell Inc. Micromechanical stepper motor
US5943223A (en) * 1997-10-15 1999-08-24 Reliance Electric Industrial Company Electric switches for reducing on-state power loss
DE19821638C2 (de) * 1998-05-14 2000-07-06 Festo Ag & Co Mikroventil
ATE393319T1 (de) 1998-09-03 2008-05-15 Ge Novasensor Inc Proportionale, mikromechanische vorrichtung
US7011378B2 (en) 1998-09-03 2006-03-14 Ge Novasensor, Inc. Proportional micromechanical valve
US6523560B1 (en) 1998-09-03 2003-02-25 General Electric Corporation Microvalve with pressure equalization
US6280147B1 (en) 1998-10-13 2001-08-28 Liquid Metronics Incorporated Apparatus for adjusting the stroke length of a pump element
US6174136B1 (en) 1998-10-13 2001-01-16 Liquid Metronics Incorporated Pump control and method of operating same
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US6540203B1 (en) 1999-03-22 2003-04-01 Kelsey-Hayes Company Pilot operated microvalve device
US7219449B1 (en) 1999-05-03 2007-05-22 Promdx Technology, Inc. Adaptively controlled footwear
US6899137B2 (en) * 1999-06-28 2005-05-31 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8550119B2 (en) * 1999-06-28 2013-10-08 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8052792B2 (en) 2001-04-06 2011-11-08 California Institute Of Technology Microfluidic protein crystallography techniques
US7144616B1 (en) 1999-06-28 2006-12-05 California Institute Of Technology Microfabricated elastomeric valve and pump systems
EP1065378B1 (en) 1999-06-28 2002-04-03 California Institute of Technology Microfabricated elastomeric valve and pump systems
US20080277007A1 (en) * 1999-06-28 2008-11-13 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8709153B2 (en) 1999-06-28 2014-04-29 California Institute Of Technology Microfludic protein crystallography techniques
US6887615B1 (en) * 1999-07-30 2005-05-03 The Procter & Gamble Company Microvalve for controlling fluid flow
US6962170B1 (en) * 1999-07-30 2005-11-08 The Procter & Gamble Company Microvalve for controlling fluid flow
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US6694998B1 (en) 2000-03-22 2004-02-24 Kelsey-Hayes Company Micromachined structure usable in pressure regulating microvalve and proportional microvalve
US6845962B1 (en) * 2000-03-22 2005-01-25 Kelsey-Hayes Company Thermally actuated microvalve device
US6494804B1 (en) 2000-06-20 2002-12-17 Kelsey-Hayes Company Microvalve for electronically controlled transmission
US6505811B1 (en) 2000-06-27 2003-01-14 Kelsey-Hayes Company High-pressure fluid control valve assembly having a microvalve device attached to fluid distributing substrate
US6589229B1 (en) 2000-07-31 2003-07-08 Becton, Dickinson And Company Wearable, self-contained drug infusion device
US6581640B1 (en) 2000-08-16 2003-06-24 Kelsey-Hayes Company Laminated manifold for microvalve
US6695970B2 (en) * 2002-07-03 2004-02-24 Ike W. Hornsby Actuated bypass valve and method of using same for reducing swimming pool energy consumption
WO2003012566A1 (en) * 2001-07-31 2003-02-13 Kelsey-Hayes Company Micromachined structure usable in pressure regulating microvalve and proportional microvalve
US7674361B2 (en) * 2003-09-24 2010-03-09 Microfabrica Inc. Micro-turbines, roller bearings, bushings, and design of hollow closed structures and fabrication methods for creating such structures
US7498714B2 (en) * 2003-09-24 2009-03-03 Microfabrica Inc. Multi-layer three-dimensional structures having features smaller than a minimum feature size associated with the formation of individual layers
US6877964B2 (en) * 2002-11-06 2005-04-12 The United States Of America As Represented By The Secretary Of The Air Force Multifunction microfluidics device
DE10307313A1 (de) * 2003-02-20 2004-09-09 Otto Egelhof Gmbh & Co. Kg Schieberventil
EP1734294B1 (en) * 2003-04-28 2009-07-08 Alfmeier Präzision Ag Baugruppen und Systemlösungen Flow control assemblies having integrally formed shape memory alloy actuators
KR20060041164A (ko) * 2003-05-02 2006-05-11 알프마이어 프레치지온 악티엔게젤샤프트 바우그룹펜 운트 지스템뢰중엔 일체형 형상 기억 합금 액츄에이터를 갖는 게이지 포인터
WO2005026592A2 (en) 2003-09-05 2005-03-24 Alfmeier Präzision AG Baugruppen und Systemlösungen A system, method and apparatus for reducing frictional forces and for compensating shape memory alloy-actuated valves and valve systems at high temperatures
US8011388B2 (en) * 2003-11-24 2011-09-06 Microstaq, INC Thermally actuated microvalve with multiple fluid ports
CA2546585A1 (en) * 2003-11-24 2005-06-09 Alumina Micro Llc Microvalve device suitable for controlling a variable displacement compressor
KR20070012375A (ko) * 2004-02-27 2007-01-25 알루미나 마이크로 엘엘씨 하이브리드 마이크로/매크로 평판 밸브
KR20060128042A (ko) * 2004-03-05 2006-12-13 알루미나 마이크로 엘엘씨 선택식 마이크로밸브 형성 접합방법
US20060112895A1 (en) * 2004-05-11 2006-06-01 Laurent Olivier System for raising aquatic animals
US7753072B2 (en) 2004-07-23 2010-07-13 Afa Controls Llc Valve assemblies including at least three chambers and related methods
US7156365B2 (en) * 2004-07-27 2007-01-02 Kelsey-Hayes Company Method of controlling microvalve actuator
JP2008527244A (ja) * 2005-01-14 2008-07-24 アルーマナ、マイクロウ、エルエルシー 可変容量型コンプレッサを制御するシステムおよび方法
US7913928B2 (en) 2005-11-04 2011-03-29 Alliant Techsystems Inc. Adaptive structures, systems incorporating same and related methods
US7815868B1 (en) 2006-02-28 2010-10-19 Fluidigm Corporation Microfluidic reaction apparatus for high throughput screening
US7717130B2 (en) * 2006-05-17 2010-05-18 Purdue Research Foundation Fast-acting fluid control valve
DE112007003035T5 (de) 2006-12-15 2009-11-05 Microstaq, Inc., Austin Mikroventilvorrichtung
US20080173836A1 (en) * 2007-01-22 2008-07-24 Shy-Shiun Chern Easy-control valve
DE112008000862T5 (de) 2007-03-30 2010-03-11 Microstaq, Inc., Austin Vorgesteuertes Mikroschieberventil
US8387659B2 (en) 2007-03-31 2013-03-05 Dunan Microstaq, Inc. Pilot operated spool valve
BRPI0822082A2 (pt) * 2007-12-11 2015-06-23 Isentropic Ltd Válvula
JP2011530683A (ja) 2008-08-09 2011-12-22 マイクラスタック、インク 改良型のマイクロバルブ・デバイス
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CN102575782B (zh) 2009-08-17 2014-04-09 盾安美斯泰克股份有限公司 微型机械装置和控制方法
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US10330212B2 (en) * 2016-01-27 2019-06-25 Regents Of The University Of Minnesota Fluidic control valve with small displacement actuators
US11067187B2 (en) 2016-01-27 2021-07-20 Regents Of The University Of Minnesota Fluidic control valve with small displacement actuators
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4101575A1 (de) * 1991-01-21 1992-07-23 Bosch Gmbh Robert Mikroventil
DE112004003058B4 (de) * 2004-08-18 2009-05-07 Agilent Technologies Inc., Santa Clara Mikrofluidisches Kopplungsgerät mit variablem Flusswiderstand und mikrofluidische Anordnung
DE102011109944B4 (de) 2011-08-10 2018-10-25 Bürkert Werke GmbH Fertigungsverfahren für Mikroventile

Also Published As

Publication number Publication date
EP0400482A2 (de) 1990-12-05
EP0400482B1 (de) 1994-11-23
DE59007736D1 (de) 1995-01-05
EP0400482A3 (de) 1991-05-29
JPH0379878A (ja) 1991-04-04
US5054522A (en) 1991-10-08
DK0400482T3 (da) 1994-12-12
DE3917396A1 (de) 1990-12-06

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