DE3874884D1 - Elektrischer kraft- und/oder verformungsmessfuehler, insbesondere zum gebrauch als druckmessfuehler. - Google Patents
Elektrischer kraft- und/oder verformungsmessfuehler, insbesondere zum gebrauch als druckmessfuehler.Info
- Publication number
- DE3874884D1 DE3874884D1 DE8888830166T DE3874884T DE3874884D1 DE 3874884 D1 DE3874884 D1 DE 3874884D1 DE 8888830166 T DE8888830166 T DE 8888830166T DE 3874884 T DE3874884 T DE 3874884T DE 3874884 D1 DE3874884 D1 DE 3874884D1
- Authority
- DE
- Germany
- Prior art keywords
- sensor
- thick
- thin
- electrical force
- upper face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP88830166A EP0338180B1 (de) | 1988-04-21 | 1988-04-21 | Elektrischer Kraft- und/oder Verformungsmessfühler, insbesondere zum Gebrauch als Druckmessfühler |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3874884D1 true DE3874884D1 (de) | 1992-10-29 |
DE3874884T2 DE3874884T2 (de) | 1993-04-29 |
Family
ID=8200633
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8888830166T Expired - Fee Related DE3874884T2 (de) | 1988-04-21 | 1988-04-21 | Elektrischer kraft- und/oder verformungsmessfuehler, insbesondere zum gebrauch als druckmessfuehler. |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0338180B1 (de) |
AT (1) | ATE80942T1 (de) |
DE (1) | DE3874884T2 (de) |
ES (1) | ES2035360T3 (de) |
GR (1) | GR3005777T3 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3912280A1 (de) * | 1989-04-14 | 1990-10-18 | Bosch Gmbh Robert | Verfahren zum herstellen eines sensors zum bestimmen von druckkraeften |
WO1998009145A1 (de) * | 1996-08-27 | 1998-03-05 | Robert Bosch Gmbh | Verfahren zur herstellung von drucksensoren |
DE102016203428B3 (de) * | 2016-03-02 | 2017-02-23 | Metallux Ag | Drucksensor |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL162254B (nl) * | 1968-11-29 | 1979-11-15 | Philips Nv | Halfgeleiderinrichting voor het omzetten van mechanische spanningen in elektrische signalen en werkwijze voor het vervaardigen daarvan. |
DE2036901A1 (de) * | 1970-07-24 | 1972-02-03 | Sauter Kg August | Halbleitergeber zur Kraftmessung |
US3697918A (en) * | 1971-08-03 | 1972-10-10 | Gen Electric | Silicon diaphragm pressure sensor having improved configuration of integral strain gage elements |
US3841150A (en) * | 1973-11-02 | 1974-10-15 | Honeywell Inc | Strain gauge transducer signal conditioning circuitry |
US4331035A (en) * | 1979-11-13 | 1982-05-25 | Gould Inc. | Geometric balance adjustment of thin film strain gage sensors |
DE3207833A1 (de) * | 1982-03-04 | 1983-09-15 | Siemens AG, 1000 Berlin und 8000 München | Halbleiter-drucksensor |
JPS60253279A (ja) * | 1984-05-29 | 1985-12-13 | Toyota Central Res & Dev Lab Inc | 半導体歪み測定器 |
US4528855A (en) * | 1984-07-02 | 1985-07-16 | Itt Corporation | Integral differential and static pressure transducer |
-
1988
- 1988-04-21 DE DE8888830166T patent/DE3874884T2/de not_active Expired - Fee Related
- 1988-04-21 ES ES198888830166T patent/ES2035360T3/es not_active Expired - Lifetime
- 1988-04-21 EP EP88830166A patent/EP0338180B1/de not_active Expired
- 1988-04-21 AT AT88830166T patent/ATE80942T1/de not_active IP Right Cessation
-
1992
- 1992-09-24 GR GR920402065T patent/GR3005777T3/el unknown
Also Published As
Publication number | Publication date |
---|---|
EP0338180B1 (de) | 1992-09-23 |
ATE80942T1 (de) | 1992-10-15 |
GR3005777T3 (de) | 1993-06-07 |
DE3874884T2 (de) | 1993-04-29 |
ES2035360T3 (es) | 1993-04-16 |
EP0338180A1 (de) | 1989-10-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8365 | Fully valid after opposition proceedings | ||
8339 | Ceased/non-payment of the annual fee |