DE3870850D1 - Gaslaser mit piezoelektrischem ventilator. - Google Patents

Gaslaser mit piezoelektrischem ventilator.

Info

Publication number
DE3870850D1
DE3870850D1 DE8888908445T DE3870850T DE3870850D1 DE 3870850 D1 DE3870850 D1 DE 3870850D1 DE 8888908445 T DE8888908445 T DE 8888908445T DE 3870850 T DE3870850 T DE 3870850T DE 3870850 D1 DE3870850 D1 DE 3870850D1
Authority
DE
Germany
Prior art keywords
gas laser
piezoelectric fan
piezoelectric
fan
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888908445T
Other languages
English (en)
Inventor
Wayde Affleck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Application granted granted Critical
Publication of DE3870850D1 publication Critical patent/DE3870850D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Laser Surgery Devices (AREA)
DE8888908445T 1987-07-31 1988-06-20 Gaslaser mit piezoelektrischem ventilator. Expired - Fee Related DE3870850D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/079,975 US4751713A (en) 1987-07-31 1987-07-31 Gas laser having a piezoelectric fan
PCT/US1988/002061 WO1989001250A1 (en) 1987-07-31 1988-06-20 Gas laser having a piezoelectric fan

Publications (1)

Publication Number Publication Date
DE3870850D1 true DE3870850D1 (de) 1992-06-11

Family

ID=22154000

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888908445T Expired - Fee Related DE3870850D1 (de) 1987-07-31 1988-06-20 Gaslaser mit piezoelektrischem ventilator.

Country Status (11)

Country Link
US (1) US4751713A (de)
EP (1) EP0325652B1 (de)
JP (1) JPH077854B2 (de)
KR (1) KR920000078B1 (de)
DE (1) DE3870850D1 (de)
EG (1) EG18560A (de)
ES (1) ES2008554A6 (de)
GR (1) GR1001632B (de)
IL (1) IL86966A (de)
NO (1) NO176039C (de)
WO (1) WO1989001250A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4975925A (en) * 1989-11-01 1990-12-04 The Spectranetics Corporation Unlubricated bearings for gas lasers
US5861703A (en) * 1997-05-30 1999-01-19 Motorola Inc. Low-profile axial-flow single-blade piezoelectric fan
US6353295B1 (en) 1999-01-20 2002-03-05 Philips Electronics North America Corporation Lamp electronic ballast with a piezoelectric cooling fan
US7856044B2 (en) 1999-05-10 2010-12-21 Cymer, Inc. Extendable electrode for gas discharge laser
US7031155B2 (en) * 2003-01-06 2006-04-18 Intel Corporation Electronic thermal management
KR101414639B1 (ko) * 2009-09-14 2014-07-03 엘지전자 주식회사 방열 장치
KR101414642B1 (ko) * 2009-11-20 2014-07-03 엘지전자 주식회사 방열 장치
GB201220471D0 (en) * 2012-11-14 2012-12-26 Technology Partnership The Pump
TWM521322U (zh) * 2015-12-18 2016-05-01 Xian-Qin Su 散熱裝置及其擺動結構
TWI667871B (zh) * 2018-08-07 2019-08-01 國立交通大學 風扇裝置
US11464140B2 (en) * 2019-12-06 2022-10-04 Frore Systems Inc. Centrally anchored MEMS-based active cooling systems
US11043444B2 (en) 2018-08-10 2021-06-22 Frore Systems Inc. Two-dimensional addessable array of piezoelectric MEMS-based active cooling devices
WO2021086873A1 (en) 2019-10-30 2021-05-06 Frore System Inc. Mems-based airflow system
US11796262B2 (en) 2019-12-06 2023-10-24 Frore Systems Inc. Top chamber cavities for center-pinned actuators
US11510341B2 (en) 2019-12-06 2022-11-22 Frore Systems Inc. Engineered actuators usable in MEMs active cooling devices
CN116325139A (zh) 2020-10-02 2023-06-23 福珞尔系统公司 主动式热沉
KR20230122144A (ko) * 2020-12-22 2023-08-22 사이머 엘엘씨 가스 방전 챔버 블로워의 에너지 소모를 줄이는 기술

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1426161A (en) * 1973-03-09 1976-02-25 Avco Everett Res Lab Inc Flowing-gas laser apparatus
JPS55130161A (en) * 1979-03-30 1980-10-08 Showa Denko Kk Fabricating method of p-n hetero junction element
JPS55161200A (en) * 1979-05-31 1980-12-15 Kubota Ltd Lockup bolt
US4325033A (en) * 1979-07-02 1982-04-13 Rockwell International Corporation Pneumatically dithered laser gyro
JPS5715799A (en) * 1980-07-01 1982-01-27 Nippon Steel Corp Internal ventilation of underwater joined composite pipe
GB2106705B (en) * 1981-09-17 1986-01-22 Atomic Energy Authority Uk Induced flow gas transport laser
DE3305152A1 (de) * 1983-02-15 1984-08-16 Rofin-Sinar Laser GmbH, 2000 Hamburg Gasdurchfluss-laser
JPH0656160B2 (ja) * 1986-04-24 1994-07-27 株式会社村田製作所 圧電フアン
US4672620A (en) * 1986-05-14 1987-06-09 Spectra-Physics, Inc. Fast axial flow carbon dioxide laser
EP0288496B1 (de) * 1986-11-04 1992-10-28 Hughes Aircraft Company Repetitive gepulste raman-zelle, deren gaszirkulation durch ein vibrierendes blatt unterhalten wird

Also Published As

Publication number Publication date
IL86966A0 (en) 1988-12-30
NO891288L (no) 1989-03-28
GR1001632B (el) 1994-08-31
NO176039C (no) 1995-01-18
KR890702302A (ko) 1989-12-23
EP0325652A1 (de) 1989-08-02
JPH077854B2 (ja) 1995-01-30
ES2008554A6 (es) 1989-07-16
EP0325652B1 (de) 1992-05-06
IL86966A (en) 1991-11-21
JPH02500314A (ja) 1990-02-01
EG18560A (en) 1994-06-30
US4751713A (en) 1988-06-14
NO176039B (no) 1994-10-10
NO891288D0 (no) 1989-03-28
KR920000078B1 (ko) 1992-01-06
WO1989001250A1 (en) 1989-02-09
GR880100425A (en) 1989-04-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee