DE3855482D1 - Electron emitting element and its manufacturing process - Google Patents

Electron emitting element and its manufacturing process

Info

Publication number
DE3855482D1
DE3855482D1 DE3855482T DE3855482T DE3855482D1 DE 3855482 D1 DE3855482 D1 DE 3855482D1 DE 3855482 T DE3855482 T DE 3855482T DE 3855482 T DE3855482 T DE 3855482T DE 3855482 D1 DE3855482 D1 DE 3855482D1
Authority
DE
Germany
Prior art keywords
emitting element
manufacturing process
electron emitting
electron
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3855482T
Other languages
German (de)
Other versions
DE3855482T2 (en
Inventor
Masahiko Okunuki
Akira Suzuki
Isamu Shimoda
Tetsuya Kaneko
Takeo Tsukamoto
Toshihiko Takeda
Takao Yonehara
Takeshi Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2487387A external-priority patent/JP2612565B2/en
Priority claimed from JP2487287A external-priority patent/JP2612564B2/en
Priority claimed from JP3807687A external-priority patent/JP2612567B2/en
Priority claimed from JP3807587A external-priority patent/JP2609602B2/en
Priority claimed from JP4781687A external-priority patent/JP2609604B2/en
Priority claimed from JP5034487A external-priority patent/JP2561263B2/en
Priority claimed from JP5211387A external-priority patent/JP2612569B2/en
Priority claimed from JP6789287A external-priority patent/JP2713569B2/en
Priority claimed from JP7046787A external-priority patent/JP2616918B2/en
Priority claimed from JP7360187A external-priority patent/JP2612571B2/en
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE3855482D1 publication Critical patent/DE3855482D1/en
Publication of DE3855482T2 publication Critical patent/DE3855482T2/en
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123—Flat display tubes
    • H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
DE19883855482 1987-02-06 1988-02-04 Electron emitting element and its manufacturing process Expired - Fee Related DE3855482T2 (en)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP2487387A JP2612565B2 (en) 1987-02-06 1987-02-06 Electron emitting device and method of manufacturing the same
JP2487287A JP2612564B2 (en) 1987-02-06 1987-02-06 Multi-type electron-emitting device and method of manufacturing the same
JP3807587A JP2609602B2 (en) 1987-02-23 1987-02-23 Electron emitting device and method of manufacturing the same
JP3807687A JP2612567B2 (en) 1987-02-23 1987-02-23 Electron-emitting device
JP4781687A JP2609604B2 (en) 1987-03-04 1987-03-04 Electron emission method and electron emission device
JP5034487A JP2561263B2 (en) 1987-03-06 1987-03-06 Method for manufacturing electron-emitting device
JP5211387A JP2612569B2 (en) 1987-03-09 1987-03-09 Electron-emitting device
JP6789287A JP2713569B2 (en) 1987-03-24 1987-03-24 Electron emission device
JP7046787A JP2616918B2 (en) 1987-03-26 1987-03-26 Display device
JP7360187A JP2612571B2 (en) 1987-03-27 1987-03-27 Electron-emitting device

Publications (2)

Publication Number Publication Date
DE3855482D1 true DE3855482D1 (en) 1996-09-26
DE3855482T2 DE3855482T2 (en) 1997-03-20

Family

ID=27579773

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19883855482 Expired - Fee Related DE3855482T2 (en) 1987-02-06 1988-02-04 Electron emitting element and its manufacturing process
DE19883856492 Expired - Fee Related DE3856492T2 (en) 1987-02-06 1988-02-04 A display device containing an electron emission element

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE19883856492 Expired - Fee Related DE3856492T2 (en) 1987-02-06 1988-02-04 A display device containing an electron emission element

Country Status (3)

Country Link
EP (2) EP0713241B1 (en)
AU (2) AU1134388A (en)
DE (2) DE3855482T2 (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2644287B1 (en) * 1989-03-10 1996-01-26 Thomson Csf METHOD FOR PRODUCING FIELD EMISSION TYPE ELECTRON SOURCES AND DEVICES MADE FROM SAID SOURCES
DE68913419T2 (en) * 1988-03-25 1994-06-01 Thomson Csf METHOD FOR PRODUCING FIELD EMISSION ELECTRON SOURCES AND APPLICATION FOR PRODUCING EMITTER MATRICES.
FR2637126B1 (en) * 1988-09-23 1992-05-07 Thomson Csf COMPONENT SUCH AS DIODE, TRIODE OR FLAT AND INTEGRATED CATHODOLUMINESCENT DISPLAY DEVICE, AND MANUFACTURING METHOD
DE69033677T2 (en) * 1989-09-04 2001-05-23 Canon Kk Electron emission element and manufacturing method thereof
FR2658839B1 (en) * 1990-02-23 1997-06-20 Thomson Csf METHOD FOR CONTROLLED GROWTH OF ACICULAR CRYSTALS AND APPLICATION TO THE PRODUCTION OF POINTED MICROCATHODES.
JP2918637B2 (en) * 1990-06-27 1999-07-12 三菱電機株式会社 Micro vacuum tube and manufacturing method thereof
US5332627A (en) * 1990-10-30 1994-07-26 Sony Corporation Field emission type emitter and a method of manufacturing thereof
FR2669465B1 (en) * 1990-11-16 1996-07-12 Thomson Rech SOURCE OF ELECTRONS AND METHOD FOR THE PRODUCTION THEREOF.
US5283501A (en) * 1991-07-18 1994-02-01 Motorola, Inc. Electron device employing a low/negative electron affinity electron source
US5129850A (en) * 1991-08-20 1992-07-14 Motorola, Inc. Method of making a molded field emission electron emitter employing a diamond coating
US5141460A (en) * 1991-08-20 1992-08-25 Jaskie James E Method of making a field emission electron source employing a diamond coating
US5619092A (en) * 1993-02-01 1997-04-08 Motorola Enhanced electron emitter
EP0623944B1 (en) * 1993-05-05 1997-07-02 AT&T Corp. Flat panel display apparatus, and method of making same
US5514937A (en) * 1994-01-24 1996-05-07 Motorola Apparatus and method for compensating electron emission in a field emission device
JP3251466B2 (en) 1994-06-13 2002-01-28 キヤノン株式会社 Electron beam generator having a plurality of cold cathode elements, driving method thereof, and image forming apparatus using the same
JPH0850850A (en) * 1994-08-09 1996-02-20 Agency Of Ind Science & Technol Field emission type electron emission element and its manufacture
JP3311246B2 (en) 1995-08-23 2002-08-05 キヤノン株式会社 Electron generating device, image display device, their driving circuit, and driving method
US5994834A (en) * 1997-08-22 1999-11-30 Micron Technology, Inc. Conductive address structure for field emission displays
US20060232191A1 (en) * 2005-04-15 2006-10-19 Samsung Electronics Co., Ltd. Gate-controlled electron-emitter array panel, active matrix display including the same, and method of manufacturing the panel
US8866068B2 (en) 2012-12-27 2014-10-21 Schlumberger Technology Corporation Ion source with cathode having an array of nano-sized projections

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3970887A (en) * 1974-06-19 1976-07-20 Micro-Bit Corporation Micro-structure field emission electron source
US4168213A (en) * 1976-04-29 1979-09-18 U.S. Philips Corporation Field emission device and method of forming same
JPS5679828A (en) * 1979-12-05 1981-06-30 Toshiba Corp Electron gun
DE3133786A1 (en) * 1981-08-26 1983-03-10 Battelle-Institut E.V., 6000 Frankfurt ARRANGEMENT FOR GENERATING FIELD EMISSION AND METHOD FOR THE PRODUCTION THEREOF
NL8400297A (en) * 1984-02-01 1985-09-02 Philips Nv Semiconductor device for generating an electron beam.
FR2568394B1 (en) * 1984-07-27 1988-02-12 Commissariat Energie Atomique DEVICE FOR VIEWING BY CATHODOLUMINESCENCE EXCITED BY FIELD EMISSION

Also Published As

Publication number Publication date
EP0713241B1 (en) 2001-09-19
EP0713241A3 (en) 1996-06-05
EP0278405A2 (en) 1988-08-17
EP0278405B1 (en) 1996-08-21
EP0713241A2 (en) 1996-05-22
DE3856492D1 (en) 2001-10-25
DE3856492T2 (en) 2002-10-31
AU631327B2 (en) 1992-11-19
AU8774991A (en) 1992-01-09
EP0278405A3 (en) 1990-05-16
DE3855482T2 (en) 1997-03-20
AU1134388A (en) 1988-08-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee