DE3831593A1 - Schaltungsanordnung mit einer einer mechanischen verstimmung ausgesetzten differentialkondensator-anordnung - Google Patents

Schaltungsanordnung mit einer einer mechanischen verstimmung ausgesetzten differentialkondensator-anordnung

Info

Publication number
DE3831593A1
DE3831593A1 DE3831593A DE3831593A DE3831593A1 DE 3831593 A1 DE3831593 A1 DE 3831593A1 DE 3831593 A DE3831593 A DE 3831593A DE 3831593 A DE3831593 A DE 3831593A DE 3831593 A1 DE3831593 A1 DE 3831593A1
Authority
DE
Germany
Prior art keywords
arrangement
circuit arrangement
amplifier
circuit
evaluation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE3831593A
Other languages
German (de)
English (en)
Other versions
DE3831593C2 (enrdf_load_stackoverflow
Inventor
Hans-Juergen Prof Dr Gevatter
Ying Dipl Ing Yu
Henning Dipl Ing Gaus
Hartmut Dr Grethen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Priority to DE3831593A priority Critical patent/DE3831593A1/de
Publication of DE3831593A1 publication Critical patent/DE3831593A1/de
Application granted granted Critical
Publication of DE3831593C2 publication Critical patent/DE3831593C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Amplifiers (AREA)
DE3831593A 1988-09-15 1988-09-15 Schaltungsanordnung mit einer einer mechanischen verstimmung ausgesetzten differentialkondensator-anordnung Granted DE3831593A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE3831593A DE3831593A1 (de) 1988-09-15 1988-09-15 Schaltungsanordnung mit einer einer mechanischen verstimmung ausgesetzten differentialkondensator-anordnung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3831593A DE3831593A1 (de) 1988-09-15 1988-09-15 Schaltungsanordnung mit einer einer mechanischen verstimmung ausgesetzten differentialkondensator-anordnung

Publications (2)

Publication Number Publication Date
DE3831593A1 true DE3831593A1 (de) 1990-03-22
DE3831593C2 DE3831593C2 (enrdf_load_stackoverflow) 1993-02-04

Family

ID=6363118

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3831593A Granted DE3831593A1 (de) 1988-09-15 1988-09-15 Schaltungsanordnung mit einer einer mechanischen verstimmung ausgesetzten differentialkondensator-anordnung

Country Status (1)

Country Link
DE (1) DE3831593A1 (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2672130A1 (fr) * 1991-01-11 1992-07-31 Northrop Corp Accelerometre miniature et procede pour capter une acceleration.
DE4127460A1 (de) * 1991-08-20 1993-02-25 Dornier Gmbh Sensor
DE9205416U1 (de) * 1992-04-21 1993-05-19 Kampfrath, Gerit, Dr. Dynamischer Beschleunigungssensor
FR2700614A1 (fr) * 1993-01-19 1994-07-22 Sextant Avionique Accéléromètre capacitif à circuit de correction de l'effet perturbateur de capacités parasites.
EP0703459A1 (en) * 1994-08-24 1996-03-27 Murata Manufacturing Co., Ltd. Capacitor type acceleration sensor
EP0835453A4 (en) * 1996-04-30 1999-07-14 Motorola Inc LOGOMETRIC CIRCUIT
US6278283B1 (en) 1998-05-11 2001-08-21 Mitsubishi Denki Kabushiki Kaisha Capacitance detecting circuit
DE102007027652A1 (de) * 2007-06-15 2008-12-18 Litef Gmbh Betriebsverfahren und Schaltungsanordnung für einen kapazitiven mikromechanischen Sensor mit analoger Rückstellung

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19715078A1 (de) * 1997-04-11 1998-10-15 Univ Ilmenau Tech Verfahren zur kapazitiven Weg- und Winkelmessung

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3143114A1 (de) * 1980-11-07 1982-07-15 Mestra AG, 4153 Reinach Verfahren und schaltung zur messung von kapazitaeten
DE3014038C2 (de) * 1979-04-11 1986-09-25 Société d'Applications Générales d'Electricité et de Mécanique SAGEM, Paris Pendelbeschleunigungsmesser

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3014038C2 (de) * 1979-04-11 1986-09-25 Société d'Applications Générales d'Electricité et de Mécanique SAGEM, Paris Pendelbeschleunigungsmesser
DE3143114A1 (de) * 1980-11-07 1982-07-15 Mestra AG, 4153 Reinach Verfahren und schaltung zur messung von kapazitaeten

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
U. TIETZE, Ch. SCHENK: "Halbleiterschaltungs- technik", Springer-Verlag, Berlin, Heidelberg, 6.Aufl., 1983, S.74 *

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2672130A1 (fr) * 1991-01-11 1992-07-31 Northrop Corp Accelerometre miniature et procede pour capter une acceleration.
DE4200293C2 (de) * 1991-01-11 2002-10-17 Northrop Grumman Corp N D Ges Miniatur-Silizium-Beschleunigungsmesser und Verfahren zum Messen der Beschleunigung
DE4127460A1 (de) * 1991-08-20 1993-02-25 Dornier Gmbh Sensor
DE4312839A1 (de) * 1992-04-21 1993-10-28 Gerit Dr Kampfrath Dynamischer Beschleunigungssensor
DE9205416U1 (de) * 1992-04-21 1993-05-19 Kampfrath, Gerit, Dr. Dynamischer Beschleunigungssensor
FR2700614A1 (fr) * 1993-01-19 1994-07-22 Sextant Avionique Accéléromètre capacitif à circuit de correction de l'effet perturbateur de capacités parasites.
EP0613012A1 (fr) * 1993-01-19 1994-08-31 SEXTANT Avionique Accéléromètre capacitif à circuit de correction de l'effet pertubateur de capacités parasites
EP0703459A1 (en) * 1994-08-24 1996-03-27 Murata Manufacturing Co., Ltd. Capacitor type acceleration sensor
EP0835453A4 (en) * 1996-04-30 1999-07-14 Motorola Inc LOGOMETRIC CIRCUIT
US6278283B1 (en) 1998-05-11 2001-08-21 Mitsubishi Denki Kabushiki Kaisha Capacitance detecting circuit
DE102007027652A1 (de) * 2007-06-15 2008-12-18 Litef Gmbh Betriebsverfahren und Schaltungsanordnung für einen kapazitiven mikromechanischen Sensor mit analoger Rückstellung
US8171794B2 (en) 2007-06-15 2012-05-08 Northrop Grumman Litef Gmbh Operating method and circuit arrangement for a capacitive micromechanical sensor with analog reset
DE102007027652B4 (de) * 2007-06-15 2013-06-20 Litef Gmbh Betriebsverfahren und Schaltungsanordnung für einen kapazitiven mikromechanischen Sensor mit analoger Rückstellung

Also Published As

Publication number Publication date
DE3831593C2 (enrdf_load_stackoverflow) 1993-02-04

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee