DE3785292T2 - Hochleistungslasermaske und Herstellungsverfahren. - Google Patents
Hochleistungslasermaske und Herstellungsverfahren.Info
- Publication number
- DE3785292T2 DE3785292T2 DE19873785292 DE3785292T DE3785292T2 DE 3785292 T2 DE3785292 T2 DE 3785292T2 DE 19873785292 DE19873785292 DE 19873785292 DE 3785292 T DE3785292 T DE 3785292T DE 3785292 T2 DE3785292 T2 DE 3785292T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing process
- high power
- power laser
- laser mask
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
- G03F1/58—Absorbers, e.g. of opaque materials having two or more different absorber layers, e.g. stacked multilayer absorbers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
- G03F1/24—Reflection masks; Preparation thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US92448086A | 1986-10-29 | 1986-10-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3785292D1 DE3785292D1 (de) | 1993-05-13 |
DE3785292T2 true DE3785292T2 (de) | 1993-10-28 |
Family
ID=25450254
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19873785292 Expired - Fee Related DE3785292T2 (de) | 1986-10-29 | 1987-09-18 | Hochleistungslasermaske und Herstellungsverfahren. |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0265658B1 (de) |
JP (1) | JPH0797216B2 (de) |
DE (1) | DE3785292T2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10017614A1 (de) * | 2000-03-31 | 2001-10-25 | Laser Lab Goettingen Ev | Verfahren zur Herstellung einer dielektrischen Reflexionsmaske |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69133169D1 (de) * | 1990-05-09 | 2003-01-16 | Canon Kk | Verfahren zur Erzeugung einer Struktur und Verfahren zum Vorbereiten einer halbleitenden Anordnung mit Hilfe dieses Verfahrens |
GB9105870D0 (en) * | 1991-03-20 | 1991-05-08 | Xaar Ltd | Fluid cooled contact mask |
FR2694131B1 (fr) * | 1992-07-21 | 1996-09-27 | Balzers Hochvakuum | Procede et installation pour la fabrication d'un composant, notamment d'un composant optique, et composant optique ainsi obtenu. |
CH686461A5 (de) * | 1992-07-21 | 1996-03-29 | Balzers Hochvakuum | Verfahren zur Herstellung eines Bauelementes, optisches Bauelement und Anlage zur Durchfuehrung des Verfahrens. |
US6627355B2 (en) * | 1999-07-20 | 2003-09-30 | Advanced Micro Devices, Inc. | Method of and system for improving stability of photomasks |
US6107598A (en) * | 1999-08-10 | 2000-08-22 | Chromalloy Gas Turbine Corporation | Maskant for use during laser welding or drilling |
US6444372B1 (en) * | 1999-10-25 | 2002-09-03 | Svg Lithography Systems, Inc. | Non absorbing reticle and method of making same |
KR102462030B1 (ko) * | 2018-06-14 | 2022-11-01 | 인테벡, 인코포레이티드 | 멀티 칼라 절연 코팅 및 uv 잉크젯 프린팅 |
US11885990B2 (en) * | 2018-08-27 | 2024-01-30 | Materion Corporation | UV reflective mirrors for display fabrication |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3147985C2 (de) * | 1981-12-04 | 1986-03-13 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Verfahren zur Herstellung eines Aufzeichnungsträgers mit einer mehrfarbigen Feinstruktur |
DE3224736A1 (de) * | 1982-07-02 | 1984-01-05 | Bodenseewerk Perkin-Elmer & Co GmbH, 7770 Überlingen | Gitterspektrometer |
DE3856054T2 (de) * | 1987-02-18 | 1998-03-19 | Canon Kk | Reflexionsmaske |
-
1987
- 1987-05-15 JP JP11726587A patent/JPH0797216B2/ja not_active Expired - Lifetime
- 1987-09-18 DE DE19873785292 patent/DE3785292T2/de not_active Expired - Fee Related
- 1987-09-18 EP EP19870113673 patent/EP0265658B1/de not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10017614A1 (de) * | 2000-03-31 | 2001-10-25 | Laser Lab Goettingen Ev | Verfahren zur Herstellung einer dielektrischen Reflexionsmaske |
DE10017614B4 (de) * | 2000-03-31 | 2005-02-24 | Laser-Laboratorium Göttingen eV | Verfahren zur Herstellung einer dielektrischen Reflexionsmaske |
Also Published As
Publication number | Publication date |
---|---|
JPH0797216B2 (ja) | 1995-10-18 |
EP0265658A3 (en) | 1989-03-15 |
EP0265658A2 (de) | 1988-05-04 |
JPH01118134A (ja) | 1989-05-10 |
DE3785292D1 (de) | 1993-05-13 |
EP0265658B1 (de) | 1993-04-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |