DE3784360D1 - Kapazitanztransduktor fuer positionsmessung. - Google Patents

Kapazitanztransduktor fuer positionsmessung.

Info

Publication number
DE3784360D1
DE3784360D1 DE8787104886T DE3784360T DE3784360D1 DE 3784360 D1 DE3784360 D1 DE 3784360D1 DE 8787104886 T DE8787104886 T DE 8787104886T DE 3784360 T DE3784360 T DE 3784360T DE 3784360 D1 DE3784360 D1 DE 3784360D1
Authority
DE
Germany
Prior art keywords
transductor
capacity
position measurement
measurement
capacity transductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787104886T
Other languages
English (en)
Other versions
DE3784360T2 (de
Inventor
Ingvar Andermo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Manufacturing Co Ltd
Original Assignee
Mitutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Manufacturing Co Ltd filed Critical Mitutoyo Manufacturing Co Ltd
Application granted granted Critical
Publication of DE3784360D1 publication Critical patent/DE3784360D1/de
Publication of DE3784360T2 publication Critical patent/DE3784360T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00—Analogue/digital conversion; Digital/analogue conversion
    • H03M1/12—Analogue/digital converters
    • H03M1/22—Analogue/digital converters pattern-reading type
    • H03M1/24—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip
    • H03M1/28—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Theoretical Computer Science (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE8787104886T 1986-04-04 1987-04-02 Kapazitanztransduktor fuer positionsmessung. Expired - Lifetime DE3784360T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61078948A JPS62235504A (ja) 1986-04-04 1986-04-04 容量型位置測定トランスデユ−サ

Publications (2)

Publication Number Publication Date
DE3784360D1 true DE3784360D1 (de) 1993-04-08
DE3784360T2 DE3784360T2 (de) 1993-06-24

Family

ID=13676110

Family Applications (2)

Application Number Title Priority Date Filing Date
DE8787104886T Expired - Lifetime DE3784360T2 (de) 1986-04-04 1987-04-02 Kapazitanztransduktor fuer positionsmessung.
DE198787104886T Pending DE240020T1 (de) 1986-04-04 1987-04-02 Kapazitanztransduktor fuer positionsmessung.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE198787104886T Pending DE240020T1 (de) 1986-04-04 1987-04-02 Kapazitanztransduktor fuer positionsmessung.

Country Status (6)

Country Link
US (1) US4878013A (de)
EP (1) EP0240020B1 (de)
JP (1) JPS62235504A (de)
CN (1) CN1009486B (de)
DE (2) DE3784360T2 (de)
IN (1) IN169992B (de)

Families Citing this family (74)

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US4879508A (en) * 1986-04-04 1989-11-07 Mitutoyo Corporation Capacitance-type measuring device for absolute measurement of positions
EP0404980B1 (de) * 1989-06-28 1993-05-05 Mitutoyo Corporation Kapazitives Messverfahren für Absolutwegmessung
EP0404975A1 (de) * 1989-06-28 1991-01-02 Mitutoyo Corporation Kapazitives Messinstrument mit verbesserter Elektrodeneinrichtung
US5428355A (en) * 1992-03-23 1995-06-27 Hewlett-Packard Corporation Position encoder system
DE4308462A1 (de) * 1993-03-17 1994-09-22 Vdo Schindling Anordnung zur Signalverarbeitung für Absolutwertsensoren mit periodischen Strukturen, insbesondere für Positions- und Winkelsensoren
US5880683A (en) * 1993-07-22 1999-03-09 Bourns, Inc. Absolute digital position encoder
US5739775A (en) * 1993-07-22 1998-04-14 Bourns, Inc. Digital input and control device
CH689190A5 (fr) * 1993-10-19 1998-11-30 Hans Ulrich Meyer Instrument de mesure de longueurs ou d'angles.
US5574381A (en) * 1995-01-06 1996-11-12 Mitutoyo Corporation Sealed mechanical configuration for electronic calipers for reliable operation in contaminated environments
EP0724134B1 (de) * 1995-01-30 1999-07-07 Brown & Sharpe Tesa S.A. Vorrichtung zur Längemessung und Verfahren zur Einstellung der genannten Vorrichtung
DE69530074T2 (de) * 1995-06-07 2004-03-04 Brown & Sharpe Tesa S.A. Kapazitive Messvorrichtung
DE19622224A1 (de) 1996-02-16 1997-08-21 Max Planck Gesellschaft Phosphatidyloligoglycerine
DE59605246D1 (de) * 1996-02-16 2000-06-21 Heidenhain Gmbh Dr Johannes Vorrichtung und Verfahren zur Umschaltung zwischen verschiedenen Betriebsmodi eines Messwertaufnehmers
US5731707A (en) * 1996-04-17 1998-03-24 Mitutoyo Corporation Method and apparatus for synthesizing spatial waveforms in an electronic position encoder
DE69621334T2 (de) * 1996-10-11 2003-01-09 Tesa Brown & Sharpe Sa Kapazitive Dimensionsmesseinrichtung
US5936411A (en) * 1997-11-28 1999-08-10 Sarcos L.C. Apparatus and method for measuring strain within a structure
DE19835611A1 (de) 1998-08-06 2000-02-10 Max Planck Gesellschaft Neuartige Phospholipide mit synthetischen, ungesättigten Alkyl- und Acylketten
JP3246726B2 (ja) 1998-11-13 2002-01-15 株式会社ミツトヨ 静電容量式変位検出器及び測定装置
CN1155794C (zh) 1999-12-02 2004-06-30 株式会社三丰 静电电容式变位检测装置
WO2003023332A1 (en) * 2001-09-04 2003-03-20 Alubo Co., Ltd. Capacitance coupled sensor and substance detecting method using capacitance-coupled sensor
US6998849B2 (en) * 2003-09-27 2006-02-14 Agilent Technologies, Inc. Capacitive sensor measurement method for discrete time sampled system for in-circuit test
US6892590B1 (en) * 2003-11-04 2005-05-17 Andermotion Technologies Llc Single-balanced shield electrode configuration for use in capacitive displacement sensing systems and methods
US7135874B2 (en) * 2004-08-06 2006-11-14 Waters Investments Limited System and method for enhanced measurement of rheological properties
US7075317B2 (en) * 2004-08-06 2006-07-11 Waters Investment Limited System and method for measurement of small-angle or small-displacement
US7259695B2 (en) * 2004-09-17 2007-08-21 Andermotion Technologies Llc Low-profile multi-turn encoder systems and methods
US7287415B2 (en) * 2004-09-30 2007-10-30 Teledyne Licensing, Llc Microelectromechanical system (MEMS) viscosity sensor for fluid health monitoring
DE102004052587A1 (de) * 2004-10-29 2006-05-04 Martin Steffek Wegaufnehmer
US20060174502A1 (en) * 2005-02-09 2006-08-10 Stephen Crane Linear and angular measuring apparatus
CN100375890C (zh) * 2005-09-09 2008-03-19 清华大学 含有可调零的gmr芯片的磁位移传感器
US8040142B1 (en) * 2006-03-31 2011-10-18 Cypress Semiconductor Corporation Touch detection techniques for capacitive touch sense systems
US8547114B2 (en) 2006-11-14 2013-10-01 Cypress Semiconductor Corporation Capacitance to code converter with sigma-delta modulator
DE102006056609A1 (de) * 2006-11-30 2008-06-05 Maxon Motor Ag Kapazitiver Winkelkodierer und Feedereinschub für Bestückungsmaschinen von Leiterplatten
US8058937B2 (en) * 2007-01-30 2011-11-15 Cypress Semiconductor Corporation Setting a discharge rate and a charge rate of a relaxation oscillator circuit
US9500686B1 (en) 2007-06-29 2016-11-22 Cypress Semiconductor Corporation Capacitance measurement system and methods
US8169238B1 (en) 2007-07-03 2012-05-01 Cypress Semiconductor Corporation Capacitance to frequency converter
US8089289B1 (en) 2007-07-03 2012-01-03 Cypress Semiconductor Corporation Capacitive field sensor with sigma-delta modulator
US8570053B1 (en) 2007-07-03 2013-10-29 Cypress Semiconductor Corporation Capacitive field sensor with sigma-delta modulator
DE102007058707A1 (de) * 2007-12-06 2009-06-10 Infineon Technologies Ag Kapazitätssensor
US8525798B2 (en) 2008-01-28 2013-09-03 Cypress Semiconductor Corporation Touch sensing
US8319505B1 (en) 2008-10-24 2012-11-27 Cypress Semiconductor Corporation Methods and circuits for measuring mutual and self capacitance
US8358142B2 (en) 2008-02-27 2013-01-22 Cypress Semiconductor Corporation Methods and circuits for measuring mutual and self capacitance
US9104273B1 (en) 2008-02-29 2015-08-11 Cypress Semiconductor Corporation Multi-touch sensing method
US20110018561A1 (en) * 2008-03-26 2011-01-27 Hewlett-Packard Company Capacitive sensor having cyclic and absolute electrode sets
US8321174B1 (en) 2008-09-26 2012-11-27 Cypress Semiconductor Corporation System and method to measure capacitance of capacitive sensor array
JP2011123191A (ja) * 2009-12-09 2011-06-23 Roland Corp 電子楽器の鍵操作速度検出装置
CN101949682B (zh) * 2010-08-14 2012-10-24 桂林广陆数字测控股份有限公司 绝对位置测量容栅位移测量方法、传感器及其运行方法
JP6052914B2 (ja) 2012-01-12 2016-12-27 シナプティクス インコーポレイテッド 単層容量型イメージングセンサ
EP2657650A1 (de) * 2012-04-25 2013-10-30 Siemens Aktiengesellschaft Messwertgeber zum Erhalt einer Positionsinformation und Verfahren zum Betrieb eines Messwertgebers
US9542023B2 (en) 2013-08-07 2017-01-10 Synaptics Incorporated Capacitive sensing using matrix electrodes driven by routing traces disposed in a source line layer
US10042489B2 (en) 2013-09-30 2018-08-07 Synaptics Incorporated Matrix sensor for image touch sensing
US20150091842A1 (en) 2013-09-30 2015-04-02 Synaptics Incorporated Matrix sensor for image touch sensing
US9298325B2 (en) 2013-09-30 2016-03-29 Synaptics Incorporated Processing system for a capacitive sensing device
US9459367B2 (en) 2013-10-02 2016-10-04 Synaptics Incorporated Capacitive sensor driving technique that enables hybrid sensing or equalization
US9274662B2 (en) 2013-10-18 2016-03-01 Synaptics Incorporated Sensor matrix pad for performing multiple capacitive sensing techniques
US9081457B2 (en) 2013-10-30 2015-07-14 Synaptics Incorporated Single-layer muti-touch capacitive imaging sensor
US9714846B2 (en) 2013-12-31 2017-07-25 Chicago Dial Indicator Company Displacement measuring device with capacitive sensing
US9798429B2 (en) 2014-02-28 2017-10-24 Synaptics Incorporated Guard electrodes in a sensing stack
US10133421B2 (en) 2014-04-02 2018-11-20 Synaptics Incorporated Display stackups for matrix sensor
US9927832B2 (en) 2014-04-25 2018-03-27 Synaptics Incorporated Input device having a reduced border region
US9690397B2 (en) 2014-05-20 2017-06-27 Synaptics Incorporated System and method for detecting an active pen with a matrix sensor
DE102014224221A1 (de) * 2014-11-27 2016-06-02 Carl Zeiss Smt Gmbh Positions-Messeinrichtung und Verfahren zur Ermittlung von Positionen eines Messobjekts
US10175827B2 (en) 2014-12-23 2019-01-08 Synaptics Incorporated Detecting an active pen using a capacitive sensing device
US10990148B2 (en) 2015-01-05 2021-04-27 Synaptics Incorporated Central receiver for performing capacitive sensing
US9939972B2 (en) 2015-04-06 2018-04-10 Synaptics Incorporated Matrix sensor with via routing
US10095948B2 (en) 2015-06-30 2018-10-09 Synaptics Incorporated Modulation scheme for fingerprint sensing
US9720541B2 (en) 2015-06-30 2017-08-01 Synaptics Incorporated Arrangement of sensor pads and display driver pads for input device
US9715304B2 (en) 2015-06-30 2017-07-25 Synaptics Incorporated Regular via pattern for sensor-based input device
CN205028263U (zh) 2015-09-07 2016-02-10 辛纳普蒂克斯公司 一种电容传感器
US10037112B2 (en) 2015-09-30 2018-07-31 Synaptics Incorporated Sensing an active device'S transmission using timing interleaved with display updates
US10067587B2 (en) 2015-12-29 2018-09-04 Synaptics Incorporated Routing conductors in an integrated display device and sensing device
CN106933400B (zh) 2015-12-31 2021-10-29 辛纳普蒂克斯公司 单层传感器图案和感测方法
CN109631735B (zh) * 2019-01-04 2020-09-11 重庆理工大学 一种基于交变电场的平面二维时栅位移传感器
DE102019200740A1 (de) * 2019-01-22 2020-07-23 Albert-Ludwigs-Universität Freiburg Justierhilfe, drahtlose Verbinderanordnung und Verfahren zum Überwachen einer Position
CN109916284A (zh) * 2019-03-01 2019-06-21 维沃移动通信有限公司 一种位置检测方法及终端设备

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SE411392B (sv) * 1977-12-09 1979-12-17 Inst Mikrovagsteknik Vid Tekni Metanordning for kapacitiv bestemning av det inbordes leget hos tva relativt varandra rorliga delar
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DE3382706T2 (de) * 1982-09-20 1993-11-25 Shimadzu Corp Verfahren und Vorrichtung zur Relativwegmessung.
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US4654581A (en) * 1983-10-12 1987-03-31 Hewlett-Packard Company Capacitive mask aligner
US4586260A (en) * 1984-05-29 1986-05-06 The L. S. Starrett Company Capacitive displacement measuring instrument
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Also Published As

Publication number Publication date
JPS62235504A (ja) 1987-10-15
EP0240020A3 (en) 1990-05-30
IN169992B (de) 1992-01-25
DE3784360T2 (de) 1993-06-24
DE240020T1 (de) 1988-02-25
CN87102624A (zh) 1987-10-14
JPH0467882B2 (de) 1992-10-29
EP0240020B1 (de) 1993-03-03
US4878013A (en) 1989-10-31
CN1009486B (zh) 1990-09-05
EP0240020A2 (de) 1987-10-07

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Legal Events

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