DE3776271D1 - Messfuehlervorrichtung. - Google Patents
Messfuehlervorrichtung.Info
- Publication number
- DE3776271D1 DE3776271D1 DE8787309603T DE3776271T DE3776271D1 DE 3776271 D1 DE3776271 D1 DE 3776271D1 DE 8787309603 T DE8787309603 T DE 8787309603T DE 3776271 T DE3776271 T DE 3776271T DE 3776271 D1 DE3776271 D1 DE 3776271D1
- Authority
- DE
- Germany
- Prior art keywords
- measuring device
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/10—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings
- G01L1/103—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings optical excitation or measuring of vibrations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
- G01L1/183—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material
- G01L1/186—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material optical excitation or measuring of vibrations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0016—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a diaphragm
- G01L9/0017—Optical excitation or measuring
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
- G01L9/002—Optical excitation or measuring
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
- G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8626208A GB2197069B (en) | 1986-11-03 | 1986-11-03 | Sensor device |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3776271D1 true DE3776271D1 (de) | 1992-03-05 |
Family
ID=10606710
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787309603T Expired - Fee Related DE3776271D1 (de) | 1986-11-03 | 1987-10-30 | Messfuehlervorrichtung. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4884450A (de) |
EP (1) | EP0266974B1 (de) |
DE (1) | DE3776271D1 (de) |
GB (1) | GB2197069B (de) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8610252D0 (en) * | 1986-04-26 | 1986-06-25 | Stc Plc | Remote sensor |
GB2215052B (en) * | 1988-02-13 | 1992-02-12 | Stc Plc | Temperature sensor |
GB2223582B (en) * | 1988-10-04 | 1992-06-17 | Stc Plc | Transducer device |
GB8900304D0 (en) * | 1989-01-06 | 1989-03-08 | Lucas Ind Plc | Signal extraction apparatus |
US5265479A (en) * | 1989-10-17 | 1993-11-30 | Lucas Industries Public Limited Company | Micro resonator |
GB8929328D0 (en) * | 1989-12-29 | 1990-02-28 | Schlumberger Ind Ltd | Optical sensing systems |
US5090254A (en) * | 1990-04-11 | 1992-02-25 | Wisconsin Alumni Research Foundation | Polysilicon resonating beam transducers |
US5188983A (en) * | 1990-04-11 | 1993-02-23 | Wisconsin Alumni Research Foundation | Polysilicon resonating beam transducers and method of producing the same |
FR2676539A1 (fr) * | 1991-05-17 | 1992-11-20 | Thomson Csf | Capteur a membrane. |
FR2680574B1 (fr) * | 1991-08-23 | 1996-04-12 | Schlumberger Ind Sa | Microcapteur a poutre vibrante compense en temperature. |
SE515191C2 (sv) * | 1992-05-05 | 2001-06-25 | Volvo Ab | Förfarande för tillverkning av en anordning för mätning av tryck jämte anordning för mätning av tryck |
GB9321398D0 (en) * | 1993-10-16 | 1993-12-08 | Lucas Ind Plc | Differential pressure transducer |
US5808210A (en) * | 1996-12-31 | 1998-09-15 | Honeywell Inc. | Thin film resonant microbeam absolute pressure sensor |
US6182513B1 (en) | 1998-12-23 | 2001-02-06 | Radi Medical Systems Ab | Resonant sensor and method of making a pressure sensor comprising a resonant beam structure |
DE60125018T2 (de) | 2000-02-11 | 2007-06-28 | Rosemount Inc., Eden Prairie | Optischer druckaufnehmer |
FR2824636B1 (fr) * | 2001-05-10 | 2003-09-05 | Schlumberger Services Petrol | Capteur de pression microelectronique a resonateur supportant des pressions elevees |
US6894787B2 (en) * | 2001-12-21 | 2005-05-17 | Honeywell International Inc. | Optical pressure sensor |
JP4082907B2 (ja) * | 2002-01-21 | 2008-04-30 | 正喜 江刺 | 振動形圧力センサ |
US7134341B2 (en) * | 2003-04-28 | 2006-11-14 | Zuli Holdings Ltd | Methods and devices for determining the resonance frequency of passive mechanical resonators |
US8162839B2 (en) * | 2003-08-27 | 2012-04-24 | Microtech Medical Technologies Ltd. | Protected passive resonating sensors |
US7415883B2 (en) * | 2004-06-28 | 2008-08-26 | Zuli Holdings Ltd | Method for protecting resonating sensors and open protected resonating sensors |
US7173713B2 (en) * | 2004-03-04 | 2007-02-06 | Virginia Tech Intellectual Properties, Inc. | Optical fiber sensors for harsh environments |
US20050195402A1 (en) * | 2004-03-04 | 2005-09-08 | Russell May | Crystalline optical fiber sensors for harsh environments |
US7176048B1 (en) | 2004-12-12 | 2007-02-13 | Burns David W | Optically coupled sealed-cavity resonator and process |
US7605391B2 (en) * | 2004-12-12 | 2009-10-20 | Burns David W | Optically coupled resonator |
US7499604B1 (en) * | 2004-12-12 | 2009-03-03 | Burns David W | Optically coupled resonant pressure sensor and process |
US7443509B1 (en) | 2004-12-12 | 2008-10-28 | Burns David W | Optical and electronic interface for optically coupled resonators |
US7379629B1 (en) | 2004-12-12 | 2008-05-27 | Burns David W | Optically coupled resonant pressure sensor |
US7388222B2 (en) * | 2005-12-15 | 2008-06-17 | Honeywell International Inc. | High-temperature optical liquid level sensor |
US20070236213A1 (en) * | 2006-03-30 | 2007-10-11 | Paden Bradley E | Telemetry method and apparatus using magnetically-driven mems resonant structure |
JP4332859B2 (ja) * | 2007-04-27 | 2009-09-16 | エプソントヨコム株式会社 | 圧力センサ |
EP2072986B1 (de) * | 2007-12-18 | 2016-08-10 | Services Pétroliers Schlumberger | Vorrichtung und Verfahren zur Druckmessung |
US9391216B2 (en) * | 2008-06-06 | 2016-07-12 | Orbital Atk, Inc. | Optical coupled sensors for harsh environments |
DE102010029072B4 (de) * | 2010-05-18 | 2015-01-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikroelektromechanisches Translationsschwingersystem |
US9046427B2 (en) | 2011-04-11 | 2015-06-02 | Massachusetts Institute Of Technology | System for dual pressure sensing |
GB2508908B (en) * | 2012-12-14 | 2017-02-15 | Gen Electric | Resonator device |
GB2509105B (en) * | 2012-12-20 | 2017-02-22 | Oxsensis Ltd | Mechanical resonator sensor |
US10893804B2 (en) * | 2015-10-05 | 2021-01-19 | Massachusetts Eye & Ear Infirmary | Measurement of intraocular pressure |
CN110631757B (zh) * | 2019-10-31 | 2021-10-22 | 苏州市东挺河智能科技发展有限公司 | 基于波导结构的气体压强探测器及系统 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2669877A (en) * | 1948-11-30 | 1954-02-23 | Atlantic Refining Co | Pressure measuring device |
US3062052A (en) * | 1958-04-28 | 1962-11-06 | Shell Oil Co | Apparatus for measuring variable physical conditions employing a sensing device generating a variable frequency signal |
US3697917A (en) * | 1971-08-02 | 1972-10-10 | Gen Electric | Semiconductor strain gage pressure transducer |
US4126049A (en) * | 1977-02-14 | 1978-11-21 | Cotter Mitchell A | System and method of measuring fluid pressure force |
US4187635A (en) * | 1978-04-03 | 1980-02-12 | Deissler Robert J | Method and apparatus for sound production |
US4446543A (en) * | 1979-07-02 | 1984-05-01 | The United States Of America As Represented By The Secretary Of The Navy | Optical resonator single-mode fiber hydrophone |
US4379226A (en) * | 1981-02-02 | 1983-04-05 | Siemens Corporation | Method and sensor device for measuring a physical parameter utilizing an oscillatory, light modulation element |
US4410871A (en) * | 1981-08-28 | 1983-10-18 | Kulite Semiconductor Products | Semiconductor transducers employing ion implantation terminal configurations |
US4521684A (en) * | 1982-02-22 | 1985-06-04 | The Foxboro Company | Optical measurement system with light-driven vibrating sensor element |
US4470313A (en) * | 1982-04-05 | 1984-09-11 | The Foxboro Company | Mechanically excited resonant-element sensor |
GB2121953B (en) * | 1982-06-10 | 1985-09-04 | Itt Ind Ltd | Improvements in transducers |
DE3307964A1 (de) * | 1983-03-07 | 1984-09-13 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Drucksensor |
GB2144547B (en) * | 1983-08-04 | 1986-10-01 | Gen Electric Plc | A strain sensor |
GB8323685D0 (en) * | 1983-09-03 | 1983-10-05 | Gen Electric Co Plc | Monitoring displacement |
US4588886A (en) * | 1983-11-14 | 1986-05-13 | Thermo-O-Disc Incorporated | Fiber optics condition sensor and method of making same |
GB8405638D0 (en) * | 1984-03-03 | 1984-04-04 | Monicell Ltd | Optical transducer and measuring device |
GB8418122D0 (en) * | 1984-07-17 | 1984-08-22 | Standard Telephones Cables Ltd | Optical sensor systems |
GB8418914D0 (en) * | 1984-07-25 | 1984-08-30 | Standard Telephones Cables Ltd | Transducer |
JPS61235731A (ja) * | 1985-04-11 | 1986-10-21 | Sharp Corp | 感圧素子 |
US4933545A (en) * | 1985-12-30 | 1990-06-12 | Metricor, Inc. | Optical pressure-sensing system using optical resonator cavity |
GB8610253D0 (en) * | 1986-04-26 | 1986-05-29 | Stc Plc | Resonator device |
-
1986
- 1986-11-03 GB GB8626208A patent/GB2197069B/en not_active Expired - Fee Related
-
1987
- 1987-10-30 EP EP87309603A patent/EP0266974B1/de not_active Expired - Lifetime
- 1987-10-30 DE DE8787309603T patent/DE3776271D1/de not_active Expired - Fee Related
-
1989
- 1989-02-13 US US07/310,501 patent/US4884450A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0266974A2 (de) | 1988-05-11 |
US4884450A (en) | 1989-12-05 |
GB8626208D0 (en) | 1986-12-03 |
GB2197069B (en) | 1990-10-24 |
EP0266974A3 (en) | 1989-06-21 |
GB2197069A (en) | 1988-05-11 |
EP0266974B1 (de) | 1992-01-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |