DE3781389T2 - Indium-phosphide feldeffekttransistor mit hetero-mis-gate. - Google Patents

Indium-phosphide feldeffekttransistor mit hetero-mis-gate.

Info

Publication number
DE3781389T2
DE3781389T2 DE8787118245T DE3781389T DE3781389T2 DE 3781389 T2 DE3781389 T2 DE 3781389T2 DE 8787118245 T DE8787118245 T DE 8787118245T DE 3781389 T DE3781389 T DE 3781389T DE 3781389 T2 DE3781389 T2 DE 3781389T2
Authority
DE
Germany
Prior art keywords
mis
hetero
gate
field effect
effect transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787118245T
Other languages
English (en)
Other versions
DE3781389D1 (de
Inventor
Kensuke C O Nec Corpo Kasahara
Tomohiro C O Nec Corporat Itoh
Keiichi C O Nec Corporat Ohata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Application granted granted Critical
Publication of DE3781389D1 publication Critical patent/DE3781389D1/de
Publication of DE3781389T2 publication Critical patent/DE3781389T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/432—Heterojunction gate for field effect devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
    • H01L29/802—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with heterojunction gate, e.g. transistors with semiconductor layer acting as gate insulating layer, MIS-like transistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Junction Field-Effect Transistors (AREA)
DE8787118245T 1986-12-09 1987-12-09 Indium-phosphide feldeffekttransistor mit hetero-mis-gate. Expired - Fee Related DE3781389T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61293853A JPS63144580A (ja) 1986-12-09 1986-12-09 電界効果トランジスタ

Publications (2)

Publication Number Publication Date
DE3781389D1 DE3781389D1 (de) 1992-10-01
DE3781389T2 true DE3781389T2 (de) 1993-03-18

Family

ID=17800002

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787118245T Expired - Fee Related DE3781389T2 (de) 1986-12-09 1987-12-09 Indium-phosphide feldeffekttransistor mit hetero-mis-gate.

Country Status (4)

Country Link
US (1) US4837605A (de)
EP (1) EP0271080B1 (de)
JP (1) JPS63144580A (de)
DE (1) DE3781389T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH031547A (ja) * 1989-05-29 1991-01-08 Mitsubishi Electric Corp 化合物半導体ｍｉｓ・ｆｅｔおよびその製造方法
US6900481B2 (en) * 2002-02-21 2005-05-31 Intel Corporation Non-silicon semiconductor and high-k gate dielectric metal oxide semiconductor field effect transistors
EP1691152A1 (de) * 2005-01-14 2006-08-16 Electrolux Home Products Corporation N.V. Modulare Kühleinheit und Verfahren zur Montage einer modularen Kühleinheit in ein Gehäuse eines Kühlgerätes
KR102425892B1 (ko) * 2020-09-09 2022-07-26 연세대학교 산학협력단 인듐과 인을 포함하는 층상구조 화합물, 나노시트 및 이를 이용한 전기 소자

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4117504A (en) * 1976-08-06 1978-09-26 Vadim Nikolaevich Maslov Heterogeneous semiconductor structure with composition gradient and method for producing same
US4160261A (en) * 1978-01-13 1979-07-03 Bell Telephone Laboratories, Incorporated Mis heterojunction structures
US4757358A (en) * 1982-03-12 1988-07-12 International Business Machines Corporation MESFET semiconductor device fabrication with same metal contacting source, drain and gate regions
US4745447A (en) * 1985-06-14 1988-05-17 American Telephone And Telegraph Company, At&T Bell Laboratories Gallium arsenide on gallium indium arsenide Schottky barrier device

Also Published As

Publication number Publication date
EP0271080A3 (en) 1990-03-14
EP0271080B1 (de) 1992-08-26
JPH0261149B2 (de) 1990-12-19
DE3781389D1 (de) 1992-10-01
EP0271080A2 (de) 1988-06-15
JPS63144580A (ja) 1988-06-16
US4837605A (en) 1989-06-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee