DE3780266D1 - Planobjektiv mit verbesserten bildebenen-eigenschaften. - Google Patents

Planobjektiv mit verbesserten bildebenen-eigenschaften.

Info

Publication number
DE3780266D1
DE3780266D1 DE8787115921T DE3780266T DE3780266D1 DE 3780266 D1 DE3780266 D1 DE 3780266D1 DE 8787115921 T DE8787115921 T DE 8787115921T DE 3780266 T DE3780266 T DE 3780266T DE 3780266 D1 DE3780266 D1 DE 3780266D1
Authority
DE
Germany
Prior art keywords
improved image
image level
level properties
plan lens
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787115921T
Other languages
English (en)
Inventor
Irwin Friedman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SVG Lithography Systems Inc
Original Assignee
SVG Lithography Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SVG Lithography Systems Inc filed Critical SVG Lithography Systems Inc
Application granted granted Critical
Publication of DE3780266D1 publication Critical patent/DE3780266D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/04—Reversed telephoto objectives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
DE8787115921T 1986-11-05 1987-10-29 Planobjektiv mit verbesserten bildebenen-eigenschaften. Expired - Lifetime DE3780266D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/927,215 US4772107A (en) 1986-11-05 1986-11-05 Wide angle lens with improved flat field characteristics

Publications (1)

Publication Number Publication Date
DE3780266D1 true DE3780266D1 (de) 1992-08-13

Family

ID=25454409

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787115921T Expired - Lifetime DE3780266D1 (de) 1986-11-05 1987-10-29 Planobjektiv mit verbesserten bildebenen-eigenschaften.

Country Status (5)

Country Link
US (1) US4772107A (de)
EP (1) EP0269868B1 (de)
JP (1) JPS63135912A (de)
KR (1) KR880006554A (de)
DE (1) DE3780266D1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5164789A (en) * 1990-11-09 1992-11-17 Hitachi, Ltd. Method and apparatus for measuring minute displacement by subject light diffracted and reflected from a grating to heterodyne interference
US5153778A (en) * 1991-06-19 1992-10-06 At&T Bell Laboratories Powerless field-corrective lens
US5323263A (en) * 1993-02-01 1994-06-21 Nikon Precision Inc. Off-axis catadioptric projection system
US5515207A (en) * 1993-11-03 1996-05-07 Nikon Precision Inc. Multiple mirror catadioptric optical system
JP3396935B2 (ja) * 1993-11-15 2003-04-14 株式会社ニコン 投影光学系及び投影露光装置
JP3360387B2 (ja) * 1993-11-15 2002-12-24 株式会社ニコン 投影光学系及び投影露光装置
JPH08179204A (ja) 1994-11-10 1996-07-12 Nikon Corp 投影光学系及び投影露光装置
JP3500745B2 (ja) * 1994-12-14 2004-02-23 株式会社ニコン 投影光学系、投影露光装置及び投影露光方法
USRE38465E1 (en) 1994-12-14 2004-03-16 Nikon Corporation Exposure apparatus
JP3454390B2 (ja) * 1995-01-06 2003-10-06 株式会社ニコン 投影光学系、投影露光装置及び投影露光方法
JP3819048B2 (ja) * 1995-03-15 2006-09-06 株式会社ニコン 投影光学系及びそれを備えた露光装置並びに露光方法
JP3624973B2 (ja) * 1995-10-12 2005-03-02 株式会社ニコン 投影光学系
JP3750123B2 (ja) * 1996-04-25 2006-03-01 株式会社ニコン 投影光学系
US5808814A (en) * 1996-07-18 1998-09-15 Nikon Corporation Short wavelength projection optical system
JP3864399B2 (ja) * 1996-08-08 2006-12-27 株式会社ニコン 投影露光装置及び該投影露光装置に用いられる投影光学系並びにデバイス製造方法
US5852490A (en) * 1996-09-30 1998-12-22 Nikon Corporation Projection exposure method and apparatus
JP3757536B2 (ja) * 1996-10-01 2006-03-22 株式会社ニコン 投影光学系及びそれを備えた露光装置並びにデバイス製造方法
JPH116957A (ja) * 1997-04-25 1999-01-12 Nikon Corp 投影光学系および投影露光装置並びに投影露光方法
US6084706A (en) * 1997-07-09 2000-07-04 Etec Systems, Inc. High efficiency laser pattern generator
JP3925576B2 (ja) 1997-07-24 2007-06-06 株式会社ニコン 投影光学系、該光学系を備えた露光装置、及び該装置を用いたデバイスの製造方法
JPH11214293A (ja) 1998-01-22 1999-08-06 Nikon Corp 投影光学系及び該光学系を備えた露光装置並びにデバイス製造方法
US6700645B1 (en) 1998-01-22 2004-03-02 Nikon Corporation Projection optical system and exposure apparatus and method
WO2002080521A2 (en) * 2001-03-30 2002-10-10 Digeo, Inc. System and method for a software steerable web camera with multiple image subset capture
US20020141657A1 (en) 2001-03-30 2002-10-03 Robert Novak System and method for a software steerable web Camera
ATE315794T1 (de) 2002-03-25 2006-02-15 Konishiroku Photo Ind Dreilinsiges objektiv
US8208198B2 (en) 2004-01-14 2012-06-26 Carl Zeiss Smt Gmbh Catadioptric projection objective
US20080151365A1 (en) 2004-01-14 2008-06-26 Carl Zeiss Smt Ag Catadioptric projection objective
KR20160085375A (ko) 2004-05-17 2016-07-15 칼 짜이스 에스엠티 게엠베하 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈
WO2009035072A1 (ja) * 2007-09-13 2009-03-19 Nikon Corporation 液浸系顕微鏡対物レンズ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2846923A (en) * 1957-02-25 1958-08-12 Farrand Optical Co Inc High speed objective lens with anastigmatically flattened field
DE1497588A1 (de) * 1966-02-26 1969-04-30 Schneider Co Optische Werke Photographisches oder kinematographisches Objektiv grosser Bildwinkelleistung
JPS5328089B2 (de) * 1973-05-01 1978-08-12
US4001766A (en) * 1975-02-26 1977-01-04 Westinghouse Electric Corporation Acoustic lens system
US4256374A (en) * 1979-04-02 1981-03-17 Mca Discovision, Inc. Write and read objective lens for high density storage
GB2049217B (en) * 1979-05-16 1983-03-16 Pilkington Perkin Elmer Ltd Transfer lenses
US4411499A (en) * 1980-11-07 1983-10-25 Honeywell Inc. Compact optical system

Also Published As

Publication number Publication date
EP0269868A1 (de) 1988-06-08
US4772107A (en) 1988-09-20
JPS63135912A (ja) 1988-06-08
EP0269868B1 (de) 1992-07-08
KR880006554A (ko) 1988-07-23

Similar Documents

Publication Publication Date Title
DE3780266D1 (de) Planobjektiv mit verbesserten bildebenen-eigenschaften.
DE3772044D1 (de) Ausgabestelle mit optischem abtaster.
DE3785440D1 (de) Optische abtastvorrichtung mit ortungsfuehlern.
DE3771228D1 (de) Zusammengesetzte kamera.
DE3788278D1 (de) Brillen mit einstellbarer lichtdurchlässigkeit.
DE68912196D1 (de) Augenlinse.
ATE126359T1 (de) Progressive brillenlinse.
DE3786736D1 (de) Kamera mit wechseloptik.
DE3750627D1 (de) Bildlesegerät.
DE3786247D1 (de) Lanzette mit rueckfuehrung.
DE3750762D1 (de) Kamera mit umschaltbarer Brennweite.
DE3882968D1 (de) Bilddistkriminator.
FI875790A (fi) Skyddade optiska blekmedel.
DE3776462D1 (de) Keilriemen mit querkoerpern.
DE3785375D1 (de) Element mit optischem gedaechtnis.
DE3772934D1 (de) Elektro-optische abtastvorrichtung.
FI875517A0 (fi) Optiska blekningsmedel innehaollande pappersbestrykningsmassor.
NL193572B (nl) Lensaandrijfinrichting.
DE3780503D1 (de) Abbildungsverfahren.
DE3852755D1 (de) Optischer Fühler mit mehreren Elementen.
DE3769283D1 (de) Bildlesevorrichtung.
DE3785616D1 (de) Asphaerische einzellinse.
DE3763261D1 (de) Projektionsobjektiv mit veraenderlicher brennweite.
NL189879C (nl) Ooglens.
DE3781640D1 (de) Bildlesegeraet.

Legal Events

Date Code Title Description
8332 No legal effect for de