DE3770478D1 - Durch einen durchflussmesser gesteuertes ventil. - Google Patents

Durch einen durchflussmesser gesteuertes ventil.

Info

Publication number
DE3770478D1
DE3770478D1 DE8787100118T DE3770478T DE3770478D1 DE 3770478 D1 DE3770478 D1 DE 3770478D1 DE 8787100118 T DE8787100118 T DE 8787100118T DE 3770478 T DE3770478 T DE 3770478T DE 3770478 D1 DE3770478 D1 DE 3770478D1
Authority
DE
Germany
Prior art keywords
flow meter
valve controlled
valve
controlled
meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787100118T
Other languages
English (en)
Inventor
James H Ewing
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Application granted granted Critical
Publication of DE3770478D1 publication Critical patent/DE3770478D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86389—Programmer or timer
    • Y10T137/86405—Repeating cycle
    • Y10T137/86421—Variable

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Magnetically Actuated Valves (AREA)
  • Flow Control (AREA)
DE8787100118T 1986-01-10 1987-01-07 Durch einen durchflussmesser gesteuertes ventil. Expired - Lifetime DE3770478D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/818,216 US4679585A (en) 1986-01-10 1986-01-10 Flowmeter-controlled valving

Publications (1)

Publication Number Publication Date
DE3770478D1 true DE3770478D1 (de) 1991-07-11

Family

ID=25224981

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787100118T Expired - Lifetime DE3770478D1 (de) 1986-01-10 1987-01-07 Durch einen durchflussmesser gesteuertes ventil.

Country Status (4)

Country Link
US (1) US4679585A (de)
EP (1) EP0229632B1 (de)
JP (1) JPS62222310A (de)
DE (1) DE3770478D1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111006728A (zh) * 2019-12-23 2020-04-14 上海一诺仪表有限公司 流量自控仪转换器和流量自控仪转换器的控制方法

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4966646A (en) * 1986-09-24 1990-10-30 Board Of Trustees Of Leland Stanford University Method of making an integrated, microminiature electric-to-fluidic valve
US4821997A (en) * 1986-09-24 1989-04-18 The Board Of Trustees Of The Leland Stanford Junior University Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator
US4943032A (en) * 1986-09-24 1990-07-24 Stanford University Integrated, microminiature electric to fluidic valve and pressure/flow regulator
US4777383A (en) * 1987-06-01 1988-10-11 Ldi Pneutronics Corp. Electrically controlled variable pressure pneumatic circuit
AU628296B2 (en) * 1987-10-23 1992-09-17 Coca-Cola Company, The Beverage dispensing valve
US5074629A (en) * 1988-10-26 1991-12-24 Stanford University Integrated variable focal length lens and its applications
JP2789458B2 (ja) * 1988-11-22 1998-08-20 株式会社エステック 液体気化のための流量制御装置
US5142483A (en) * 1990-04-24 1992-08-25 Caltechnix Corporation Pressure regulating system for positive shut-off pressure controller
EP0480080A1 (de) * 1990-10-08 1992-04-15 Trinity Industrial Corporation Beschichtungsvorrichtung
US5271526A (en) * 1990-12-07 1993-12-21 Titan Industries, Inc. Programmable additive controller
US5118008A (en) * 1990-12-07 1992-06-02 Titan Industries, Inc. Programmable additive controller
DE4219551C2 (de) * 1991-06-13 1996-04-18 Mks Japan Inc Massenströmungssensor
JP2643665B2 (ja) * 1991-06-13 1997-08-20 日本エム・ケー・エス 株式会社 流量センサ
US5295394A (en) * 1991-06-13 1994-03-22 Mks Japan Inc. Bypass unit for a flowmeter sensor
US5251785A (en) * 1992-02-06 1993-10-12 The Lubrizol Corporation Additive injection system and method
US5294089A (en) * 1992-08-03 1994-03-15 Automatic Switch Company Proportional flow valve
JP3305515B2 (ja) * 1994-10-06 2002-07-22 日本エム・ケー・エス株式会社 流量制御弁
US5855195A (en) * 1994-12-26 1999-01-05 Hitachi, Ltd. Flow control equipment for an internal combustion engine
SE9503286L (sv) * 1995-09-22 1997-03-17 Alfa Laval Automation Ab Förfarande samt reglersystem för friktionskomepensation
DE29721502U1 (de) * 1996-12-21 1998-04-23 Klein Schanzlin & Becker Ag Strangregulierarmatur
US5824894A (en) * 1997-05-07 1998-10-20 Mks Instruments, Inc. Mass flowmeter and laminar flow elements for use therein
EP1384121A2 (de) * 2001-04-24 2004-01-28 Unit Instruments, Inc. System und verfahren zur konfiguration und anpassung eines massenflussreglers
US7073392B2 (en) * 2002-07-19 2006-07-11 Celerity, Inc. Methods and apparatus for pressure compensation in a mass flow controller
US7055366B2 (en) * 2004-05-21 2006-06-06 Upchurch Scientific, Inc. Flow sensor calibration methods and apparatus
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
CN102022574B (zh) * 2010-11-22 2012-12-19 北京七星华创电子股份有限公司 一种新型的流量控制系统
MX2020013091A (es) * 2020-12-02 2022-06-03 Miguel Angel Ramirez Olalde Modulador de flujo de combustible.

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1074542A (en) * 1964-06-08 1967-07-05 Georg Weisheit Apparatus for automatically stabilizing a variable parameter of a fluid
GB1129520A (en) * 1964-11-23 1968-10-09 Monsanto Co Improvements in or relating to fluid flow control devices
US3469804A (en) * 1968-04-08 1969-09-30 Steven T Rowan Rotary and circular saucer-shaped airfoil aircraft
US3874407A (en) * 1974-01-02 1975-04-01 Ray F Griswold Pulse width modulation control for valves
US4116321A (en) * 1976-12-27 1978-09-26 Borg-Warner Corporation Valve arrangement for closed-loop control system
JPS55129810A (en) * 1979-03-29 1980-10-08 Nissan Motor Co Ltd Control method for on-off electromagnetic valve
JPS56127115A (en) * 1980-03-08 1981-10-05 Ckd Controls Ltd Gas flow rate control system
US4476893A (en) * 1980-07-04 1984-10-16 Barmag Barmer Maschinenfabrik Ag Hydraulic flow control valve
WO1983001693A1 (en) * 1981-11-06 1983-05-11 Henry Christopher Lewis Fluid flow control system
US4436110A (en) * 1982-03-25 1984-03-13 Landi Den Hartog Bv Pressure regulating systems
US4432033A (en) * 1982-07-01 1984-02-14 Brundage Robert W Power source for a solenoid controlled fluid pressure device
US4464932A (en) * 1982-07-12 1984-08-14 Mks Instruments, Inc. Thermal mass flowmetering
JPS60196412A (ja) * 1984-03-16 1985-10-04 Matsushita Electric Ind Co Ltd 電磁比例弁制御装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111006728A (zh) * 2019-12-23 2020-04-14 上海一诺仪表有限公司 流量自控仪转换器和流量自控仪转换器的控制方法

Also Published As

Publication number Publication date
EP0229632A3 (en) 1988-10-19
EP0229632B1 (de) 1991-06-05
US4679585A (en) 1987-07-14
EP0229632A2 (de) 1987-07-22
JPS62222310A (ja) 1987-09-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee