DE3768358D1 - Verfahren und vorrichtung zur erhoehung der systemsicherheit bei einem laser-schreibverfahren. - Google Patents

Verfahren und vorrichtung zur erhoehung der systemsicherheit bei einem laser-schreibverfahren.

Info

Publication number
DE3768358D1
DE3768358D1 DE8787810355T DE3768358T DE3768358D1 DE 3768358 D1 DE3768358 D1 DE 3768358D1 DE 8787810355 T DE8787810355 T DE 8787810355T DE 3768358 T DE3768358 T DE 3768358T DE 3768358 D1 DE3768358 D1 DE 3768358D1
Authority
DE
Germany
Prior art keywords
laser
laser beam
laser writing
pattern generator
recognition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787810355T
Other languages
German (de)
English (en)
Inventor
Meinrad Kempter
Paul Glauser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LASARRAY HOLDING AG
Original Assignee
LASARRAY HOLDING AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LASARRAY HOLDING AG filed Critical LASARRAY HOLDING AG
Application granted granted Critical
Publication of DE3768358D1 publication Critical patent/DE3768358D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/007—Marks, e.g. trade marks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Lasers (AREA)
  • Optical Recording Or Reproduction (AREA)
  • Facsimile Heads (AREA)
  • Exposure Or Original Feeding In Electrophotography (AREA)
  • Optical Communication System (AREA)
  • Laser Beam Processing (AREA)
  • Image Input (AREA)
DE8787810355T 1986-06-25 1987-06-23 Verfahren und vorrichtung zur erhoehung der systemsicherheit bei einem laser-schreibverfahren. Expired - Fee Related DE3768358D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH2565/86A CH670211A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-25 1986-06-25

Publications (1)

Publication Number Publication Date
DE3768358D1 true DE3768358D1 (de) 1991-04-11

Family

ID=4236665

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787810355T Expired - Fee Related DE3768358D1 (de) 1986-06-25 1987-06-23 Verfahren und vorrichtung zur erhoehung der systemsicherheit bei einem laser-schreibverfahren.

Country Status (10)

Country Link
US (1) US4871896A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0253764B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS6313687A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR880001082A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AT (1) ATE61264T1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH (1) CH670211A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3768358D1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
ES (1) ES2020580B3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IL (1) IL82761A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
ZA (1) ZA873900B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5793052A (en) * 1997-03-18 1998-08-11 Nikon Corporation Dual stage following method and apparatus
DE10105794A1 (de) * 2001-02-07 2002-08-08 Philips Corp Intellectual Pty Kommunikationssystem, Verfahren und Signal für zeitlagencodierte Datenübertragung
US7638731B2 (en) * 2005-10-18 2009-12-29 Electro Scientific Industries, Inc. Real time target topography tracking during laser processing
JP5620669B2 (ja) * 2009-10-26 2014-11-05 東芝機械株式会社 レーザダイシング方法およびレーザダイシング装置
WO2011064893A1 (ja) 2009-11-30 2011-06-03 Ykk株式会社 液密スライドファスナー及びその製造方法
JP5452247B2 (ja) * 2010-01-21 2014-03-26 東芝機械株式会社 レーザダイシング装置
US20130200053A1 (en) * 2010-04-13 2013-08-08 National Research Council Of Canada Laser processing control method
JP5981094B2 (ja) 2010-06-24 2016-08-31 東芝機械株式会社 ダイシング方法
JP5140198B1 (ja) 2011-07-27 2013-02-06 東芝機械株式会社 レーザダイシング方法
JP2014011358A (ja) 2012-06-29 2014-01-20 Toshiba Mach Co Ltd レーザダイシング方法
TWI619445B (zh) 2017-08-07 2018-04-01 冠宇拉鍊股份有限公司 防水拉鍊布及其防水拉鍊

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4213117A (en) * 1977-11-28 1980-07-15 Hitachi, Ltd. Method and apparatus for detecting positions of chips on a semiconductor wafer
US4691434A (en) * 1982-02-19 1987-09-08 Lasarray Holding Ag Method of making electrically conductive regions in monolithic semiconductor devices as applied to a semiconductor device
JPH0722166B2 (ja) * 1982-09-22 1995-03-08 株式会社東芝 ダイボンダ等におけるペレツト認識方法
ATE27659T1 (de) * 1983-06-17 1987-06-15 Lasarray Holding Ag Verfahren zum feststellen von referenzdaten zum zwecke der korrektur von mechanischen bewegungen beim schreiben von linien mit einem schreiblaserstrahl in einem metallisierten raster und vorrichtung zur durchfuehrung des verfahrens.
US4695698A (en) * 1984-07-10 1987-09-22 Larassay Holding Ag Method of, and apparatus for, generating a predetermined pattern using laser radiation

Also Published As

Publication number Publication date
JPS6313687A (ja) 1988-01-20
IL82761A (en) 1991-09-16
EP0253764A1 (de) 1988-01-20
ATE61264T1 (de) 1991-03-15
ZA873900B (en) 1987-12-10
IL82761A0 (en) 1987-12-20
US4871896A (en) 1989-10-03
CH670211A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-05-31
EP0253764B1 (de) 1991-03-06
KR880001082A (ko) 1988-03-31
ES2020580B3 (es) 1991-08-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee