DE3765767D1 - Mehrzwecksgasdetektoranordnung fuer elektronmikroskopen. - Google Patents

Mehrzwecksgasdetektoranordnung fuer elektronmikroskopen.

Info

Publication number
DE3765767D1
DE3765767D1 DE8787905370T DE3765767T DE3765767D1 DE 3765767 D1 DE3765767 D1 DE 3765767D1 DE 8787905370 T DE8787905370 T DE 8787905370T DE 3765767 T DE3765767 T DE 3765767T DE 3765767 D1 DE3765767 D1 DE 3765767D1
Authority
DE
Germany
Prior art keywords
gas detector
detector arrangement
multipurpose gas
electronic microscopes
microscopes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787905370T
Other languages
English (en)
Inventor
D Danilatos
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEI Co
Original Assignee
ElectroScan Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ElectroScan Corp filed Critical ElectroScan Corp
Priority claimed from PCT/US1987/001848 external-priority patent/WO1988001099A1/en
Application granted granted Critical
Publication of DE3765767D1 publication Critical patent/DE3765767D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE8787905370T 1986-08-01 1987-07-30 Mehrzwecksgasdetektoranordnung fuer elektronmikroskopen. Expired - Lifetime DE3765767D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AU722186 1986-08-01
PCT/US1987/001848 WO1988001099A1 (en) 1986-08-01 1987-07-30 Multipurpose gaseous detector device for electron microscopes

Publications (1)

Publication Number Publication Date
DE3765767D1 true DE3765767D1 (de) 1990-11-29

Family

ID=25612234

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787905370T Expired - Lifetime DE3765767D1 (de) 1986-08-01 1987-07-30 Mehrzwecksgasdetektoranordnung fuer elektronmikroskopen.

Country Status (1)

Country Link
DE (1) DE3765767D1 (de)

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PHILIPS ELECTRONICS NORTH AMERICA CORP., NEW YORK,

8328 Change in the person/name/address of the agent

Free format text: PEUCKERT, H., DIPL.-ING., PAT.-ASS., 22335 HAMBURG

8327 Change in the person/name/address of the patent owner

Owner name: FEI CO., HILLSBORO, OREG., US