DE3760173D1 - Process for the plasma purification of divided silicon - Google Patents
Process for the plasma purification of divided siliconInfo
- Publication number
- DE3760173D1 DE3760173D1 DE8787400022T DE3760173T DE3760173D1 DE 3760173 D1 DE3760173 D1 DE 3760173D1 DE 8787400022 T DE8787400022 T DE 8787400022T DE 3760173 T DE3760173 T DE 3760173T DE 3760173 D1 DE3760173 D1 DE 3760173D1
- Authority
- DE
- Germany
- Prior art keywords
- divided silicon
- plasma purification
- purification
- plasma
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/037—Purification
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP19870400022 EP0274283B1 (de) | 1987-01-08 | 1987-01-08 | Verfahren zur Plasmareinigung von zerkleinertem Silizium |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3760173D1 true DE3760173D1 (en) | 1989-06-29 |
Family
ID=8198176
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787400022T Expired DE3760173D1 (en) | 1987-01-08 | 1987-01-08 | Process for the plasma purification of divided silicon |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0274283B1 (de) |
DE (1) | DE3760173D1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3205352B2 (ja) * | 1990-05-30 | 2001-09-04 | 川崎製鉄株式会社 | シリコン精製方法及び装置 |
US5753567A (en) * | 1995-08-28 | 1998-05-19 | Memc Electronic Materials, Inc. | Cleaning of metallic contaminants from the surface of polycrystalline silicon with a halogen gas or plasma |
FR2772741B1 (fr) * | 1997-12-19 | 2000-03-10 | Centre Nat Rech Scient | Procede et installation d'affinage du silicium |
RU2159213C2 (ru) * | 1999-02-25 | 2000-11-20 | Абдюханов Мансур Абдрахманович | Способ очистки кремния и устройство для его осуществления |
CN101061065B (zh) * | 2004-11-30 | 2011-07-27 | 日本宇宙能源株式会社 | 多晶硅晶棒的制造方法 |
FR2963337B1 (fr) * | 2010-07-30 | 2013-03-01 | Commissariat Energie Atomique | Recyclage de boues de sciage de silicium pour la preparation de lingots ou de plaques par plasma thermique |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1374335A (fr) * | 1962-12-13 | 1964-10-09 | Electronique & Physique | Dispositif pour fabriquer une lame en matériau à grande pureté |
FR2438499A1 (fr) * | 1978-10-13 | 1980-05-09 | Anvar | Procede de purification et d'elaboration de cristaux par fusion de zone utilisant un jet de plasma et installation correspondante |
DE2924584A1 (de) * | 1979-06-19 | 1981-01-15 | Straemke Siegfried | Verfahren zur herstellung von silicium fuer solarzellen |
FR2487808A1 (fr) * | 1980-08-01 | 1982-02-05 | Electricite De France | Procede et dispositif d'elimination du bore dans le silicium par fusion de zone sous plasma reactif |
CA1147698A (en) * | 1980-10-15 | 1983-06-07 | Maher I. Boulos | Purification of metallurgical grade silicon |
-
1987
- 1987-01-08 EP EP19870400022 patent/EP0274283B1/de not_active Expired
- 1987-01-08 DE DE8787400022T patent/DE3760173D1/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
EP0274283B1 (de) | 1989-05-24 |
EP0274283A1 (de) | 1988-07-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: PHOTOWATT INTERNATIONAL S.A., RUEIL MALMAISON, FR |
|
8328 | Change in the person/name/address of the agent |
Free format text: WEINMILLER, J., DIPL.-ING., PAT.-ANW., 8133 FELDAFING |