DE3750961D1 - Mit statischem Druck arbeitende Schraubtriebführung. - Google Patents
Mit statischem Druck arbeitende Schraubtriebführung.Info
- Publication number
- DE3750961D1 DE3750961D1 DE3750961T DE3750961T DE3750961D1 DE 3750961 D1 DE3750961 D1 DE 3750961D1 DE 3750961 T DE3750961 T DE 3750961T DE 3750961 T DE3750961 T DE 3750961T DE 3750961 D1 DE3750961 D1 DE 3750961D1
- Authority
- DE
- Germany
- Prior art keywords
- static pressure
- screw drive
- drive guide
- guide working
- working
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0618—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via porous material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/18—Mechanical movements
- Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
- Y10T74/18576—Reciprocating or oscillating to or from alternating rotary including screw and nut
- Y10T74/18736—Pressurized fluid introduced between nut and screw
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/19—Gearing
- Y10T74/19991—Lubrication
- Y10T74/19995—Teeth
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Transmission Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62159737A JPH0730795B2 (ja) | 1987-06-29 | 1987-06-29 | 多孔質静圧案内の製造方法 |
JP62206567A JPH071057B2 (ja) | 1987-08-21 | 1987-08-21 | 静圧ねじ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3750961D1 true DE3750961D1 (de) | 1995-02-16 |
DE3750961T2 DE3750961T2 (de) | 1995-08-10 |
Family
ID=26486448
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3750904T Expired - Lifetime DE3750904T2 (de) | 1987-06-29 | 1987-09-09 | Vorschubeinrichtung. |
DE3750961T Expired - Lifetime DE3750961T2 (de) | 1987-06-29 | 1987-09-09 | Mit statischem Druck arbeitende Schraubtriebführung. |
DE8787113143T Expired - Lifetime DE3778156D1 (de) | 1987-06-29 | 1987-09-09 | Mit statischem druck arbeitende fuehrung aus poroesem werkstoff. |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3750904T Expired - Lifetime DE3750904T2 (de) | 1987-06-29 | 1987-09-09 | Vorschubeinrichtung. |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787113143T Expired - Lifetime DE3778156D1 (de) | 1987-06-29 | 1987-09-09 | Mit statischem druck arbeitende fuehrung aus poroesem werkstoff. |
Country Status (3)
Country | Link |
---|---|
US (1) | US4793201A (de) |
EP (3) | EP0429155B1 (de) |
DE (3) | DE3750904T2 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4836042A (en) * | 1987-07-27 | 1989-06-06 | Advanced Engineering Systems, Operations & Products, Inc. | System to convert rotary motion to linear motion |
US5090265A (en) * | 1987-07-27 | 1992-02-25 | Slocum Alexander H | System to convert rotary motion to linear motion |
US6337479B1 (en) | 1994-07-28 | 2002-01-08 | Victor B. Kley | Object inspection and/or modification system and method |
US5751683A (en) | 1995-07-24 | 1998-05-12 | General Nanotechnology, L.L.C. | Nanometer scale data storage device and associated positioning system |
US6339217B1 (en) | 1995-07-28 | 2002-01-15 | General Nanotechnology Llc | Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements |
US6752008B1 (en) | 2001-03-08 | 2004-06-22 | General Nanotechnology Llc | Method and apparatus for scanning in scanning probe microscopy and presenting results |
US7196328B1 (en) | 2001-03-08 | 2007-03-27 | General Nanotechnology Llc | Nanomachining method and apparatus |
US6923044B1 (en) | 2001-03-08 | 2005-08-02 | General Nanotechnology Llc | Active cantilever for nanomachining and metrology |
US6802646B1 (en) * | 2001-04-30 | 2004-10-12 | General Nanotechnology Llc | Low-friction moving interfaces in micromachines and nanomachines |
JP3116897B2 (ja) * | 1998-03-18 | 2000-12-11 | 日本電気株式会社 | 微細配線形成方法 |
EP1196939A4 (de) | 1999-07-01 | 2002-09-18 | Gen Nanotechnology Llc | Vorrichtung und verfahren zur untersuchung und/oder veränderungsobjekt |
US6931710B2 (en) | 2001-01-30 | 2005-08-23 | General Nanotechnology Llc | Manufacturing of micro-objects such as miniature diamond tool tips |
US7253407B1 (en) | 2001-03-08 | 2007-08-07 | General Nanotechnology Llc | Active cantilever for nanomachining and metrology |
WO2002072459A2 (de) * | 2001-03-08 | 2002-09-19 | Logos-Innovationen Gmbh | Aufzug mit druckgas beaufschlagbares gleitelement |
US7053369B1 (en) | 2001-10-19 | 2006-05-30 | Rave Llc | Scan data collection for better overall data accuracy |
US6813937B2 (en) | 2001-11-28 | 2004-11-09 | General Nanotechnology Llc | Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
JP2003205409A (ja) * | 2002-01-11 | 2003-07-22 | Big Alpha Co Ltd | 締付けナット及びコレットチャック |
WO2004023490A2 (en) | 2002-09-09 | 2004-03-18 | General Nanotechnology Llc | Fluid delivery for scanning probe microscopy |
US7444894B2 (en) * | 2004-11-10 | 2008-11-04 | International Business Machines Corporation | Linear actuator with wear-resistant ceramic bushing |
EP2198173A4 (de) * | 2007-10-09 | 2012-01-04 | Smartin Technologies Llc | Kompakte kontaktfreie mechanische kopplung, dämpfuns- und/oder tragvorrichtung |
KR101143425B1 (ko) | 2010-01-20 | 2012-05-22 | 주식회사 알피에스 | 하이브리드형 정압에어베어링 |
TWI458586B (zh) * | 2012-08-21 | 2014-11-01 | Ind Tech Res Inst | 複合式可變流阻液靜壓滑塊模組 |
US9151369B2 (en) | 2013-06-17 | 2015-10-06 | Korea Institute Of Machinery & Materials | Aerostatic air bearing, assembling method thereof, and aerostatic lead screw actuator using the same |
CN103352917B (zh) * | 2013-07-16 | 2015-08-19 | 西安工业大学 | 整体式气浮导轨在偏载下的等间隙设计方法 |
TWI546464B (zh) | 2014-05-27 | 2016-08-21 | 財團法人金屬工業研究發展中心 | 多孔質氣靜壓軸承之製作方法 |
DE102016104607B4 (de) * | 2016-03-14 | 2017-09-21 | Festo Ag & Co. Kg | Schlitten für einen Linearantrieb |
CN110594379B (zh) * | 2019-08-07 | 2021-08-31 | 山东大学 | 一种螺母驱动型液体静压丝杠螺旋传动副及机床 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE918365C (de) * | 1943-04-09 | 1954-09-23 | Buckau Wolf Maschf R | Verfahren zur Herstellung einer Mutter fuer Bewegungsschraubspindeln |
DE1809790U (de) * | 1958-10-29 | 1960-04-14 | Hugo Dr Ing Scobel | Hydrostatisches lager. |
US3171295A (en) * | 1962-06-05 | 1965-03-02 | Martin Marietta Corp | Air-lubricated screw and nut |
CH425361A (fr) * | 1965-10-26 | 1966-11-30 | Genevoise Instr Physique | Ecrou hydrostatique |
FR2045711A1 (de) * | 1969-06-25 | 1971-03-05 | Loustalet Pierre | |
US3640138A (en) * | 1969-12-12 | 1972-02-08 | Heald Machine Co | Machine tool |
DE2032160A1 (de) * | 1970-06-30 | 1972-01-05 | Konings Maschf P | Hydrostatisches oder aerostatisches Maschinenelement für Drehbewegungen oder Drehmomentübertragung |
US3670583A (en) * | 1970-10-19 | 1972-06-20 | Overton Gear And Tool Corp | Long span screw and nut drives |
US4431354A (en) * | 1981-09-03 | 1984-02-14 | Carrier Corporation | Lead screw assembly |
JPS591900B2 (ja) * | 1982-03-27 | 1984-01-14 | 株式会社不二越 | 静圧空気ねじ |
US4586394A (en) * | 1982-07-30 | 1986-05-06 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Low noise lead screw positioner |
JPS59113360A (ja) * | 1982-12-17 | 1984-06-30 | Matsushita Electric Ind Co Ltd | 静圧ねじ |
JPS60241566A (ja) * | 1984-05-14 | 1985-11-30 | Canon Inc | 静圧ネジ |
JPS61103053A (ja) * | 1984-10-26 | 1986-05-21 | Canon Inc | 送りねじ装置 |
JPS61127966A (ja) * | 1984-11-22 | 1986-06-16 | Canon Inc | 静圧送りネジ装置 |
DE3660115D1 (en) * | 1985-06-10 | 1988-05-05 | Interatom | Aerostatic bearing having a double conical configuration |
SE448252B (sv) * | 1986-03-18 | 1987-02-02 | Skf Ab | Gaslager med en lageryta anordnad pa ett gasgenomsleppligt element samt sett att framstella ett sadant lager |
US4695489A (en) * | 1986-07-28 | 1987-09-22 | General Electric Company | Electroless nickel plating composition and method |
-
1987
- 1987-09-09 EP EP90250345A patent/EP0429155B1/de not_active Expired - Lifetime
- 1987-09-09 US US07/095,038 patent/US4793201A/en not_active Expired - Lifetime
- 1987-09-09 EP EP90250344A patent/EP0427363B1/de not_active Expired - Lifetime
- 1987-09-09 DE DE3750904T patent/DE3750904T2/de not_active Expired - Lifetime
- 1987-09-09 DE DE3750961T patent/DE3750961T2/de not_active Expired - Lifetime
- 1987-09-09 EP EP87113143A patent/EP0297164B1/de not_active Expired - Lifetime
- 1987-09-09 DE DE8787113143T patent/DE3778156D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US4793201A (en) | 1988-12-27 |
EP0429155A1 (de) | 1991-05-29 |
EP0297164B1 (de) | 1992-04-08 |
EP0429155B1 (de) | 1994-12-21 |
EP0427363B1 (de) | 1995-01-04 |
EP0427363A1 (de) | 1991-05-15 |
DE3750904D1 (de) | 1995-02-02 |
EP0297164A1 (de) | 1989-01-04 |
DE3778156D1 (de) | 1992-05-14 |
DE3750904T2 (de) | 1995-08-03 |
DE3750961T2 (de) | 1995-08-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |