DE3750961D1 - Mit statischem Druck arbeitende Schraubtriebführung. - Google Patents

Mit statischem Druck arbeitende Schraubtriebführung.

Info

Publication number
DE3750961D1
DE3750961D1 DE3750961T DE3750961T DE3750961D1 DE 3750961 D1 DE3750961 D1 DE 3750961D1 DE 3750961 T DE3750961 T DE 3750961T DE 3750961 T DE3750961 T DE 3750961T DE 3750961 D1 DE3750961 D1 DE 3750961D1
Authority
DE
Germany
Prior art keywords
static pressure
screw drive
drive guide
guide working
working
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3750961T
Other languages
English (en)
Other versions
DE3750961T2 (de
Inventor
Munenori Kanai
Sunao Ishihara
Hiroo Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62159737A external-priority patent/JPH0730795B2/ja
Priority claimed from JP62206567A external-priority patent/JPH071057B2/ja
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Publication of DE3750961D1 publication Critical patent/DE3750961D1/de
Application granted granted Critical
Publication of DE3750961T2 publication Critical patent/DE3750961T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H25/00Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20Screw mechanisms
    • F16H25/24Elements essential to such mechanisms, e.g. screws, nuts
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0618Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via porous material
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00Machine element or mechanism
    • Y10T74/18Mechanical movements
    • Y10T74/18568Reciprocating or oscillating to or from alternating rotary
    • Y10T74/18576Reciprocating or oscillating to or from alternating rotary including screw and nut
    • Y10T74/18736Pressurized fluid introduced between nut and screw
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00Machine element or mechanism
    • Y10T74/19Gearing
    • Y10T74/19991Lubrication
    • Y10T74/19995Teeth

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Transmission Devices (AREA)
DE3750961T 1987-06-29 1987-09-09 Mit statischem Druck arbeitende Schraubtriebführung. Expired - Lifetime DE3750961T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62159737A JPH0730795B2 (ja) 1987-06-29 1987-06-29 多孔質静圧案内の製造方法
JP62206567A JPH071057B2 (ja) 1987-08-21 1987-08-21 静圧ねじ

Publications (2)

Publication Number Publication Date
DE3750961D1 true DE3750961D1 (de) 1995-02-16
DE3750961T2 DE3750961T2 (de) 1995-08-10

Family

ID=26486448

Family Applications (3)

Application Number Title Priority Date Filing Date
DE3750904T Expired - Lifetime DE3750904T2 (de) 1987-06-29 1987-09-09 Vorschubeinrichtung.
DE3750961T Expired - Lifetime DE3750961T2 (de) 1987-06-29 1987-09-09 Mit statischem Druck arbeitende Schraubtriebführung.
DE8787113143T Expired - Lifetime DE3778156D1 (de) 1987-06-29 1987-09-09 Mit statischem druck arbeitende fuehrung aus poroesem werkstoff.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE3750904T Expired - Lifetime DE3750904T2 (de) 1987-06-29 1987-09-09 Vorschubeinrichtung.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE8787113143T Expired - Lifetime DE3778156D1 (de) 1987-06-29 1987-09-09 Mit statischem druck arbeitende fuehrung aus poroesem werkstoff.

Country Status (3)

Country Link
US (1) US4793201A (de)
EP (3) EP0429155B1 (de)
DE (3) DE3750904T2 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4836042A (en) * 1987-07-27 1989-06-06 Advanced Engineering Systems, Operations & Products, Inc. System to convert rotary motion to linear motion
US5090265A (en) * 1987-07-27 1992-02-25 Slocum Alexander H System to convert rotary motion to linear motion
US6337479B1 (en) 1994-07-28 2002-01-08 Victor B. Kley Object inspection and/or modification system and method
US5751683A (en) 1995-07-24 1998-05-12 General Nanotechnology, L.L.C. Nanometer scale data storage device and associated positioning system
US6339217B1 (en) 1995-07-28 2002-01-15 General Nanotechnology Llc Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements
US6752008B1 (en) 2001-03-08 2004-06-22 General Nanotechnology Llc Method and apparatus for scanning in scanning probe microscopy and presenting results
US7196328B1 (en) 2001-03-08 2007-03-27 General Nanotechnology Llc Nanomachining method and apparatus
US6923044B1 (en) 2001-03-08 2005-08-02 General Nanotechnology Llc Active cantilever for nanomachining and metrology
US6802646B1 (en) * 2001-04-30 2004-10-12 General Nanotechnology Llc Low-friction moving interfaces in micromachines and nanomachines
JP3116897B2 (ja) * 1998-03-18 2000-12-11 日本電気株式会社 微細配線形成方法
EP1196939A4 (de) 1999-07-01 2002-09-18 Gen Nanotechnology Llc Vorrichtung und verfahren zur untersuchung und/oder veränderungsobjekt
US6931710B2 (en) 2001-01-30 2005-08-23 General Nanotechnology Llc Manufacturing of micro-objects such as miniature diamond tool tips
US7253407B1 (en) 2001-03-08 2007-08-07 General Nanotechnology Llc Active cantilever for nanomachining and metrology
WO2002072459A2 (de) * 2001-03-08 2002-09-19 Logos-Innovationen Gmbh Aufzug mit druckgas beaufschlagbares gleitelement
US7053369B1 (en) 2001-10-19 2006-05-30 Rave Llc Scan data collection for better overall data accuracy
US6813937B2 (en) 2001-11-28 2004-11-09 General Nanotechnology Llc Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
JP2003205409A (ja) * 2002-01-11 2003-07-22 Big Alpha Co Ltd 締付けナット及びコレットチャック
WO2004023490A2 (en) 2002-09-09 2004-03-18 General Nanotechnology Llc Fluid delivery for scanning probe microscopy
US7444894B2 (en) * 2004-11-10 2008-11-04 International Business Machines Corporation Linear actuator with wear-resistant ceramic bushing
EP2198173A4 (de) * 2007-10-09 2012-01-04 Smartin Technologies Llc Kompakte kontaktfreie mechanische kopplung, dämpfuns- und/oder tragvorrichtung
KR101143425B1 (ko) 2010-01-20 2012-05-22 주식회사 알피에스 하이브리드형 정압에어베어링
TWI458586B (zh) * 2012-08-21 2014-11-01 Ind Tech Res Inst 複合式可變流阻液靜壓滑塊模組
US9151369B2 (en) 2013-06-17 2015-10-06 Korea Institute Of Machinery & Materials Aerostatic air bearing, assembling method thereof, and aerostatic lead screw actuator using the same
CN103352917B (zh) * 2013-07-16 2015-08-19 西安工业大学 整体式气浮导轨在偏载下的等间隙设计方法
TWI546464B (zh) 2014-05-27 2016-08-21 財團法人金屬工業研究發展中心 多孔質氣靜壓軸承之製作方法
DE102016104607B4 (de) * 2016-03-14 2017-09-21 Festo Ag & Co. Kg Schlitten für einen Linearantrieb
CN110594379B (zh) * 2019-08-07 2021-08-31 山东大学 一种螺母驱动型液体静压丝杠螺旋传动副及机床

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE918365C (de) * 1943-04-09 1954-09-23 Buckau Wolf Maschf R Verfahren zur Herstellung einer Mutter fuer Bewegungsschraubspindeln
DE1809790U (de) * 1958-10-29 1960-04-14 Hugo Dr Ing Scobel Hydrostatisches lager.
US3171295A (en) * 1962-06-05 1965-03-02 Martin Marietta Corp Air-lubricated screw and nut
CH425361A (fr) * 1965-10-26 1966-11-30 Genevoise Instr Physique Ecrou hydrostatique
FR2045711A1 (de) * 1969-06-25 1971-03-05 Loustalet Pierre
US3640138A (en) * 1969-12-12 1972-02-08 Heald Machine Co Machine tool
DE2032160A1 (de) * 1970-06-30 1972-01-05 Konings Maschf P Hydrostatisches oder aerostatisches Maschinenelement für Drehbewegungen oder Drehmomentübertragung
US3670583A (en) * 1970-10-19 1972-06-20 Overton Gear And Tool Corp Long span screw and nut drives
US4431354A (en) * 1981-09-03 1984-02-14 Carrier Corporation Lead screw assembly
JPS591900B2 (ja) * 1982-03-27 1984-01-14 株式会社不二越 静圧空気ねじ
US4586394A (en) * 1982-07-30 1986-05-06 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Low noise lead screw positioner
JPS59113360A (ja) * 1982-12-17 1984-06-30 Matsushita Electric Ind Co Ltd 静圧ねじ
JPS60241566A (ja) * 1984-05-14 1985-11-30 Canon Inc 静圧ネジ
JPS61103053A (ja) * 1984-10-26 1986-05-21 Canon Inc 送りねじ装置
JPS61127966A (ja) * 1984-11-22 1986-06-16 Canon Inc 静圧送りネジ装置
DE3660115D1 (en) * 1985-06-10 1988-05-05 Interatom Aerostatic bearing having a double conical configuration
SE448252B (sv) * 1986-03-18 1987-02-02 Skf Ab Gaslager med en lageryta anordnad pa ett gasgenomsleppligt element samt sett att framstella ett sadant lager
US4695489A (en) * 1986-07-28 1987-09-22 General Electric Company Electroless nickel plating composition and method

Also Published As

Publication number Publication date
US4793201A (en) 1988-12-27
EP0429155A1 (de) 1991-05-29
EP0297164B1 (de) 1992-04-08
EP0429155B1 (de) 1994-12-21
EP0427363B1 (de) 1995-01-04
EP0427363A1 (de) 1991-05-15
DE3750904D1 (de) 1995-02-02
EP0297164A1 (de) 1989-01-04
DE3778156D1 (de) 1992-05-14
DE3750904T2 (de) 1995-08-03
DE3750961T2 (de) 1995-08-10

Similar Documents

Publication Publication Date Title
DE3750961D1 (de) Mit statischem Druck arbeitende Schraubtriebführung.
NO160989C (no) Drivtrykkregulator.
DE3872624D1 (de) Injektormischer unter druck.
DE3763706D1 (de) Tragbares werkzeug mit mechanischem antrieb.
DE68917409D1 (de) Druckregler.
DE58904553D1 (de) Antriebsrolleneinheit.
DE3669936D1 (de) Fluidregelantrieb.
DE3763537D1 (de) Linearfuehrung.
DE3864951D1 (de) Druckregler.
DE3481992D1 (de) Fluoroelastomer mit geringerer bleibender druckverformung.
ES2019410B3 (es) Cartucho de evacuacion con embolo impulsor
DE59005988D1 (de) Rollenantriebseinheit.
DE59001791D1 (de) Antriebsrolleneinheit.
DE3781899D1 (de) Antriebsanordnung.
DE69012741D1 (de) Linearführung.
IT8520827A0 (it) Dispositivo per telai di piastre refrattarie in serrami a cursore.
DE3861589D1 (de) Hydraulische antriebsvorrichtung.
DE69115293D1 (de) Periodontale sonde mit konstantem druck.
DE58902318D1 (de) Kolbenantrieb.
IT8423469A0 (it) Dispositivo di azionamento impiegato in un regolatore difinestra.
DE58908530D1 (de) Hydraulikantrieb.
DE68901710D1 (de) Antriebswellen.
DE68913757D1 (de) Motorangetriebene Druckwalze.
IT8920507V0 (it) Dispositivo di azionamento di impostazione.
DE3668221D1 (de) Ausgleichsrollenschieberpumpe mit druckspitzenreduzierung.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition