DE3689140D1 - Kalibrierpunkte für die ausrichtung eines wafer-prüfkopfes. - Google Patents

Kalibrierpunkte für die ausrichtung eines wafer-prüfkopfes.

Info

Publication number
DE3689140D1
DE3689140D1 DE86902664T DE3689140T DE3689140D1 DE 3689140 D1 DE3689140 D1 DE 3689140D1 DE 86902664 T DE86902664 T DE 86902664T DE 3689140 T DE3689140 T DE 3689140T DE 3689140 D1 DE3689140 D1 DE 3689140D1
Authority
DE
Germany
Prior art keywords
aligning
test head
calibration points
wafer test
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE86902664T
Other languages
English (en)
Other versions
DE3689140T2 (de
Inventor
Horst Leuschner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics lnc USA
Original Assignee
SGS Thomson Microelectronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SGS Thomson Microelectronics Inc filed Critical SGS Thomson Microelectronics Inc
Application granted granted Critical
Publication of DE3689140D1 publication Critical patent/DE3689140D1/de
Publication of DE3689140T2 publication Critical patent/DE3689140T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE86902664T 1985-04-08 1986-04-07 Kalibrierpunkte für die ausrichtung eines wafer-prüfkopfes. Expired - Fee Related DE3689140T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US72116685A 1985-04-08 1985-04-08

Publications (2)

Publication Number Publication Date
DE3689140D1 true DE3689140D1 (de) 1993-11-11
DE3689140T2 DE3689140T2 (de) 1994-02-03

Family

ID=24896820

Family Applications (1)

Application Number Title Priority Date Filing Date
DE86902664T Expired - Fee Related DE3689140T2 (de) 1985-04-08 1986-04-07 Kalibrierpunkte für die ausrichtung eines wafer-prüfkopfes.

Country Status (6)

Country Link
EP (1) EP0220233B1 (de)
JP (1) JPS62502498A (de)
KR (1) KR910000607B1 (de)
BR (1) BR8606540A (de)
DE (1) DE3689140T2 (de)
WO (1) WO1986006176A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02234085A (ja) * 1989-03-08 1990-09-17 Mitsubishi Electric Corp 半導体装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010075A (de) * 1973-05-24 1975-02-01
JPS52101967A (en) * 1976-02-23 1977-08-26 Agency Of Ind Science & Technol Semiconductor device
US4521114A (en) * 1979-05-11 1985-06-04 Tre Semiconductor Equipment Corporation Single lens repeater
US4356223A (en) * 1980-02-28 1982-10-26 Nippon Electric Co., Ltd. Semiconductor device having a registration mark for use in an exposure technique for micro-fine working
US4419013A (en) * 1981-03-30 1983-12-06 Tre Semiconductor Equipment Corporation Phase contrast alignment system for a semiconductor manufacturing apparatus
US4406949A (en) * 1981-07-13 1983-09-27 Mostek Corporation Method and apparatus for aligning an integrated circuit
DE3318980C2 (de) * 1982-07-09 1986-09-18 Perkin-Elmer Censor Anstalt, Vaduz Vorrichtung zum Justieren beim Projektionskopieren von Masken
JPS59172741A (ja) * 1983-03-22 1984-09-29 Mitsubishi Electric Corp 半導体装置

Also Published As

Publication number Publication date
DE3689140T2 (de) 1994-02-03
KR910000607B1 (ko) 1991-01-28
JPH0548947B2 (de) 1993-07-22
WO1986006176A1 (en) 1986-10-23
EP0220233B1 (de) 1993-10-06
EP0220233A4 (de) 1988-11-02
KR880700273A (ko) 1988-02-22
JPS62502498A (ja) 1987-09-24
EP0220233A1 (de) 1987-05-06
BR8606540A (pt) 1987-08-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee