DE3681646D1 - Verfahren zur hitzebehandlung von sinh-, sih und ungesaettigten gruppen enthaltenden polysilazaten. - Google Patents
Verfahren zur hitzebehandlung von sinh-, sih und ungesaettigten gruppen enthaltenden polysilazaten.Info
- Publication number
- DE3681646D1 DE3681646D1 DE8686420163T DE3681646T DE3681646D1 DE 3681646 D1 DE3681646 D1 DE 3681646D1 DE 8686420163 T DE8686420163 T DE 8686420163T DE 3681646 T DE3681646 T DE 3681646T DE 3681646 D1 DE3681646 D1 DE 3681646D1
- Authority
- DE
- Germany
- Prior art keywords
- sih
- polysilazates
- sinh
- groups containing
- heating treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
- C08G77/62—Nitrogen atoms
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/571—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained from Si-containing polymer precursors or organosilicon monomers
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/589—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
- C08L83/16—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers in which all the silicon atoms are connected by linkages other than oxygen atoms
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Polymers & Plastics (AREA)
- Medicinal Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Health & Medical Sciences (AREA)
- Silicon Polymers (AREA)
- Ceramic Products (AREA)
- Carbon And Carbon Compounds (AREA)
- Inorganic Fibers (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8510034A FR2584080B1 (fr) | 1985-06-26 | 1985-06-26 | Procede de traitement thermique d'un polysilazane contenant des groupes sih et des groupes si-n- |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3681646D1 true DE3681646D1 (de) | 1991-10-31 |
Family
ID=9320848
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686420163T Expired - Fee Related DE3681646D1 (de) | 1985-06-26 | 1986-06-24 | Verfahren zur hitzebehandlung von sinh-, sih und ungesaettigten gruppen enthaltenden polysilazaten. |
Country Status (9)
Country | Link |
---|---|
US (1) | US4656300A (de) |
EP (1) | EP0209472B1 (de) |
JP (1) | JPS6211729A (de) |
AT (1) | ATE67775T1 (de) |
AU (1) | AU584714B2 (de) |
BR (1) | BR8602521A (de) |
CA (1) | CA1263963A (de) |
DE (1) | DE3681646D1 (de) |
FR (1) | FR2584080B1 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5008422A (en) * | 1985-04-26 | 1991-04-16 | Sri International | Polysilazanes and related compositions, processes and uses |
FR2584079B1 (fr) * | 1985-06-26 | 1987-08-14 | Rhone Poulenc Rech | Procede de traitement par catalyse cationique d'un polysilazane comportant en moyenne au moins deux groupes sih par molecule |
US4645807A (en) * | 1985-07-18 | 1987-02-24 | Massachusetts Institute Of Technology | Method for forming new preceramic polymers for SiC and Si3 N4 /SiC systems |
US4719125A (en) * | 1985-10-11 | 1988-01-12 | Allied Corporation | Cyclosilazane polymers as dielectric films in integrated circuit fabrication technology |
JPH0764642B2 (ja) * | 1986-06-13 | 1995-07-12 | 東燃株式会社 | 窒化物系セラミツクスの製法 |
US4720532A (en) * | 1986-08-22 | 1988-01-19 | Massachusetts Institute Of Technology | Organopolysilazane precursors to silicon nitride-rich mixed SiC/Si3 N4 |
US4869854A (en) * | 1986-10-31 | 1989-09-26 | Shin-Etsu Chemical Co., Ltd. | Process for manufacturing organic silazane polymers and ceramics therefrom |
US4828663A (en) * | 1987-01-15 | 1989-05-09 | Dow Corning Corporation | Infusible preceramic silazane polymers via high energy radiation |
FR2616436B1 (fr) * | 1987-06-10 | 1989-12-29 | Europ Propulsion | Copolymeres a liaisons si-n et si-si, polycarbosilazanes obtenus par pyrolyse desdits copolymeres et utilisation desdits polycarbosilazanes pour la preparation de carbonitrure de silicium |
US4975512A (en) * | 1987-08-13 | 1990-12-04 | Petroleum Energy Center | Reformed polysilazane and method of producing same |
DE3733728A1 (de) * | 1987-10-06 | 1989-04-20 | Hoechst Ag | Polymere hydridosilazane und verfahren zu ihrer herstellung sowie ihre verwendung |
DE3733727A1 (de) * | 1987-10-06 | 1989-04-20 | Hoechst Ag | Polymere hydridochlorsilazane und verfahren zu ihrer herstellung |
DE4114218A1 (de) * | 1991-05-01 | 1992-11-05 | Bayer Ag | Organische silazanpolymere, verfahren zu ihrer herstellung, sowie ein verfahren zur herstellung von keramikmaterialien daraus |
US5171557A (en) * | 1991-05-28 | 1992-12-15 | Ford Motor Company | Method for silicon nitride precursor solids recovery |
WO1994012448A1 (en) * | 1992-11-26 | 1994-06-09 | Tonen Corporation | Process for producing ceramic product |
US5747623A (en) * | 1994-10-14 | 1998-05-05 | Tonen Corporation | Method and composition for forming ceramics and article coated with the ceramics |
WO2006113447A2 (en) * | 2005-04-14 | 2006-10-26 | Ted Johnson | Superabrasive coatings |
US10316216B2 (en) | 2016-08-31 | 2019-06-11 | Samsung Sdi Co., Ltd. | Composition for forming silica layer, and silica layer |
FR3060601B1 (fr) * | 2016-12-20 | 2018-12-07 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Composition adhesive et son utilisation dans l'electronique |
CN106823843B (zh) * | 2017-01-13 | 2019-03-22 | 常州大学 | 一种二氧化硅膜孔径的调控方法及其应用 |
US11170994B1 (en) * | 2021-01-12 | 2021-11-09 | Applied Materials, Inc. | CD dependent gap fill and conformal films |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4340619A (en) * | 1981-01-15 | 1982-07-20 | Dow Corning Corporation | Process for the preparation of poly(disilyl)silazane polymers and the polymers therefrom |
US4404153A (en) * | 1981-01-15 | 1983-09-13 | Dow Corning Corporation | Process for the preparation of poly(disilyl)silazane polymers and the polymers therefrom |
US4397828A (en) * | 1981-11-16 | 1983-08-09 | Massachusetts Institute Of Technology | Stable liquid polymeric precursor to silicon nitride and process |
US4540803A (en) * | 1983-11-28 | 1985-09-10 | Dow Corning Corporation | Hydrosilazane polymers from [R3 Si]2 NH and HSiCl3 |
US4482669A (en) * | 1984-01-19 | 1984-11-13 | Massachusetts Institute Of Technology | Preceramic organosilazane polymers |
US4482689A (en) * | 1984-03-12 | 1984-11-13 | Dow Corning Corporation | Process for the preparation of polymetallo(disily)silazane polymers and the polymers therefrom |
FR2577933B1 (fr) * | 1985-02-27 | 1987-02-20 | Rhone Poulenc Rech | Procede de preparation d'organopolysilazanes et d'organopoly(disilyl)silazanes de tenue thermique amelioree et son utilisation notamment comme precurseur de ceramique |
FR2579602B1 (fr) * | 1985-03-29 | 1987-06-05 | Rhone Poulenc Rech | Composition polysilazane pouvant reticuler en presence d'un metal ou d'un compose metallique catalysant la reaction d'hydrosilylation |
FR2581391B1 (fr) * | 1985-05-06 | 1987-06-05 | Rhone Poulenc Rech | Composition organo-polysilazane comportant des generateurs de radicaux libres et reticulable par apport d'energie |
-
1985
- 1985-06-26 FR FR8510034A patent/FR2584080B1/fr not_active Expired
-
1986
- 1986-05-15 CA CA000509259A patent/CA1263963A/fr not_active Expired
- 1986-05-30 BR BR8602521A patent/BR8602521A/pt unknown
- 1986-06-23 AU AU58947/86A patent/AU584714B2/en not_active Ceased
- 1986-06-24 EP EP86420163A patent/EP0209472B1/de not_active Expired - Lifetime
- 1986-06-24 AT AT86420163T patent/ATE67775T1/de active
- 1986-06-24 DE DE8686420163T patent/DE3681646D1/de not_active Expired - Fee Related
- 1986-06-25 JP JP61147247A patent/JPS6211729A/ja active Granted
- 1986-06-25 US US06/878,261 patent/US4656300A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
ATE67775T1 (de) | 1991-10-15 |
EP0209472A1 (de) | 1987-01-21 |
BR8602521A (pt) | 1987-01-27 |
AU5894786A (en) | 1988-01-07 |
EP0209472B1 (de) | 1991-09-25 |
JPS6211729A (ja) | 1987-01-20 |
FR2584080B1 (fr) | 1987-12-31 |
US4656300A (en) | 1987-04-07 |
FR2584080A1 (fr) | 1987-01-02 |
JPH036172B2 (de) | 1991-01-29 |
AU584714B2 (en) | 1989-06-01 |
CA1263963A (fr) | 1989-12-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3681646D1 (de) | Verfahren zur hitzebehandlung von sinh-, sih und ungesaettigten gruppen enthaltenden polysilazaten. | |
AU1910783A (en) | Organopolysiloxane composition | |
ES2020197B3 (es) | Procedimiento de preparacion, en dos etapas, de reticulados de organopolisilazanos de resistencia termica mejorada, pudiendo servir particularmente como precursor ceramico. | |
FR2044184A5 (en) | Hard, scratch and heat proof surfaces for - plastics | |
DE68915473T2 (de) | Verfahren zur Uebertragung von Wärme zwischen flüssigen Prozessströmen. | |
KR880700862A (ko) | 실리콘 웨이퍼와 같은 얇은 부분을 열 처리하는 장치 | |
ATE37891T1 (de) | Verfahren zur herstellung von organopolysilazanen und organopoly(disilyl)silazanen mit erhoehter hitzestabilitaet und deren anwendung fuer die herstellung von keramischen materialien. | |
DE69025652D1 (de) | Verfahren zur Herstellung borhaltiger keramischer Formkörper auf Siliciumnitridbasis | |
ATE87003T1 (de) | Oligosaccharide, immunogene und impstoffe und verfahren zur herstellung dieser oligosaccharide, immunogene und impstoffe. | |
BR8602520A (pt) | Processo de tratamento catalitico de um polissilazano e polissilazano | |
DE69019484D1 (de) | Verfahren zur Verminderung der Druckverformungszeit von Elastomeren, Silanolgruppen enthaltende Polysiloxanzusammensetzung. | |
DE3883518T2 (de) | Verfahren zur Herstellung von Silicium-Metall hoher Reinheit und Vorrichtung dafür. | |
DE3782151T3 (de) | Verfahren zur Fabrikation von Alkylhalosilanen und Silizium dafür. | |
DE3786411T2 (de) | Verfahren zur Herstellung von gehärteten Siloxanzusammensetzungen. | |
DE69206434D1 (de) | Verfahren zur Herstellung von Keramik auf Siliciumnitridbasis. | |
ATE18052T1 (de) | Verfahren zur spaltung von organosiloxanen. | |
DE3853269T2 (de) | Temperaturkontrolliertes Verfahren zur Herstellung von als Adjuvans für Detergentien verwendbaren 2'2'-Oxodisuccinten. | |
DE69009225T2 (de) | Verfahren zur Herstellung von Bornitrid. | |
DE69213773T2 (de) | Verfahren zur Herstellung keramischer Vorprodukte auf Basis von Siliciumcarbid | |
KR960017511A (ko) | 옥시탄화규소의 제조방법 | |
DE3879851D1 (de) | Verfahren zur herstellung von formkoerpern aus pyrolytischem graphit. | |
ATE83610T1 (de) | Verfahren zur herstellung von kondensmilch. | |
UA11521A1 (uk) | Ваhhа для зміцhюваhhя скловиробів | |
ATA181893A (de) | Verfahren zur herstellung von isocyansäure aus cyanursäure | |
DE3578185D1 (de) | Verfahren zur herstellung von harnstoffkondensationsprodukten und deren verwendung. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |