ATE67775T1 - Verfahren zur hitzebehandlung von sinh-, sih und ungesaettigten gruppen enthaltenden polysilazaten. - Google Patents

Verfahren zur hitzebehandlung von sinh-, sih und ungesaettigten gruppen enthaltenden polysilazaten.

Info

Publication number
ATE67775T1
ATE67775T1 AT86420163T AT86420163T ATE67775T1 AT E67775 T1 ATE67775 T1 AT E67775T1 AT 86420163 T AT86420163 T AT 86420163T AT 86420163 T AT86420163 T AT 86420163T AT E67775 T1 ATE67775 T1 AT E67775T1
Authority
AT
Austria
Prior art keywords
sih
polysilazates
sinh
heat treatment
unsaturated groups
Prior art date
Application number
AT86420163T
Other languages
English (en)
Inventor
Hugues Porte
Jean-Jacques Lebrun
Original Assignee
Rhone Poulenc Chimie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rhone Poulenc Chimie filed Critical Rhone Poulenc Chimie
Application granted granted Critical
Publication of ATE67775T1 publication Critical patent/ATE67775T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
    • C08G77/62—Nitrogen atoms
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/571—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained from Si-containing polymer precursors or organosilicon monomers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/589—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/16—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers in which all the silicon atoms are connected by linkages other than oxygen atoms

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Structural Engineering (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Silicon Polymers (AREA)
  • Ceramic Products (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Inorganic Fibers (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AT86420163T 1985-06-26 1986-06-24 Verfahren zur hitzebehandlung von sinh-, sih und ungesaettigten gruppen enthaltenden polysilazaten. ATE67775T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8510034A FR2584080B1 (fr) 1985-06-26 1985-06-26 Procede de traitement thermique d'un polysilazane contenant des groupes sih et des groupes si-n-
EP86420163A EP0209472B1 (de) 1985-06-26 1986-06-24 Verfahren zur Hitzebehandlung von SiNH-, SiH und ungesättigten Gruppen enthaltenden Polysilazaten

Publications (1)

Publication Number Publication Date
ATE67775T1 true ATE67775T1 (de) 1991-10-15

Family

ID=9320848

Family Applications (1)

Application Number Title Priority Date Filing Date
AT86420163T ATE67775T1 (de) 1985-06-26 1986-06-24 Verfahren zur hitzebehandlung von sinh-, sih und ungesaettigten gruppen enthaltenden polysilazaten.

Country Status (9)

Country Link
US (1) US4656300A (de)
EP (1) EP0209472B1 (de)
JP (1) JPS6211729A (de)
AT (1) ATE67775T1 (de)
AU (1) AU584714B2 (de)
BR (1) BR8602521A (de)
CA (1) CA1263963A (de)
DE (1) DE3681646D1 (de)
FR (1) FR2584080B1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5008422A (en) * 1985-04-26 1991-04-16 Sri International Polysilazanes and related compositions, processes and uses
FR2584079B1 (fr) * 1985-06-26 1987-08-14 Rhone Poulenc Rech Procede de traitement par catalyse cationique d'un polysilazane comportant en moyenne au moins deux groupes sih par molecule
US4645807A (en) * 1985-07-18 1987-02-24 Massachusetts Institute Of Technology Method for forming new preceramic polymers for SiC and Si3 N4 /SiC systems
US4719125A (en) * 1985-10-11 1988-01-12 Allied Corporation Cyclosilazane polymers as dielectric films in integrated circuit fabrication technology
JPH0764642B2 (ja) * 1986-06-13 1995-07-12 東燃株式会社 窒化物系セラミツクスの製法
US4720532A (en) * 1986-08-22 1988-01-19 Massachusetts Institute Of Technology Organopolysilazane precursors to silicon nitride-rich mixed SiC/Si3 N4
US4869854A (en) * 1986-10-31 1989-09-26 Shin-Etsu Chemical Co., Ltd. Process for manufacturing organic silazane polymers and ceramics therefrom
US4828663A (en) * 1987-01-15 1989-05-09 Dow Corning Corporation Infusible preceramic silazane polymers via high energy radiation
FR2616436B1 (fr) * 1987-06-10 1989-12-29 Europ Propulsion Copolymeres a liaisons si-n et si-si, polycarbosilazanes obtenus par pyrolyse desdits copolymeres et utilisation desdits polycarbosilazanes pour la preparation de carbonitrure de silicium
US4975512A (en) * 1987-08-13 1990-12-04 Petroleum Energy Center Reformed polysilazane and method of producing same
DE3733728A1 (de) * 1987-10-06 1989-04-20 Hoechst Ag Polymere hydridosilazane und verfahren zu ihrer herstellung sowie ihre verwendung
DE3733727A1 (de) * 1987-10-06 1989-04-20 Hoechst Ag Polymere hydridochlorsilazane und verfahren zu ihrer herstellung
DE4114218A1 (de) * 1991-05-01 1992-11-05 Bayer Ag Organische silazanpolymere, verfahren zu ihrer herstellung, sowie ein verfahren zur herstellung von keramikmaterialien daraus
US5171557A (en) * 1991-05-28 1992-12-15 Ford Motor Company Method for silicon nitride precursor solids recovery
EP0623571A4 (de) * 1992-11-26 1997-07-02 Tonen Corp Verfahren zur herstellung keramischer produkte.
US5747623A (en) * 1994-10-14 1998-05-05 Tonen Corporation Method and composition for forming ceramics and article coated with the ceramics
WO2006113447A2 (en) * 2005-04-14 2006-10-26 Ted Johnson Superabrasive coatings
US10316216B2 (en) 2016-08-31 2019-06-11 Samsung Sdi Co., Ltd. Composition for forming silica layer, and silica layer
FR3060601B1 (fr) * 2016-12-20 2018-12-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Composition adhesive et son utilisation dans l'electronique
CN106823843B (zh) * 2017-01-13 2019-03-22 常州大学 一种二氧化硅膜孔径的调控方法及其应用
US11170994B1 (en) * 2021-01-12 2021-11-09 Applied Materials, Inc. CD dependent gap fill and conformal films

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4340619A (en) * 1981-01-15 1982-07-20 Dow Corning Corporation Process for the preparation of poly(disilyl)silazane polymers and the polymers therefrom
US4404153A (en) * 1981-01-15 1983-09-13 Dow Corning Corporation Process for the preparation of poly(disilyl)silazane polymers and the polymers therefrom
US4397828A (en) * 1981-11-16 1983-08-09 Massachusetts Institute Of Technology Stable liquid polymeric precursor to silicon nitride and process
US4540803A (en) * 1983-11-28 1985-09-10 Dow Corning Corporation Hydrosilazane polymers from [R3 Si]2 NH and HSiCl3
US4482669A (en) * 1984-01-19 1984-11-13 Massachusetts Institute Of Technology Preceramic organosilazane polymers
US4482689A (en) * 1984-03-12 1984-11-13 Dow Corning Corporation Process for the preparation of polymetallo(disily)silazane polymers and the polymers therefrom
FR2577933B1 (fr) * 1985-02-27 1987-02-20 Rhone Poulenc Rech Procede de preparation d'organopolysilazanes et d'organopoly(disilyl)silazanes de tenue thermique amelioree et son utilisation notamment comme precurseur de ceramique
FR2579602B1 (fr) * 1985-03-29 1987-06-05 Rhone Poulenc Rech Composition polysilazane pouvant reticuler en presence d'un metal ou d'un compose metallique catalysant la reaction d'hydrosilylation
FR2581391B1 (fr) * 1985-05-06 1987-06-05 Rhone Poulenc Rech Composition organo-polysilazane comportant des generateurs de radicaux libres et reticulable par apport d'energie

Also Published As

Publication number Publication date
FR2584080B1 (fr) 1987-12-31
US4656300A (en) 1987-04-07
AU5894786A (en) 1988-01-07
FR2584080A1 (fr) 1987-01-02
EP0209472A1 (de) 1987-01-21
BR8602521A (pt) 1987-01-27
JPH036172B2 (de) 1991-01-29
JPS6211729A (ja) 1987-01-20
DE3681646D1 (de) 1991-10-31
CA1263963A (fr) 1989-12-19
AU584714B2 (en) 1989-06-01
EP0209472B1 (de) 1991-09-25

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