DE3679299D1 - Verfahren zur bildung eines duennschichtfilms. - Google Patents

Verfahren zur bildung eines duennschichtfilms.

Info

Publication number
DE3679299D1
DE3679299D1 DE8686904352T DE3679299T DE3679299D1 DE 3679299 D1 DE3679299 D1 DE 3679299D1 DE 8686904352 T DE8686904352 T DE 8686904352T DE 3679299 T DE3679299 T DE 3679299T DE 3679299 D1 DE3679299 D1 DE 3679299D1
Authority
DE
Germany
Prior art keywords
thin
forming
layer film
film
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8686904352T
Other languages
English (en)
Inventor
Shunpei Yamazaki
Kazuo Urata
Mamoru Tashiro
Yuji Tanamura
Shinji Imato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP60144900A external-priority patent/JP2593642B2/ja
Priority claimed from JP14489685A external-priority patent/JPH0622228B2/ja
Priority claimed from JP14489785A external-priority patent/JPS625633A/ja
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority claimed from PCT/JP1986/000328 external-priority patent/WO1987000346A1/ja
Application granted granted Critical
Publication of DE3679299D1 publication Critical patent/DE3679299D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials

Landscapes

  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
DE8686904352T 1985-07-02 1986-06-27 Verfahren zur bildung eines duennschichtfilms. Expired - Fee Related DE3679299D1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP60144900A JP2593642B2 (ja) 1985-07-02 1985-07-02 半導体装置およびその作製方法
JP14489685A JPH0622228B2 (ja) 1985-07-02 1985-07-02 薄膜形成方法
JP14489785A JPS625633A (ja) 1985-07-02 1985-07-02 薄膜形成方法
PCT/JP1986/000328 WO1987000346A1 (en) 1985-07-02 1986-06-27 Method of forming a thin film

Publications (1)

Publication Number Publication Date
DE3679299D1 true DE3679299D1 (de) 1991-06-20

Family

ID=27467198

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686904352T Expired - Fee Related DE3679299D1 (de) 1985-07-02 1986-06-27 Verfahren zur bildung eines duennschichtfilms.

Country Status (1)

Country Link
DE (1) DE3679299D1 (de)

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee