DE3679141D1 - DEVICE FOR MICROPOSITIONING. - Google Patents
DEVICE FOR MICROPOSITIONING.Info
- Publication number
- DE3679141D1 DE3679141D1 DE8686810382T DE3679141T DE3679141D1 DE 3679141 D1 DE3679141 D1 DE 3679141D1 DE 8686810382 T DE8686810382 T DE 8686810382T DE 3679141 T DE3679141 T DE 3679141T DE 3679141 D1 DE3679141 D1 DE 3679141D1
- Authority
- DE
- Germany
- Prior art keywords
- freedom
- reference base
- degrees
- movable platform
- micropositioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
- B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
- B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
- B23Q1/626—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair followed perpendicularly by a single sliding pair
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20576—Elements
- Y10T74/20582—Levers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Machine Tool Units (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Control Of Position Or Direction (AREA)
- Prostheses (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Electrotherapy Devices (AREA)
- Motorcycle And Bicycle Frame (AREA)
Abstract
A micropositioning device having a plurality of degrees of freedom is provided. This device is particularly useful in guiding optic components. The device has N degrees of freedom and comprises two rigid members, namely a reference base and a movable platform. The reference base and the movable platform are connected by N independent chains. Each chain consists of N elastic guide means with a single degree of freedom, arranged in series, and an actuator fixed to the reference base.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8512944A FR2586853B1 (en) | 1985-08-30 | 1985-08-30 | MICROPOSITIONING DEVICE |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3679141D1 true DE3679141D1 (en) | 1991-06-13 |
Family
ID=9322504
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686810382T Expired - Fee Related DE3679141D1 (en) | 1985-08-30 | 1986-08-27 | DEVICE FOR MICROPOSITIONING. |
Country Status (7)
Country | Link |
---|---|
US (1) | US4805543A (en) |
EP (1) | EP0218546B1 (en) |
JP (1) | JPH0760191B2 (en) |
AT (1) | ATE63393T1 (en) |
CA (1) | CA1285759C (en) |
DE (1) | DE3679141D1 (en) |
FR (1) | FR2586853B1 (en) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0335126A3 (en) * | 1988-03-10 | 1991-10-16 | Wendel Schmidt | Jeweler's multi-axial work support and positioning device |
JP2623123B2 (en) * | 1988-08-17 | 1997-06-25 | キヤノン株式会社 | Fine movement stage device |
JPH0259494U (en) * | 1988-10-21 | 1990-05-01 | ||
DE3905952A1 (en) * | 1989-02-25 | 1990-08-30 | Kugelfischer G Schaefer & Co | MULTI-COORDINATE MEASURING PROBE |
US5943914A (en) * | 1997-03-27 | 1999-08-31 | Sandia Corporation | Master-slave micromanipulator apparatus |
US6346710B1 (en) | 1998-08-31 | 2002-02-12 | Olympus Optical Co., Ltd. | Stage apparatus including displacement amplifying mechanism |
DE19945584A1 (en) * | 1999-09-23 | 2001-03-29 | Siat Gmbh Technologiepark | Multi-dimensional drive for work machines |
US6445514B1 (en) * | 2000-10-12 | 2002-09-03 | Honeywell International Inc. | Micro-positioning optical element |
GB0217734D0 (en) * | 2002-07-31 | 2002-09-11 | Pbt Ip Ltd | Reversing linkage |
US7068891B1 (en) | 2002-03-12 | 2006-06-27 | Palomar Technologies, Inc. | System and method for positioning optical fibers |
US7107693B2 (en) * | 2005-01-14 | 2006-09-19 | Illinois Institute Of Technology | Apparatus and method for precise angular positioning |
US8984982B2 (en) | 2006-10-31 | 2015-03-24 | Force Dimension S.A.R.L. | Parallel kinematic structure |
JP5031459B2 (en) * | 2007-06-27 | 2012-09-19 | 株式会社アルバック | Coarse / fine movement apparatus and liquid supply apparatus including the same |
CN100486413C (en) * | 2007-10-26 | 2009-05-06 | 华南理工大学 | Positioning platform for fully automatic lead-free tin oil imprinter based on flexible machine |
ES2772073T3 (en) | 2008-07-25 | 2020-07-07 | Sloan Kettering Inst Cancer Res | Rapid confocal microscopy to support surgical procedures |
CN102152131B (en) * | 2011-02-28 | 2012-06-13 | 西安理工大学 | Series macro-micro driving and guiding device for piezoelectric actuator of ball screw pair |
CN102623070A (en) * | 2012-03-30 | 2012-08-01 | 中国科学院长春光学精密机械与物理研究所 | Precise two-degree of freedom micro-displacement positioning device |
CN104238273B (en) * | 2013-06-19 | 2016-09-28 | 上海微电子装备有限公司 | A kind of work stage safety device |
US9312790B2 (en) * | 2013-09-13 | 2016-04-12 | Physik Instrumente (Pi) Gmbh & Co. Kg | Compact versatile stick-slip piezoelectric motor |
CN104742099B (en) * | 2015-04-09 | 2016-05-18 | 南京航空航天大学 | A kind of self-propelled planar three freedom piezoelectric drive platform |
CN105551836B (en) * | 2016-01-18 | 2018-04-17 | 北京邮电大学 | A kind of two-dimensional micromotion stage device |
CN107833594B (en) * | 2017-09-13 | 2020-02-21 | 南京航空航天大学 | Two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB624331A (en) * | 1947-07-03 | 1949-06-02 | William Donald Douglas | Improvements in or relating to lever systems, apparatus incorporating lever systems and a method of fabricating lever systems |
US3124018A (en) * | 1961-07-07 | 1964-03-10 | gough | |
BE682178A (en) * | 1966-06-07 | 1966-11-14 | ||
DE2220807A1 (en) * | 1971-04-30 | 1972-11-16 | Texas Instruments Inc | Semi-conductor substrates - coated with polycrystalline silicon and silicon dioxide by silane pyrolysis |
DE2410924A1 (en) * | 1973-03-09 | 1974-09-26 | Perkin Elmer Corp | DEVICE FOR THE PHOTOGRAPHIC EXPOSURE OF A SURFACE |
AT337572B (en) * | 1975-07-28 | 1977-07-11 | Philips Nv | ELECTRIC MOTOR DRIVEN DEVICE |
US4012111A (en) * | 1975-08-25 | 1977-03-15 | Honeywell Inc. | Microscope object slide positioning system |
JPS6041953B2 (en) * | 1979-03-16 | 1985-09-19 | 松下電工株式会社 | Electric reciprocating drive device |
JPS55134414A (en) * | 1979-04-06 | 1980-10-20 | Hitachi Ltd | Precise moving unit |
JPS5640852A (en) * | 1979-09-12 | 1981-04-17 | Canon Inc | Electrophotographic device |
US4595257A (en) * | 1983-05-18 | 1986-06-17 | Itp, Inc. | Support mechanism utilizing flexual pivots |
DE3374598D1 (en) * | 1983-08-09 | 1987-12-23 | Siemens Ag | Positioning and adjusting table and method of manufacture |
DE3346656C1 (en) * | 1983-12-23 | 1988-12-22 | Braun Ag, 6000 Frankfurt | Device for converting the rotary movement of an eccentric into a reciprocating movement |
US4520570A (en) * | 1983-12-30 | 1985-06-04 | International Business Machines Corporation | Piezoelectric x-y-positioner |
US4559717A (en) * | 1984-02-21 | 1985-12-24 | The United States Of America As Represented By The Secretary Of Commerce | Flexure hinge |
GB2185323B (en) * | 1984-10-12 | 1988-01-06 | Vickers Plc | Microscope having an improved stage |
-
1985
- 1985-08-30 FR FR8512944A patent/FR2586853B1/en not_active Expired
-
1986
- 1986-08-27 EP EP86810382A patent/EP0218546B1/en not_active Expired - Lifetime
- 1986-08-27 US US06/900,693 patent/US4805543A/en not_active Expired - Lifetime
- 1986-08-27 DE DE8686810382T patent/DE3679141D1/en not_active Expired - Fee Related
- 1986-08-27 AT AT86810382T patent/ATE63393T1/en active
- 1986-08-29 JP JP61201889A patent/JPH0760191B2/en not_active Expired - Lifetime
- 1986-08-29 CA CA000517241A patent/CA1285759C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2586853B1 (en) | 1988-07-29 |
US4805543A (en) | 1989-02-21 |
JPS6255590A (en) | 1987-03-11 |
EP0218546A1 (en) | 1987-04-15 |
CA1285759C (en) | 1991-07-09 |
ATE63393T1 (en) | 1991-05-15 |
JPH0760191B2 (en) | 1995-06-28 |
EP0218546B1 (en) | 1991-05-08 |
FR2586853A1 (en) | 1987-03-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8328 | Change in the person/name/address of the agent |
Free format text: SPARING, K., DIPL.-ING. ROEHL, W., DIPL.-PHYS. DR.RER.NAT. HENSELER, D., DIPL.-MIN. DR.RER.NAT., PAT.-ANWAELTE, 4000 DUESSELDORF |
|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |