JPH0259494U

JPH0259494U -

Info

Publication number: JPH0259494U
Application number: JP13801588U
Authority: JP
Priority date: 1988-10-21
Filing date: 1988-10-21
Publication date: 1990-05-01

Description

[Brief explanation of drawings]

第１図ａはこの考案の一実施例におけるＸＹ移
動装置の平面図、第１図ｂは上記ＸＹ移動装置の
側面図、第１図ｃは上記ＸＹ移動装置の正面図、
第２図は従来のＸＹ移動装置の斜視図である。２１……第１ボールねじ軸、２１ａ……第１ボ
ールナツト、２２……第１モータ、２３……第２
ボールねじ軸、２３ａ……第２ボールナツト、２
４……第２モータ、２５……第２送り部材、２６
……第１スライド軸、２７……第１スライド部材
、２８……ボールスライドユニツト、２９，３０
，３５，３６……棒、３１……第２スライド軸、
３２……第２スライド部材、３３……ＸＹテーブ
ル、３４……可動支持台、３７……第３スライド
部材、３８……第４スライド部材、３９……第３
スライド軸、４０……第４スライド軸、４１，４
２，４３，４４，４５，４６……柱、４７……第
１送り部材、４８……真空チヤンバー。 FIG. 1a is a plan view of an XY moving device according to an embodiment of the invention, FIG. 1b is a side view of the XY moving device, FIG. 1c is a front view of the XY moving device,
FIG. 2 is a perspective view of a conventional XY moving device. 21...First ball screw shaft, 21a...First ball nut, 22...First motor, 23...Second
Ball screw shaft, 23a...second ball nut, 2
4...Second motor, 25...Second sending member, 26
...First slide shaft, 27...First slide member, 28...Ball slide unit, 29, 30
, 35, 36... rod, 31... second slide shaft,
32...Second slide member, 33...XY table, 34...Movable support base, 37...Third slide member, 38...Fourth slide member, 39...Third
Slide axis, 40...Fourth slide axis, 41, 4
2, 43, 44, 45, 46...Column, 47...First feeding member, 48...Vacuum chamber.

Claims

[Claims for Utility Model Registration] A first ball nut provided in a first feed member is screwed onto a first ball screw shaft disposed in one direction and rotated by a first motor, and a first slide member having ball slide units at both ends connected to the member is provided on a first slide shaft arranged parallel to the first ball screw shaft;
A second slide member connected to the first slide member by a first connecting rod disposed in the other direction perpendicular to the one direction and having ball slide units at both ends is connected to the first ball screw shaft. A second ball nut provided on the second feed member is screwed onto a second ball screw shaft provided on the second slide shafts arranged in parallel and in the other direction, which is rotated by a second motor. The second connecting rod disposed in one direction is supported by both ends of the movable support member connected to the second feed member, and the movable support member has a third ball slide unit at both ends. A slide member and a fourth slide member having ball slide units at both ends are connected, and the third slide member is provided on a third slide shaft arranged parallel to the second ball screw shaft, while the fourth slide member is provided on a fourth slide shaft arranged parallel to the second ball screw shaft, and the first connecting rod is slidably passed through a first through hole provided in the XY table, while the second connecting rod is slidably inserted into the first through hole provided in the XY table. An XY moving device, characterized in that it is slidably passed through a second through hole provided in the XY table.