JPH0379235U - - Google Patents
Info
- Publication number
- JPH0379235U JPH0379235U JP8871490U JP8871490U JPH0379235U JP H0379235 U JPH0379235 U JP H0379235U JP 8871490 U JP8871490 U JP 8871490U JP 8871490 U JP8871490 U JP 8871490U JP H0379235 U JPH0379235 U JP H0379235U
- Authority
- JP
- Japan
- Prior art keywords
- main body
- stage main
- balancer
- threaded rod
- threadedly engaged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図及び第２図は、それぞれ本考案の実施に
使用して好適なステージ装置の実施例を説明する
ための要部斜視図、第３図は、本考案の実施に使
用する空気ばね支持装置の一例を説明するための
側断面図である。
１０……空気ばね装置、２０……ステージ装置
、２１……ステージ本体、２２，２５……送りね
じ、２３，２６……ガイドロツド、２４……バラ
ンサ。
1 and 2 are perspective views of essential parts for explaining an embodiment of a stage device suitable for use in implementing the present invention, respectively, and FIG. 3 is an air spring support used in implementing the present invention. It is a side sectional view for explaining an example of a device. DESCRIPTION OF SYMBOLS 10... Air spring device, 20... Stage device, 21... Stage main body, 22, 25... Feed screw, 23, 26... Guide rod, 24... Balancer.
Claims (1)
ステージ本体を移動させるためのねじ棒と、前記
ステージ本体と略同じ質量のバランサと、前記ね
じ棒と同期して回転するとともに前記バランサと
螺合して該バランサを前記ステージ本体と逆方向
に移動させるねじ棒とを有することを特徴とする
ステージ装置。 a stage main body, a threaded rod that is threadedly engaged with the stage main body to move the stage main body, a balancer having approximately the same mass as the stage main body, and a balancer that rotates in synchronization with the threaded rod and is threadedly engaged with the balancer. and a threaded rod for moving the balancer in a direction opposite to the stage main body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8871490U JPH0379235U (en) | 1990-08-24 | 1990-08-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8871490U JPH0379235U (en) | 1990-08-24 | 1990-08-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0379235U true JPH0379235U (en) | 1991-08-13 |
Family
ID=31638309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8871490U Pending JPH0379235U (en) | 1990-08-24 | 1990-08-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0379235U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5911781A (en) * | 1982-07-12 | 1984-01-21 | Kansai Electric Power Co Inc:The | Control device for ac/dc converter |
| JPS626555B2 (en) * | 1978-05-09 | 1987-02-12 | Burisutoru Maiyaazu Kenkyusho Kk |
-
1990
- 1990-08-24 JP JP8871490U patent/JPH0379235U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS626555B2 (en) * | 1978-05-09 | 1987-02-12 | Burisutoru Maiyaazu Kenkyusho Kk | |
| JPS5911781A (en) * | 1982-07-12 | 1984-01-21 | Kansai Electric Power Co Inc:The | Control device for ac/dc converter |