DE3668503D1 - Zyklisch betriebene elektronenstrahlanordnung. - Google Patents

Zyklisch betriebene elektronenstrahlanordnung.

Info

Publication number
DE3668503D1
DE3668503D1 DE8686306394T DE3668503T DE3668503D1 DE 3668503 D1 DE3668503 D1 DE 3668503D1 DE 8686306394 T DE8686306394 T DE 8686306394T DE 3668503 T DE3668503 T DE 3668503T DE 3668503 D1 DE3668503 D1 DE 3668503D1
Authority
DE
Germany
Prior art keywords
electron beam
beam arrangement
cyclically operated
operated electron
cyclically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8686306394T
Other languages
English (en)
Inventor
Kazuo Ookubo
Akio Ito
Yoshiro Goto
Toshihiro Ishizuka
Kazuyuki Ozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE3668503D1 publication Critical patent/DE3668503D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE8686306394T 1985-08-20 1986-08-19 Zyklisch betriebene elektronenstrahlanordnung. Expired - Fee Related DE3668503D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60182308A JPH0775155B2 (ja) 1985-08-20 1985-08-20 ストロボ電子ビーム装置

Publications (1)

Publication Number Publication Date
DE3668503D1 true DE3668503D1 (de) 1990-03-01

Family

ID=16116020

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686306394T Expired - Fee Related DE3668503D1 (de) 1985-08-20 1986-08-19 Zyklisch betriebene elektronenstrahlanordnung.

Country Status (4)

Country Link
US (1) US4755749A (de)
EP (1) EP0213871B1 (de)
JP (1) JPH0775155B2 (de)
DE (1) DE3668503D1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8702874A (nl) * 1987-12-01 1989-07-03 Philips Nv Inspectie apparaat met gedigitaliseerde elektronen detectie.
JP2973554B2 (ja) * 1991-03-19 1999-11-08 富士通株式会社 電子ビーム装置による電圧測定方法
US5210487A (en) * 1991-06-04 1993-05-11 Schlumberger Technologies Inc. Double-gated integrating scheme for electron beam tester
SE9402604L (sv) * 1994-07-29 1995-11-13 Anders Eriksson Förfarande och system vid kretskort

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4139774A (en) * 1977-02-09 1979-02-13 Hitachi, Ltd. Apparatus for irradiating a specimen by an electron beam
DE2813947C2 (de) * 1978-03-31 1986-09-04 Siemens AG, 1000 Berlin und 8000 München Verfahren zur berührungslosen Messung des Potentialverlaufs in einem elektronischen Bauelement und Anordnung zur Durchführung des Verfahrens
DE2903077C2 (de) * 1979-01-26 1986-07-17 Siemens AG, 1000 Berlin und 8000 München Verfahren zur berührungslosen Potentialmessung an einem elektronischen Bauelement und Anordnung zur Durchführung des Verfahrens
DE3036708A1 (de) * 1980-09-29 1982-05-13 Siemens AG, 1000 Berlin und 8000 München Elektronenstrahl-messgeraet zur stroboskopischen messung hochfrequenter periodischer vorgaenge
JPS58123467A (ja) 1982-01-18 1983-07-22 Fujitsu Ltd 電圧測定装置
DE3235484A1 (de) * 1982-09-24 1984-03-29 Siemens AG, 1000 Berlin und 8000 München Verfahren zur unterdrueckung einer stoerung bei der messung von signalverlaeufen mit einer korpuskularsonde und vorrichtung zur durchfuehrung eines solchen verfahrens
JPS607049A (ja) * 1983-06-24 1985-01-14 Hitachi Ltd 電位測定装置
JPS60117640A (ja) 1983-11-30 1985-06-25 Fujitsu Ltd ストロボ電子ビ−ム装置

Also Published As

Publication number Publication date
EP0213871A1 (de) 1987-03-11
JPH0775155B2 (ja) 1995-08-09
US4755749A (en) 1988-07-05
EP0213871B1 (de) 1990-01-24
JPS6255853A (ja) 1987-03-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee