DE3586208D1 - Lineare positionsnachweisvorrichtung. - Google Patents
Lineare positionsnachweisvorrichtung.Info
- Publication number
- DE3586208D1 DE3586208D1 DE8585101297T DE3586208T DE3586208D1 DE 3586208 D1 DE3586208 D1 DE 3586208D1 DE 8585101297 T DE8585101297 T DE 8585101297T DE 3586208 T DE3586208 T DE 3586208T DE 3586208 D1 DE3586208 D1 DE 3586208D1
- Authority
- DE
- Germany
- Prior art keywords
- detection device
- position detection
- linear position
- linear
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/20—Other details, e.g. assembly with regulating devices
- F15B15/28—Means for indicating the position, e.g. end of stroke
- F15B15/2815—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT
- F15B15/2861—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT using magnetic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60G—VEHICLE SUSPENSION ARRANGEMENTS
- B60G17/00—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load
- B60G17/015—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements
- B60G17/019—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements characterised by the type of sensor or the arrangement thereof
- B60G17/01933—Velocity, e.g. relative velocity-displacement sensors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/20—Other details, e.g. assembly with regulating devices
- F15B15/28—Means for indicating the position, e.g. end of stroke
- F15B15/2815—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT
- F15B15/2846—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT using detection of markings, e.g. markings on the piston rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
- G01D5/2013—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by a movable ferromagnetic element, e.g. a core
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
- G01D5/202—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by movable a non-ferromagnetic conductive element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60G—VEHICLE SUSPENSION ARRANGEMENTS
- B60G2204/00—Indexing codes related to suspensions per se or to auxiliary parts
- B60G2204/10—Mounting of suspension elements
- B60G2204/11—Mounting of sensors thereon
- B60G2204/112—Mounting of sensors thereon on dampers, e.g. fluid dampers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60G—VEHICLE SUSPENSION ARRANGEMENTS
- B60G2400/00—Indexing codes relating to detected, measured or calculated conditions or factors
- B60G2400/25—Stroke; Height; Displacement
- B60G2400/252—Stroke; Height; Displacement vertical
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60G—VEHICLE SUSPENSION ARRANGEMENTS
- B60G2401/00—Indexing codes relating to the type of sensors based on the principle of their operation
- B60G2401/17—Magnetic/Electromagnetic
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Fluid Mechanics (AREA)
- General Engineering & Computer Science (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2190284A JPS60168017A (ja) | 1984-02-10 | 1984-02-10 | 直線位置検出装置 |
JP2614184A JPS60170702A (ja) | 1984-02-16 | 1984-02-16 | 直線位置検出装置及び該装置におけるロツド部の製造方法 |
JP59257639A JPH0665961B2 (ja) | 1984-12-07 | 1984-12-07 | 流体圧シリンダのピストンロッド位置検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3586208D1 true DE3586208D1 (de) | 1992-07-23 |
DE3586208T2 DE3586208T2 (de) | 1993-01-28 |
Family
ID=27283618
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585101297T Expired - Fee Related DE3586208T2 (de) | 1984-02-10 | 1985-02-07 | Lineare positionsnachweisvorrichtung. |
DE3588131T Expired - Fee Related DE3588131T2 (de) | 1984-02-10 | 1985-02-07 | Lineare Positionsnachweisvorrichtung |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3588131T Expired - Fee Related DE3588131T2 (de) | 1984-02-10 | 1985-02-07 | Lineare Positionsnachweisvorrichtung |
Country Status (3)
Country | Link |
---|---|
US (1) | US4717874A (de) |
EP (2) | EP0446969B1 (de) |
DE (2) | DE3586208T2 (de) |
Families Citing this family (86)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3347052A1 (de) * | 1983-12-24 | 1985-07-04 | Robert Bosch Gmbh, 7000 Stuttgart | Verfahren und vorrichtung zur messempfindlichkeitserhoehung von beruehrungsfrei arbeitenden wegmesssensoren |
JP2554465B2 (ja) * | 1985-08-09 | 1996-11-13 | 株式会社 エスジー | アブソリユ−ト位置検出装置 |
EP0295609A3 (de) * | 1987-06-15 | 1991-01-09 | Kollmorgen Corporation | Gedruckte Schaltungswicklungen für abgeschirmte Induktivitätssensoren, insbesondere Sensore für die Messung der Horizontalen |
CH674896A5 (de) * | 1987-11-20 | 1990-07-31 | Vibro Meter Ag | |
JPH03134502A (ja) * | 1989-10-06 | 1991-06-07 | Robert Bosch Gmbh | 距離計測装置 |
FR2659437B1 (fr) * | 1990-03-07 | 1994-03-25 | Caoutchouc Manufacture Plastique | Moyen de reperage lineaire de longueur, de vitesse ou de positionnement pour article souple de grande longeur. |
DE4011729A1 (de) * | 1990-04-11 | 1991-10-17 | Fev Motorentech Gmbh & Co Kg | Positionsaufnehmer |
US5072179A (en) * | 1990-06-12 | 1991-12-10 | At&T Bell Laboratories | High resolution one and two dimensional position indicating apparatus with plural windings having a common connection and separately energized by signals of different phase |
US5160886A (en) * | 1991-02-14 | 1992-11-03 | Carlen Controls, Inc. | Permanent magnet resolver for producing a resolver-to-digital converter compatible output |
FR2674027A1 (fr) * | 1991-03-13 | 1992-09-18 | Alsthom Gec | Dispositif de mesure incrementale du deplacement d'une piece mobile en translation en particulier d'une bielle de commande de disjoncteur. |
DE4137881C2 (de) * | 1991-11-13 | 2000-11-02 | Brose Fahrzeugteile | Vorrichtung zum Erfassen und Verstellen der Lage eines Bauteils |
JPH0626884A (ja) * | 1992-07-07 | 1994-02-04 | San Tesuto Kk | 位置検出装置 |
GB9225971D0 (en) * | 1992-12-12 | 1993-02-10 | Penny & Giles Blackwood Ltd | Rotary transducer |
FR2705455B1 (fr) * | 1993-05-17 | 1995-07-07 | Valeo Systemes Dessuyage | Capteur de déplacement relatif par mesure de réluctance magnétique, capteur de couple utilisant un tel capteur et application à un système de direction assistée de véhicule. |
US5434504A (en) * | 1993-10-01 | 1995-07-18 | International Business Machines Corporation | Position sensors for linear motors including plural symmetrical fluxes generated by a planar drive coil and received by planar sense coils being colinear along an axis of motion |
DK135493A (da) * | 1993-12-03 | 1995-06-04 | Force Inst | Følerarrangement |
US5696444A (en) * | 1994-03-04 | 1997-12-09 | Crane Co. | Monitoring system for detecting axial and radial movement of a rotating body independent of rotational position |
US5469055A (en) * | 1994-05-04 | 1995-11-21 | Honeywell Inc. | Engine shaft with integrally formed complementary targets |
JPH07332911A (ja) * | 1994-06-03 | 1995-12-22 | Sony Corp | 軸位置検出用センサー |
US5617023A (en) * | 1995-02-02 | 1997-04-01 | Otis Elevator Company | Industrial contactless position sensor |
CH690933A5 (fr) * | 1996-01-24 | 2001-02-28 | Hans Ulrich Meyer | Capteur inductif de déplacement. |
DE29602868U1 (de) * | 1996-02-06 | 1996-05-30 | Klöckner-Moeller GmbH, 53115 Bonn | Positionsbestimmungsvorrichtung für den Anker eines Schützes |
JP3036285U (ja) * | 1996-03-16 | 1997-04-15 | 忠敏 後藤 | シリンダ位置検出装置 |
US5864295A (en) * | 1996-03-21 | 1999-01-26 | Trw Inc. | Apparatus for sensing occupant weight in an actuatable restraint system |
US6002250A (en) * | 1996-05-13 | 1999-12-14 | Mitutoyo Corporation | Electronic linear scale using a self-contained, low-power inductive position transducer |
US5973494A (en) * | 1996-05-13 | 1999-10-26 | Mitutoyo Corporation | Electronic caliper using a self-contained, low power inductive position transducer |
DE19621886C2 (de) * | 1996-05-31 | 2000-11-30 | Heidenhain Gmbh Dr Johannes | Magnetische Positionsmeßeinrichtung |
DE19622545A1 (de) * | 1996-06-05 | 1997-12-11 | Teves Gmbh Alfred | Vorrichtung zum Messen |
US6393963B1 (en) * | 1996-11-06 | 2002-05-28 | Microhydraulics Inc. | Hydraulic cylinder with position encoder |
US5955880A (en) * | 1996-12-05 | 1999-09-21 | Beam; Palmer H. | Sealless pump rotor position and bearing monitor |
US5886519A (en) * | 1997-01-29 | 1999-03-23 | Mitutoyo Corporation | Multi-scale induced current absolute position transducer |
US5947238A (en) * | 1997-03-05 | 1999-09-07 | Lord Corporation | Passive magnetorheological fluid device with excursion dependent characteristic |
JPH11142103A (ja) * | 1997-11-06 | 1999-05-28 | Isuzu Ceramics Res Inst Co Ltd | 運動体及び運動体位置検出装置 |
US5925951A (en) * | 1998-06-19 | 1999-07-20 | Sundstrand Fluid Handling Corporation | Electromagnetic shield for an electric motor |
US6087598A (en) * | 1999-02-03 | 2000-07-11 | Trw Inc. | Weight sensing apparatus for vehicle seat |
US6168387B1 (en) | 1999-10-28 | 2001-01-02 | Ingersoll-Rand Company | Reciprocating pump with linear displacement sensor |
US6280149B1 (en) | 1999-10-28 | 2001-08-28 | Ingersoll-Rand Company | Active feedback apparatus and air driven diaphragm pumps incorporating same |
FI112278B (fi) * | 2000-01-20 | 2003-11-14 | High Speed Tech Ltd Oy | Menetelmä sähkökoneen roottorin sijainnin määrittämiseksi sekä sijaintianturi |
WO2001067412A2 (en) * | 2000-03-08 | 2001-09-13 | Mts Systems Corporation | Linear and rotary magnetic sensor |
EP1217221A3 (de) * | 2000-12-20 | 2004-03-17 | Hoerbiger Hydraulik GmbH | Druckmittelzylinder |
EP1283409A1 (de) * | 2001-08-08 | 2003-02-12 | Université de Liège | Detektorvorrichtung |
DE20115060U1 (de) * | 2001-09-12 | 2002-01-31 | Trw Deutschland Gmbh | Nockenwellenloser Aktuator für Betätigung eines Hubventils |
US20040080313A1 (en) * | 2001-10-03 | 2004-04-29 | Amnon Brosh | Modular non-contacting position sensor |
DE20209369U1 (de) * | 2002-06-17 | 2002-10-31 | Trw Deutschland Gmbh | Baugruppe für einen Aktuator und die Baugruppe enthaltender nockenwellenloser Aktuator |
AU2002333765A1 (en) * | 2002-08-30 | 2004-03-19 | Fev Motorentechnik Gmbh | Sensor assembly for detecting the movement of a controlling element, which has a short overall length and which is displaced back and forth by an actuator |
DE10300504A1 (de) * | 2003-01-08 | 2004-07-22 | Trw Deutschland Gmbh | Verfahren zum Herstellen eines Aktuators, insbesondere eines Aktuators eines nockenwellenlos angetriebenen Hubventils einer Brennkraftmaschine, sowie Aktuator |
JP2006525529A (ja) | 2003-05-06 | 2006-11-09 | エスアールアイ インターナショナル | ピストンロッド位置情報をピストンロッド上の磁性層に記録するシステム及び方法 |
JP4570343B2 (ja) * | 2003-08-01 | 2010-10-27 | シナノケンシ株式会社 | 電磁式ポンプ |
AU2003276007A1 (en) * | 2003-09-30 | 2005-05-19 | Fev Motorentechnik Gmbh | Sensor array for detecting the movement of a positioning element moved back and forth using an actuator |
JP3699970B2 (ja) * | 2004-01-15 | 2005-09-28 | 株式会社帝国電機製作所 | モータの軸受摩耗検出装置 |
FR2867237B1 (fr) * | 2004-03-03 | 2008-04-18 | Johnson Contr Automotive Elect | Dispositif telescopique avec detection electromagnetique de position |
US7259553B2 (en) | 2005-04-13 | 2007-08-21 | Sri International | System and method of magnetically sensing position of a moving component |
DE102007022942A1 (de) | 2007-05-16 | 2008-11-20 | Pepperl + Fuchs Gmbh | Inkrementalweggeber und Verfahren zum Bestimmen einer Verschiebung eines ersten Objekts relativ zu einem zweiten Objekt |
US8007247B2 (en) * | 2007-05-22 | 2011-08-30 | Medtronic, Inc. | End of stroke detection for electromagnetic pump |
US9752615B2 (en) * | 2007-06-27 | 2017-09-05 | Brooks Automation, Inc. | Reduced-complexity self-bearing brushless DC motor |
WO2009003195A1 (en) * | 2007-06-27 | 2008-12-31 | Brooks Automation, Inc. | Motor stator with lift capability and reduced cogging characteristics |
US8283813B2 (en) * | 2007-06-27 | 2012-10-09 | Brooks Automation, Inc. | Robot drive with magnetic spindle bearings |
US8222892B2 (en) * | 2007-06-27 | 2012-07-17 | Brooks Automation, Inc. | Sensor for simultaneous position and gap measurement |
US8823294B2 (en) * | 2007-06-27 | 2014-09-02 | Brooks Automation, Inc. | Commutation of an electromagnetic propulsion and guidance system |
KR101660894B1 (ko) | 2007-06-27 | 2016-10-10 | 브룩스 오토메이션 인코퍼레이티드 | 다차원 위치 센서 |
WO2009003193A1 (en) | 2007-06-27 | 2008-12-31 | Brooks Automation, Inc. | Position feedback for self bearing motor |
DE102007030391A1 (de) * | 2007-06-29 | 2009-01-02 | Siemens Ag | Herstellungsverfahren für einen Stößel und derartiger Stößel |
CN100462572C (zh) * | 2007-07-10 | 2009-02-18 | 中国航空工业第一集团公司北京航空精密机械研究所 | 智能移动作动轴 |
KR101825595B1 (ko) | 2007-07-17 | 2018-02-05 | 브룩스 오토메이션 인코퍼레이티드 | 챔버 벽들에 일체화된 모터들을 갖는 기판 처리 장치 |
DE102007040058B3 (de) * | 2007-08-24 | 2009-03-26 | Knorr-Bremse Systeme für Nutzfahrzeuge GmbH | Induktive Sensoreinrichtung mit stufenförmigem Spulenkern |
DE102009021081B4 (de) * | 2008-07-18 | 2017-07-06 | Asm Automation Sensorik Messtechnik Gmbh | Magnetischer Winkelsensor |
DE102009022404A1 (de) * | 2009-05-25 | 2010-12-02 | Liebherr-Aerospace Lindenberg Gmbh | Spindeltrieb |
US8970208B2 (en) * | 2010-02-11 | 2015-03-03 | Sri International | Displacement measurement system and method using magnetic encodings |
EP2420803A1 (de) * | 2010-08-13 | 2012-02-22 | BALLUFF GmbH | Vorrichtung zum Erfassen des Verdrehwinkels einer Welle und /oder eines an der Welle auftretenden Drehmoments und Verfahren zum Betreiben der Vorrichtung |
DE102010062241A1 (de) * | 2010-12-01 | 2012-06-06 | Robert Bosch Gmbh | Verfahren und Vorrichtung zum Betreiben eines Starters eines Fahrzeugs |
RU2485439C2 (ru) * | 2011-07-26 | 2013-06-20 | Сергей Александрович Матюнин | Индуктивный датчик линейного перемещения |
US8844943B2 (en) * | 2012-12-17 | 2014-09-30 | Hyundai Motor Company | Electronic control suspension system for vehicles |
DE102013019168B4 (de) | 2013-08-02 | 2015-11-12 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Sensor zum anzeigen einer position oder einer positionsänderung eines kopplungselementes und verfahren zum betrieb des sensors |
EP2833100B8 (de) * | 2013-08-02 | 2017-08-02 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Sensor zum Anzeigen einer Position oder einer Positionsänderung eines Kopplungselementes und Verfahren zum Betrieb des Sensors |
CN103851998A (zh) * | 2013-12-23 | 2014-06-11 | 中国航空工业集团公司北京航空精密机械研究所 | 一种检测气压或液压作动轴相对位移的方法 |
FR3019890A1 (fr) * | 2014-04-14 | 2015-10-16 | Agece Ecole Centrale D Electronique | Dispositif de detection d'une position d'un piston dans un conduit et boite de vitesse a double embrayage |
US9267819B2 (en) | 2014-06-12 | 2016-02-23 | Mitutoyo Corporation | Absolute position encoder scale having plates alternating with varying recesses |
US9435663B2 (en) | 2014-08-22 | 2016-09-06 | Mitutoyo Corporation | Absolute position encoder scale having layers in a stacked configuration |
WO2017023303A1 (en) | 2015-08-05 | 2017-02-09 | Stren Microlift Technology, Llc | Hydraulic pumping system for use with a subterranean well |
US9683869B1 (en) | 2015-12-11 | 2017-06-20 | Mitutoyo Corporation | Electronic absolute position encoder |
US10344573B2 (en) * | 2016-03-08 | 2019-07-09 | Weatherford Technology Holdings, Llc | Position sensing for wellsite pumping unit |
JP6678957B2 (ja) | 2016-08-23 | 2020-04-15 | Smc株式会社 | クランプ装置 |
CN109983540A (zh) * | 2016-11-22 | 2019-07-05 | 三菱电机株式会社 | 堆芯核仪表装置 |
US11156925B2 (en) * | 2018-03-09 | 2021-10-26 | Asml Netherlands B.V. | Positioning system for a lithographic apparatus |
CN110470322A (zh) * | 2019-08-06 | 2019-11-19 | 上海交通大学 | 一种涡流式绝对编码器及其工作方法 |
CN110470323A (zh) * | 2019-08-06 | 2019-11-19 | 上海交通大学 | 一种涡流式增量编码器及其工作方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3243692A (en) * | 1966-03-29 | Travelx-responsive s sensingx d device, particularly for control of fabricating machinery | ||
US3281825A (en) * | 1963-01-25 | 1966-10-25 | United Aircraft Corp | Non-contacting encoder |
US3956973A (en) * | 1972-07-11 | 1976-05-18 | Basic Aluminum Castings Company | Die casting machine with piston positioning control |
JPS4976242A (de) * | 1972-11-24 | 1974-07-23 | ||
US4170754A (en) * | 1975-10-16 | 1979-10-09 | Westinghouse Electric Corp. | Phase encoded digital position probe assembly |
JPS5570744A (en) * | 1978-11-23 | 1980-05-28 | Nippon Soken Inc | Detector for revolution |
DE2945895C2 (de) * | 1979-11-14 | 1986-06-05 | Festo-Maschinenfabrik Gottlieb Stoll, 7300 Esslingen | Magnetischer Stellungsgeber für hydrauliche oder pneumatische Arbeitszylinder |
US4406999A (en) * | 1980-04-07 | 1983-09-27 | Clarostat Mfg. Co., Inc. | Inductive sensor |
JPS571210A (en) * | 1980-06-04 | 1982-01-06 | Noble Sangyo Kk | Differential detector |
US4612503A (en) * | 1980-10-21 | 1986-09-16 | Kabushiki Kaisha S G | Rotation speed detection device having a rotation angle detector of inductive type |
JPS57135917A (en) * | 1981-02-16 | 1982-08-21 | Nec Corp | Liquid crystal display panel |
JPS57135917U (de) * | 1981-02-20 | 1982-08-25 | ||
DE3109930A1 (de) * | 1981-03-14 | 1982-09-23 | Robert Bosch Gmbh, 7000 Stuttgart | Weggeber |
DE3149516A1 (de) * | 1981-12-14 | 1983-07-07 | Wabco Steuerungstechnik GmbH & Co, 3000 Hannover | Einrichtung zum erfassen der kolbenstellung eines zylinders |
JPS58136718A (ja) * | 1982-02-10 | 1983-08-13 | Kawasaki Steel Corp | 磁気特性の優れた無方向性電磁鋼帯の製造方法 |
DE3214794C2 (de) * | 1982-04-21 | 1984-06-07 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Magnetische Längen- oder Winkelmeßeinrichtung |
JPS59117902A (ja) * | 1982-12-23 | 1984-07-07 | S G:Kk | 流体圧シリンダの位置決め制御装置 |
DE3347052A1 (de) * | 1983-12-24 | 1985-07-04 | Robert Bosch Gmbh, 7000 Stuttgart | Verfahren und vorrichtung zur messempfindlichkeitserhoehung von beruehrungsfrei arbeitenden wegmesssensoren |
-
1985
- 1985-02-04 US US06/698,078 patent/US4717874A/en not_active Expired - Lifetime
- 1985-02-07 EP EP91108974A patent/EP0446969B1/de not_active Expired - Lifetime
- 1985-02-07 DE DE8585101297T patent/DE3586208T2/de not_active Expired - Fee Related
- 1985-02-07 EP EP85101297A patent/EP0152067B1/de not_active Expired - Lifetime
- 1985-02-07 DE DE3588131T patent/DE3588131T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0152067A2 (de) | 1985-08-21 |
EP0446969A3 (en) | 1993-03-31 |
US4717874A (en) | 1988-01-05 |
DE3588131D1 (de) | 1997-01-23 |
DE3586208T2 (de) | 1993-01-28 |
EP0446969A2 (de) | 1991-09-18 |
EP0152067A3 (en) | 1989-06-21 |
EP0152067B1 (de) | 1992-06-17 |
DE3588131T2 (de) | 1997-05-22 |
EP0446969B1 (de) | 1996-12-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3586208D1 (de) | Lineare positionsnachweisvorrichtung. | |
DE3786340D1 (de) | Lineare messgeraete. | |
DE3784716T2 (de) | Sensor für lineare stellung. | |
DE3854228T2 (de) | Positionserfassungsgerät. | |
DE69007802T2 (de) | Linearer Positionssensor. | |
KR860005211A (ko) | 위치 검출 장치 | |
DE3672080D1 (de) | Fuehler. | |
DE3777200D1 (de) | Positionsfuehler. | |
DE3681997D1 (de) | Geraet zur absoluten linearlageerkennung. | |
DE3853611T2 (de) | Positionsbestimmungssystem. | |
DE3579358D1 (de) | Lagemessanordnung. | |
DE3875113T2 (de) | Detektionseinrichtung. | |
IT8422883A0 (it) | Dispositivo di misura di forza lineare. | |
DE3687609D1 (de) | Absoluter lagedetektor. | |
NO873549D0 (no) | Lineaert foeleapparat for forskyvningsmaaler. | |
DE3669644D1 (de) | Epiliergeraet. | |
DE3684056D1 (de) | Informationsverarbeitungsgeraet. | |
KR860005213A (ko) | 위치 검출 장치 | |
DE3764833D1 (de) | Lineare verschiebungsmessvorrichtung. | |
NL188773C (nl) | Gelijkstroomplasma-afleesinrichting. | |
NO163268C (no) | Siktinnretning. | |
DE3675325D1 (de) | Kaltverfestigungsvorrichtung. | |
DE3679540D1 (de) | Schreibgeraet. | |
DE3688923D1 (de) | Informationsverarbeitungsvorrichtung. | |
DE3672759D1 (de) | Entschichtungsvorrichtung. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |