DE3584141D1 - Verfahren zum projizieren eines photoelektrischen bildes. - Google Patents

Verfahren zum projizieren eines photoelektrischen bildes.

Info

Publication number
DE3584141D1
DE3584141D1 DE8585308461T DE3584141T DE3584141D1 DE 3584141 D1 DE3584141 D1 DE 3584141D1 DE 8585308461 T DE8585308461 T DE 8585308461T DE 3584141 T DE3584141 T DE 3584141T DE 3584141 D1 DE3584141 D1 DE 3584141D1
Authority
DE
Germany
Prior art keywords
projecting
photoelectric image
photoelectric
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8585308461T
Other languages
English (en)
Inventor
Hiroshi Yasuda
Ichiro Honjo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP59243343A external-priority patent/JPS61123135A/ja
Priority claimed from JP59243342A external-priority patent/JPS61123134A/ja
Priority claimed from JP59252151A external-priority patent/JPS61129826A/ja
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE3584141D1 publication Critical patent/DE3584141D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3175—Projection methods, i.e. transfer substantially complete pattern to substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2037—Exposure with X-ray radiation or corpuscular radiation, through a mask with a pattern opaque to that radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31777—Lithography by projection
    • H01J2237/31779—Lithography by projection from patterned photocathode
DE8585308461T 1984-11-20 1985-11-20 Verfahren zum projizieren eines photoelektrischen bildes. Expired - Fee Related DE3584141D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP59243343A JPS61123135A (ja) 1984-11-20 1984-11-20 光電子像転写方法
JP59243342A JPS61123134A (ja) 1984-11-20 1984-11-20 光電子像転写方法
JP59252151A JPS61129826A (ja) 1984-11-29 1984-11-29 光電子像の転写方法

Publications (1)

Publication Number Publication Date
DE3584141D1 true DE3584141D1 (de) 1991-10-24

Family

ID=27333131

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585308461T Expired - Fee Related DE3584141D1 (de) 1984-11-20 1985-11-20 Verfahren zum projizieren eines photoelektrischen bildes.

Country Status (4)

Country Link
US (1) US4789786A (de)
EP (1) EP0182665B1 (de)
KR (1) KR910000756B1 (de)
DE (1) DE3584141D1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6347928A (ja) * 1986-08-18 1988-02-29 Fujitsu Ltd 光電子転写用マスク
JPH01158731A (ja) * 1987-12-15 1989-06-21 Fujitsu Ltd 光電子転写露光方法およびこれに用いられるマスク
EP0334334B1 (de) * 1988-03-23 1995-06-07 Fujitsu Limited Photokathoden-Bildprojektionsapparat für die Mustergestaltung auf einer Halbleitervorrichtung
US4928018A (en) * 1989-06-29 1990-05-22 Texas Instruments, Incorporated Thermo-enhanced electron image projector
US5156942A (en) * 1989-07-11 1992-10-20 Texas Instruments Incorporated Extended source E-beam mask imaging system and method
JP3689516B2 (ja) * 1997-01-29 2005-08-31 キヤノン株式会社 電子ビーム露光装置
EP0969325B1 (de) * 1998-07-01 2003-01-15 ASML Netherlands B.V. Projektionsbelichtungsgerät
KR101367499B1 (ko) * 2005-09-16 2014-02-25 마퍼 리쏘그라피 아이피 비.브이. 리소그라피 시스템 및 투영 방법
TW200715075A (en) * 2005-09-16 2007-04-16 Mapper Lithography Ip Bv Lithography system and projection method
US9673023B2 (en) * 2015-05-12 2017-06-06 Applied Materials Israel Ltd. System for discharging an area that is scanned by an electron beam
US10168614B1 (en) 2017-06-14 2019-01-01 Applied Materials Israel Ltd. On-axis illumination and alignment for charge control during charged particle beam inspection

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679497A (en) * 1969-10-24 1972-07-25 Westinghouse Electric Corp Electron beam fabrication system and process for use thereof
US3710101A (en) * 1970-10-06 1973-01-09 Westinghouse Electric Corp Apparatus and method for alignment of members to electron beams
FR2146106B1 (de) * 1971-07-16 1977-08-05 Thomson Csf
US3832560A (en) * 1973-06-13 1974-08-27 Westinghouse Electric Corp Method and apparatus for electron beam alignment with a member by detecting cathodoluminescence from oxide layers
FI760019A (de) * 1976-01-07 1977-07-08 Rauma Repola Oy
GB1557064A (en) * 1976-09-09 1979-12-05 Mullard Ltd Masks suitable for use in electron image projectors
JPS5515232A (en) * 1978-07-19 1980-02-02 Rikagaku Kenkyusho Electronic ray exposure prototype and elctronic ray exposure method
JPS57194531A (en) * 1981-05-26 1982-11-30 Toshiba Corp Electron beam transfer device
FR2507232A1 (fr) * 1981-06-09 1982-12-10 Freyssinet Int Stup Dispositif de mise en tension de barres de precontrainte et de determination de cette tension
JPS5877229A (ja) * 1981-10-31 1983-05-10 Toshiba Corp パタ−ン転写用マスクおよびその製造方法
GB2111299B (en) * 1981-11-30 1986-07-09 Thermo Electron Corp High current density photoelectron generators
US4572956A (en) * 1982-08-31 1986-02-25 Tokyo Shibaura Denki Kabushiki Kaisha Electron beam pattern transfer system having an autofocusing mechanism
GB2142158A (en) * 1983-05-25 1985-01-09 Philips Electronic Associated Electron lithography masks
JPS6066816A (ja) * 1983-09-22 1985-04-17 Fujitsu Ltd 電子ビ−ム露光装置

Also Published As

Publication number Publication date
EP0182665A3 (en) 1987-04-22
EP0182665B1 (de) 1991-09-18
US4789786A (en) 1988-12-06
KR910000756B1 (en) 1991-02-06
EP0182665A2 (de) 1986-05-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee