DE3578452D1 - Optischer sensor zum detektieren physikalischer parameter. - Google Patents
Optischer sensor zum detektieren physikalischer parameter.Info
- Publication number
- DE3578452D1 DE3578452D1 DE8585105943T DE3578452T DE3578452D1 DE 3578452 D1 DE3578452 D1 DE 3578452D1 DE 8585105943 T DE8585105943 T DE 8585105943T DE 3578452 T DE3578452 T DE 3578452T DE 3578452 D1 DE3578452 D1 DE 3578452D1
- Authority
- DE
- Germany
- Prior art keywords
- physical parameter
- light transmitted
- light
- optical sensor
- physical parameters
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title 1
- 230000001133 acceleration Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/612,060 US4678905A (en) | 1984-05-18 | 1984-05-18 | Optical sensors for detecting physical parameters utilizing vibrating piezoelectric elements |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3578452D1 true DE3578452D1 (de) | 1990-08-02 |
Family
ID=24451552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585105943T Expired - Lifetime DE3578452D1 (de) | 1984-05-18 | 1985-05-14 | Optischer sensor zum detektieren physikalischer parameter. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4678905A (de) |
EP (1) | EP0161671B1 (de) |
JP (1) | JPS6170414A (de) |
AT (1) | ATE54205T1 (de) |
CA (1) | CA1251057A (de) |
DE (1) | DE3578452D1 (de) |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4743752A (en) * | 1984-05-07 | 1988-05-10 | The Foxboro Company | Fiber optic remote sensor |
US4897541A (en) * | 1984-05-18 | 1990-01-30 | Luxtron Corporation | Sensors for detecting electromagnetic parameters utilizing resonating elements |
US4713540A (en) * | 1985-07-16 | 1987-12-15 | The Foxboro Company | Method and apparatus for sensing a measurand |
US4752141A (en) * | 1985-10-25 | 1988-06-21 | Luxtron Corporation | Fiberoptic sensing of temperature and/or other physical parameters |
GB2192456B (en) * | 1986-07-12 | 1990-07-04 | Stc Plc | Optical sensor |
DE3800410A1 (de) * | 1988-01-09 | 1989-07-20 | Conducta Mess & Regeltech | Verfahren und vorrichtung zur messwertuebertragung bei elektrochemischen sensoren |
US4845357A (en) * | 1988-02-11 | 1989-07-04 | Simmonds Precision Products, Inc. | Method of actuation and flight control |
US4857727A (en) * | 1988-05-12 | 1989-08-15 | Honeywell Inc. | Optically powered remote sensors with timing discrimination |
US5089697A (en) * | 1989-01-11 | 1992-02-18 | Prohaska Otto J | Fiber optic sensing device including pressure detection and human implantable construction |
US5138155A (en) * | 1989-02-13 | 1992-08-11 | Span Instruments, Inc. | Pressure gauge with fiber optic sensor |
US5004914A (en) * | 1990-04-20 | 1991-04-02 | Hughes Aircraft Company | Fiber-optic interferometric chemical sensor |
GB9105799D0 (en) * | 1991-03-19 | 1991-06-12 | Lucas Ind Plc | Vibrating sensor |
US5119679A (en) * | 1991-04-05 | 1992-06-09 | The Boeing Company | Optically powered and linked pressure transducer |
JPH05215764A (ja) * | 1992-01-31 | 1993-08-24 | Canon Inc | 光学式加速度計及び光学式角加速度計 |
DE19548920C2 (de) * | 1994-12-27 | 2003-05-28 | Toshiba Kawasaki Kk | Optischer Sensor und Verwendung eines solchen Sensors in einer Prozeß-Meßgeräteeinrichtung |
US5991700A (en) * | 1997-10-15 | 1999-11-23 | Sherwood Services, A.G. | EMI stability indicator for tympanic thermometer |
US6522797B1 (en) | 1998-09-01 | 2003-02-18 | Input/Output, Inc. | Seismic optical acoustic recursive sensor system |
JP2001083022A (ja) * | 1999-09-10 | 2001-03-30 | Nikon Corp | 応力測定装置及び応力測定方法 |
US6583399B1 (en) | 1999-11-22 | 2003-06-24 | California Institute Of Technology | Optical resonator microsphere sensor with altering Q-factor |
US6470752B2 (en) * | 2000-07-27 | 2002-10-29 | Fuji Photo Film Co., Ltd. | Ultrasonic detection method and apparatus and ultrasonic diagnostic apparatus |
GB2374201A (en) * | 2001-04-03 | 2002-10-09 | Khaled Karrai | Laser |
US6647030B1 (en) * | 2001-06-27 | 2003-11-11 | Nortel Networks Limited | Tuning of optical fiber components |
US6718881B2 (en) | 2001-09-07 | 2004-04-13 | Alliant Techsystems Inc. | Ordnance control and initiation system and related method |
KR20050059075A (ko) * | 2002-08-20 | 2005-06-17 | 더 리전트 오브 더 유니버시티 오브 캘리포니아 | 진동 검출기, 음 검출기, 보청기, 와우각 이식물 및 이와관련된 방법 |
US7236252B1 (en) * | 2004-08-05 | 2007-06-26 | The United States Of America As Repersented By The Secretary Of The Navy | System and apparatus for measuring displacements in electro-active materials |
US7209240B1 (en) * | 2004-08-05 | 2007-04-24 | The United States Of America As Represented By The Secretary Of The Navy | System and apparatus for measuring displacements in electro-active materials |
US7222534B2 (en) * | 2005-03-31 | 2007-05-29 | Pgs Americas, Inc. | Optical accelerometer, optical inclinometer and seismic sensor system using such accelerometer and inclinometer |
US20090100925A1 (en) * | 2006-10-27 | 2009-04-23 | Baker Hughes Incorporated | System and method for coating flexural mechanical resonators |
US8121313B2 (en) * | 2007-05-11 | 2012-02-21 | National Semiconductor Corporation | Microphone made from a polymer waveguide |
JP5148259B2 (ja) * | 2007-12-14 | 2013-02-20 | 株式会社 東北テクノアーチ | 加工装置 |
US7961313B2 (en) * | 2008-08-11 | 2011-06-14 | Ut-Battelle, Llc | Photoacoustic point spectroscopy |
US8194246B2 (en) * | 2008-08-11 | 2012-06-05 | UT-Battellle, LLC | Photoacoustic microcantilevers |
US7924423B2 (en) * | 2008-08-11 | 2011-04-12 | Ut-Battelle, Llc | Reverse photoacoustic standoff spectroscopy |
US20110231966A1 (en) * | 2010-03-17 | 2011-09-22 | Ali Passian | Scanning probe microscopy with spectroscopic molecular recognition |
US8448261B2 (en) * | 2010-03-17 | 2013-05-21 | University Of Tennessee Research Foundation | Mode synthesizing atomic force microscopy and mode-synthesizing sensing |
US8080796B1 (en) | 2010-06-30 | 2011-12-20 | Ut-Battelle, Llc | Standoff spectroscopy using a conditioned target |
RU2718672C2 (ru) * | 2015-12-03 | 2020-04-13 | Конинклейке Филипс Н.В. | Система и способ генерации энергии |
JP6733332B2 (ja) * | 2016-06-10 | 2020-07-29 | 富士通株式会社 | 水晶発振器及び水晶振動子の特性測定方法 |
JP6724577B2 (ja) | 2016-06-10 | 2020-07-15 | 富士通株式会社 | 水晶発振器及び水晶振動子の特性測定方法 |
JP6733331B2 (ja) | 2016-06-10 | 2020-07-29 | 富士通株式会社 | 水晶発振器 |
JP6680093B2 (ja) | 2016-06-10 | 2020-04-15 | 富士通株式会社 | 水晶発振器及び水晶振動子の特性測定方法 |
JP6729019B2 (ja) | 2016-06-10 | 2020-07-22 | 富士通株式会社 | 水晶発振器及び水晶発振器制御方法 |
JP6693285B2 (ja) | 2016-06-10 | 2020-05-13 | 富士通株式会社 | 水晶発振器及び水晶振動子の特性測定方法 |
CN110757250B (zh) * | 2019-11-26 | 2024-04-09 | 江苏集萃精凯高端装备技术有限公司 | 一种超高精度的定位调节装置 |
CN111735797B (zh) * | 2020-07-08 | 2023-04-07 | 安徽大学 | 一种基于超薄二维半导体材料涂敷石英音叉的气体传感器 |
Family Cites Families (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3238789A (en) * | 1961-07-14 | 1966-03-08 | Litton Systems Inc | Vibrating bar transducer |
US3249105A (en) * | 1963-04-19 | 1966-05-03 | American Optical Corp | Devices for measuring blood pressure |
US3561253A (en) * | 1969-03-26 | 1971-02-09 | Thermo Systems Inc | Apparatus and method of measurement of particulate mass |
US3580082A (en) * | 1969-11-07 | 1971-05-25 | Bendix Corp | Pressure transducer |
US3715911A (en) * | 1970-05-11 | 1973-02-13 | Susquehanna Corp | Apparatus for sensing air-borne particulate matter |
US3683213A (en) * | 1971-03-09 | 1972-08-08 | Statek Corp | Microresonator of tuning fork configuration |
US3766616A (en) * | 1972-03-22 | 1973-10-23 | Statek Corp | Microresonator packaging and tuning |
JPS49131088A (de) * | 1973-04-16 | 1974-12-16 | Suwa Seikosha Kk | |
US4111036A (en) * | 1974-07-29 | 1978-09-05 | The Board Of Regents For Education Of The State Of Rhode Island | Piezoelectric probe for detection and measurement of gaseous pollutants |
US4160600A (en) * | 1976-09-23 | 1979-07-10 | Smiths Industries Limited | Pressure-responsive apparatus |
US4193010A (en) * | 1976-12-09 | 1980-03-11 | Essex Transducers Corporation | Sensor device using piezoelectric coating subjected to bending |
SE411955B (sv) * | 1978-06-02 | 1980-02-11 | Asea Ab | Fiberoptiskt metdon med hogst tva fibrer |
SE413555B (sv) * | 1978-09-15 | 1980-06-02 | Asea Ab | Fiberoptiskt metdon |
SE414672B (sv) * | 1978-11-16 | 1980-08-11 | Asea Ab | Fiberoptiskt don for metning av fysikaliska storheter sasom kraft, tojning, tryck, acceleration och temperatur |
US4215570A (en) * | 1979-04-20 | 1980-08-05 | The United States Of America As Represented By The United States Department Of Energy | Miniature quartz resonator force transducer |
US4210029A (en) * | 1979-05-04 | 1980-07-01 | Lad Research Industries, Inc. | Differential fiber optic differential pressure sensor |
FR2460582A1 (fr) * | 1979-06-29 | 1981-01-23 | Thomson Csf | Hydrophone a fibre optique monomode fonctionnant par effet elasto-optique |
CH625372A5 (de) * | 1979-07-06 | 1981-09-15 | Ebauchesfabrik Eta Ag | |
FR2464595A1 (fr) * | 1979-08-31 | 1981-03-06 | Ebauches Sa | Procede de detection d'asymetrie de resonateurs a cristal piezoelectrique en forme de diapason et resonateurs pour sa mise en oeuvre |
US4286468A (en) * | 1979-09-04 | 1981-09-01 | The United States Of America As Represented By The Secretary Of The Navy | Frustrated total internal reflection fiber-optic small-motion sensor for hydrophone use |
DE2937484A1 (de) * | 1979-09-17 | 1981-05-14 | Siemens AG, 1000 Berlin und 8000 München | Optische vorrichtung zum messen von druckdifferenzen mittels lichtintensitaetsaenderung |
DE2937511A1 (de) * | 1979-09-17 | 1981-05-07 | Siemens AG, 1000 Berlin und 8000 München | Optische vorrichtung zum messen geringer druckdifferenzen mittels lichtintensitaetsaenderung |
FR2467487A1 (fr) * | 1979-10-15 | 1981-04-17 | Ebauches Sa | Resonateur piezoelectrique |
JPS6316169Y2 (de) * | 1979-11-22 | 1988-05-09 | ||
FR2477803A1 (fr) * | 1980-03-04 | 1981-09-11 | Suwa Seikosha Kk | Resonateur a quartz du type diapason a couplage de modes |
FR2483076A1 (fr) * | 1980-05-23 | 1981-11-27 | Quartz & Electronique | Sonde de temperature utilisant une lame de quartz |
US4368645A (en) * | 1980-09-26 | 1983-01-18 | United Technologies Corporation | Optical pressure sensor |
US4353259A (en) * | 1980-10-15 | 1982-10-12 | Calspan Corporation | Fiber optic acceleration sensor |
US4372173A (en) * | 1980-10-20 | 1983-02-08 | Quartex, Inc. | Resonator force transducer |
US4376390A (en) * | 1981-03-20 | 1983-03-15 | Sanders Associates, Inc. | Fiber optic angular accelerometer |
JPS5819527A (ja) * | 1981-07-28 | 1983-02-04 | Shimadzu Corp | 光圧力センサ |
US4439705A (en) * | 1981-12-08 | 1984-03-27 | Corbett James P | Oscillating crystal transducer systems with symmetrical temperature compensator |
US4572670A (en) * | 1982-10-25 | 1986-02-25 | Rockwell International Corporation | Interferometric piezoelectric change of state monitor |
GB8323685D0 (en) * | 1983-09-03 | 1983-10-05 | Gen Electric Co Plc | Monitoring displacement |
-
1984
- 1984-05-18 US US06/612,060 patent/US4678905A/en not_active Expired - Lifetime
-
1985
- 1985-05-14 EP EP85105943A patent/EP0161671B1/de not_active Expired - Lifetime
- 1985-05-14 DE DE8585105943T patent/DE3578452D1/de not_active Expired - Lifetime
- 1985-05-14 AT AT85105943T patent/ATE54205T1/de not_active IP Right Cessation
- 1985-05-17 CA CA000481838A patent/CA1251057A/en not_active Expired
- 1985-05-17 JP JP60104173A patent/JPS6170414A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0161671B1 (de) | 1990-06-27 |
ATE54205T1 (de) | 1990-07-15 |
US4678905A (en) | 1987-07-07 |
EP0161671A3 (en) | 1986-08-13 |
JPS6170414A (ja) | 1986-04-11 |
EP0161671A2 (de) | 1985-11-21 |
CA1251057A (en) | 1989-03-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |