DE3575810D1 - Quantitative sekundaerionen-massenspektrometrie-geraet. - Google Patents
Quantitative sekundaerionen-massenspektrometrie-geraet.Info
- Publication number
- DE3575810D1 DE3575810D1 DE8585103392T DE3575810T DE3575810D1 DE 3575810 D1 DE3575810 D1 DE 3575810D1 DE 8585103392 T DE8585103392 T DE 8585103392T DE 3575810 T DE3575810 T DE 3575810T DE 3575810 D1 DE3575810 D1 DE 3575810D1
- Authority
- DE
- Germany
- Prior art keywords
- mass spectrometry
- spectrometry device
- secondary issue
- quantitative secondary
- quantitative
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004949 mass spectrometry Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59053462A JPS60198047A (ja) | 1984-03-22 | 1984-03-22 | 二次イオン質量分析装置 |
JP59140241A JPS6119043A (ja) | 1984-07-06 | 1984-07-06 | 二次イオン質量分析装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3575810D1 true DE3575810D1 (de) | 1990-03-08 |
Family
ID=26394173
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585103392T Expired - Fee Related DE3575810D1 (de) | 1984-03-22 | 1985-03-22 | Quantitative sekundaerionen-massenspektrometrie-geraet. |
Country Status (3)
Country | Link |
---|---|
US (1) | US4766313A (de) |
EP (1) | EP0155700B1 (de) |
DE (1) | DE3575810D1 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4955204A (en) * | 1989-11-09 | 1990-09-11 | The Regents Of The University Of California | Cryostat including heater to heat a target |
US5059785A (en) * | 1990-05-30 | 1991-10-22 | The United States Of America As Represented By The United States Department Of Energy | Backscattering spectrometry device for identifying unknown elements present in a workpiece |
US5254856A (en) * | 1990-06-20 | 1993-10-19 | Hitachi, Ltd. | Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems |
US5828070A (en) * | 1996-02-16 | 1998-10-27 | Eaton Corporation | System and method for cooling workpieces processed by an ion implantation system |
US6046457A (en) * | 1998-01-09 | 2000-04-04 | International Business Machines Corporation | Charged particle beam apparatus having anticontamination means |
US7394067B1 (en) * | 2005-07-20 | 2008-07-01 | Kla-Tencor Technologies Corp. | Systems and methods for reducing alteration of a specimen during analysis for charged particle based and other measurement systems |
WO2011075110A1 (en) * | 2008-11-19 | 2011-06-23 | Brooks Automation, Inc. | Process chamber with intergrated pumping |
CH703216A1 (de) * | 2010-05-27 | 2011-11-30 | Hsr Ag | Vorrichtung zur Verhinderung des Memory-Effekts bei Kryopumpen. |
JP6182705B2 (ja) * | 2011-06-03 | 2017-08-23 | パーキンエルマー ヘルス サイエンス インコーポレイテッドPerkinelmer Health Sciences Inc. | 直接試料分析用イオン源 |
CN105474348B (zh) * | 2013-09-20 | 2018-02-23 | 株式会社日立高新技术 | 防污染阱以及真空应用装置 |
CN105103265B (zh) * | 2013-12-13 | 2017-05-10 | 中国科学院地质与地球物理研究所 | 使用二次离子质谱仪分析气体样品的系统和方法 |
FR3039899B1 (fr) * | 2015-08-03 | 2022-02-04 | Commissariat Energie Atomique | Procede et dispositif d'analyse d'un echantillon par faisceau ionique |
GB2563121B (en) * | 2017-04-11 | 2021-09-15 | Micromass Ltd | Ambient ionisation source unit |
GB2561372B (en) | 2017-04-11 | 2022-04-20 | Micromass Ltd | Method of producing ions |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2087652A5 (de) * | 1970-05-27 | 1971-12-31 | Onera (Off Nat Aerospatiale) | |
JPS5748274Y2 (de) * | 1977-07-11 | 1982-10-22 |
-
1985
- 1985-03-22 EP EP85103392A patent/EP0155700B1/de not_active Expired - Lifetime
- 1985-03-22 DE DE8585103392T patent/DE3575810D1/de not_active Expired - Fee Related
-
1987
- 1987-02-26 US US07/020,181 patent/US4766313A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0155700A3 (en) | 1987-05-13 |
EP0155700B1 (de) | 1990-01-31 |
EP0155700A2 (de) | 1985-09-25 |
US4766313A (en) | 1988-08-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |