DE68901731D1 - Massenspektrometer. - Google Patents

Massenspektrometer.

Info

Publication number
DE68901731D1
DE68901731D1 DE8989301548T DE68901731T DE68901731D1 DE 68901731 D1 DE68901731 D1 DE 68901731D1 DE 8989301548 T DE8989301548 T DE 8989301548T DE 68901731 T DE68901731 T DE 68901731T DE 68901731 D1 DE68901731 D1 DE 68901731D1
Authority
DE
Germany
Prior art keywords
mass spectrometry
spectrometry
mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8989301548T
Other languages
English (en)
Other versions
DE68901731T2 (de
Inventor
Raymond Clive Haines
Patrick James Turner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fisons Ltd
Original Assignee
VG INSTRUMENTS GROUP Ltd IPSWICH GB
VG Instruments Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VG INSTRUMENTS GROUP Ltd IPSWICH GB, VG Instruments Group Ltd filed Critical VG INSTRUMENTS GROUP Ltd IPSWICH GB
Application granted granted Critical
Publication of DE68901731D1 publication Critical patent/DE68901731D1/de
Publication of DE68901731T2 publication Critical patent/DE68901731T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
DE8989301548T 1988-02-18 1989-02-17 Massenspektrometer. Expired - Lifetime DE68901731T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB888803837A GB8803837D0 (en) 1988-02-18 1988-02-18 Mass spectrometer

Publications (2)

Publication Number Publication Date
DE68901731D1 true DE68901731D1 (de) 1992-07-16
DE68901731T2 DE68901731T2 (de) 1992-12-17

Family

ID=10631978

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989301548T Expired - Lifetime DE68901731T2 (de) 1988-02-18 1989-02-17 Massenspektrometer.

Country Status (5)

Country Link
US (1) US4943718A (de)
EP (1) EP0329461B1 (de)
JP (1) JPH01296558A (de)
DE (1) DE68901731T2 (de)
GB (1) GB8803837D0 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6072182A (en) * 1998-10-01 2000-06-06 California Institute Of Technology High-efficiency electron ionizer for a mass spectrometer array
EP1675154A3 (de) * 1999-12-13 2009-07-15 SemEquip, Inc. Ionenquelle für Ionenimplanter
WO2001043157A1 (en) * 1999-12-13 2001-06-14 Semequip, Inc. Ion implantation ion source, system and method
EP1347804A4 (de) * 2000-11-30 2009-04-22 Semequip Inc Ionenimplantationssystem und kontrollverfahren
US7960709B2 (en) * 2002-06-26 2011-06-14 Semequip, Inc. Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions
US6686595B2 (en) * 2002-06-26 2004-02-03 Semequip Inc. Electron impact ion source
US7726669B2 (en) * 2005-01-14 2010-06-01 Patricia Lynn Alexander Apparatus for a collapsible table and dolly
JP4627016B2 (ja) * 2005-07-29 2011-02-09 シャープ株式会社 質量分離装置、イオンビーム発生装置、機能素子、機能素子の製造方法およびイオンビーム発生方法
US7427751B2 (en) * 2006-02-15 2008-09-23 Varian, Inc. High sensitivity slitless ion source mass spectrometer for trace gas leak detection
US20110042564A1 (en) * 2009-08-20 2011-02-24 Yasuhide Naito Laser ablation mass analyzing apparatus
US10879030B2 (en) 2018-07-12 2020-12-29 Perkinelmer Health Sciences, Inc. Dynamic electron impact ion source

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE527952A (de) * 1953-04-10
US2945951A (en) * 1954-08-23 1960-07-19 Phillips Petroleum Co Ion source and mass spectrometer utilizing same
US3286187A (en) * 1961-10-16 1966-11-15 Minnesota Mining & Mfg Ion source utilizing a spherically converging electric field
NL298175A (de) * 1962-11-20
GB1255962A (en) * 1968-07-05 1971-12-08 Atomic Energy Authority Uk Improvements in or relating to gas chromatography-mass spectrometry
JPS5240393A (en) * 1975-09-26 1977-03-29 Hitachi Ltd Mass spectrometer
DE7639431U1 (de) * 1975-12-23 1977-06-16 Aei Scientific Apparatus Ltd., Manchester (Grossbritannien) Massenspektrometer
US4816685A (en) * 1987-10-23 1989-03-28 Lauronics, Inc. Ion volume ring

Also Published As

Publication number Publication date
EP0329461B1 (de) 1992-06-10
JPH01296558A (ja) 1989-11-29
EP0329461A3 (en) 1989-11-29
EP0329461A2 (de) 1989-08-23
DE68901731T2 (de) 1992-12-17
US4943718A (en) 1990-07-24
GB8803837D0 (en) 1988-03-16

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: FISONS PLC, IPSWICH, SUFFOLK, GB

8328 Change in the person/name/address of the agent

Free format text: WEICKMANN, H., DIPL.-ING. FINCKE, K., DIPL.-PHYS. DR. WEICKMANN, F., DIPL.-ING. HUBER, B., DIPL.-CHEM. LISKA, H., DIPL.-ING. DR.-ING. PRECHTEL, J., DIPL.-PHYS. DR.RER.NAT. BOEHM, B., DIPL.-CHEM.UNIV. DR.RER.NAT., PAT.-ANWAELTE, 8000 MUENCHEN

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee