DE3573965D1 - Semiconductor read only memory device and method of manufacturing the same - Google Patents
Semiconductor read only memory device and method of manufacturing the sameInfo
- Publication number
- DE3573965D1 DE3573965D1 DE8585116126T DE3573965T DE3573965D1 DE 3573965 D1 DE3573965 D1 DE 3573965D1 DE 8585116126 T DE8585116126 T DE 8585116126T DE 3573965 T DE3573965 T DE 3573965T DE 3573965 D1 DE3573965 D1 DE 3573965D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- same
- memory device
- semiconductor read
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76886—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances
- H01L21/76888—By rendering at least a portion of the conductor non conductive, e.g. oxidation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B20/00—Read-only memory [ROM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B20/00—Read-only memory [ROM] devices
- H10B20/27—ROM only
- H10B20/30—ROM only having the source region and the drain region on the same level, e.g. lateral transistors
- H10B20/34—Source electrode or drain electrode programmed
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Semiconductor Memories (AREA)
- Read Only Memory (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59278410A JPS61150369A (ja) | 1984-12-25 | 1984-12-25 | 読み出し専用半導体記憶装置およびその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3573965D1 true DE3573965D1 (en) | 1989-11-30 |
Family
ID=17596953
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585116126T Expired DE3573965D1 (en) | 1984-12-25 | 1985-12-18 | Semiconductor read only memory device and method of manufacturing the same |
Country Status (5)
Country | Link |
---|---|
US (1) | US4755864A (de) |
EP (1) | EP0186855B1 (de) |
JP (1) | JPS61150369A (de) |
KR (1) | KR900008940B1 (de) |
DE (1) | DE3573965D1 (de) |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0789569B2 (ja) * | 1986-03-26 | 1995-09-27 | 株式会社日立製作所 | 半導体集積回路装置及びその製造方法 |
US5293202A (en) * | 1989-02-08 | 1994-03-08 | Canon Kabushiki Kaisha | Image fixing apparatus |
US5606193A (en) * | 1994-10-03 | 1997-02-25 | Sharp Kabushiki Kaisha | DRAM and MROM cells with similar structure |
US6222216B1 (en) | 1997-10-21 | 2001-04-24 | Silicon Aquarius, Inc. | Non-volatile and memory fabricated using a dynamic memory process and method therefor |
US6433397B1 (en) * | 2000-01-21 | 2002-08-13 | International Business Machines Corporation | N-channel metal oxide semiconductor (NMOS) driver circuit and method of making same |
US6815816B1 (en) | 2000-10-25 | 2004-11-09 | Hrl Laboratories, Llc | Implanted hidden interconnections in a semiconductor device for preventing reverse engineering |
EP1202353A1 (de) | 2000-10-27 | 2002-05-02 | STMicroelectronics S.r.l. | Masken-programmiertes ROM und dessen Herstellungsverfahren |
US6740942B2 (en) | 2001-06-15 | 2004-05-25 | Hrl Laboratories, Llc. | Permanently on transistor implemented using a double polysilicon layer CMOS process with buried contact |
US6774413B2 (en) | 2001-06-15 | 2004-08-10 | Hrl Laboratories, Llc | Integrated circuit structure with programmable connector/isolator |
JP4729303B2 (ja) * | 2002-05-14 | 2011-07-20 | エイチアールエル ラボラトリーズ,エルエルシー | リバースエンジニアリングに対する防御を有する集積回路 |
AU2003263748A1 (en) * | 2002-06-21 | 2004-01-06 | Micron Technology, Inc. | Nrom memory cell, memory array, related devices and methods |
US6853587B2 (en) * | 2002-06-21 | 2005-02-08 | Micron Technology, Inc. | Vertical NROM having a storage density of 1 bit per 1F2 |
US7049667B2 (en) | 2002-09-27 | 2006-05-23 | Hrl Laboratories, Llc | Conductive channel pseudo block process and circuit to inhibit reverse engineering |
US6979606B2 (en) | 2002-11-22 | 2005-12-27 | Hrl Laboratories, Llc | Use of silicon block process step to camouflage a false transistor |
JP4846239B2 (ja) | 2002-12-13 | 2011-12-28 | エイチアールエル ラボラトリーズ,エルエルシー | ウェル注入を用いた集積回路の改変 |
JP2005024665A (ja) * | 2003-06-30 | 2005-01-27 | Ricoh Co Ltd | 粉体搬送装置、画像形成装置、トナー収容部及びプロセスカートリッジ |
US7095075B2 (en) * | 2003-07-01 | 2006-08-22 | Micron Technology, Inc. | Apparatus and method for split transistor memory having improved endurance |
US6979857B2 (en) | 2003-07-01 | 2005-12-27 | Micron Technology, Inc. | Apparatus and method for split gate NROM memory |
US6873550B2 (en) * | 2003-08-07 | 2005-03-29 | Micron Technology, Inc. | Method for programming and erasing an NROM cell |
US7085170B2 (en) | 2003-08-07 | 2006-08-01 | Micron Technology, Ind. | Method for erasing an NROM cell |
US6977412B2 (en) * | 2003-09-05 | 2005-12-20 | Micron Technology, Inc. | Trench corner effect bidirectional flash memory cell |
US6830963B1 (en) | 2003-10-09 | 2004-12-14 | Micron Technology, Inc. | Fully depleted silicon-on-insulator CMOS logic |
US7184315B2 (en) * | 2003-11-04 | 2007-02-27 | Micron Technology, Inc. | NROM flash memory with self-aligned structural charge separation |
US7202523B2 (en) * | 2003-11-17 | 2007-04-10 | Micron Technology, Inc. | NROM flash memory devices on ultrathin silicon |
US7050330B2 (en) * | 2003-12-16 | 2006-05-23 | Micron Technology, Inc. | Multi-state NROM device |
US7301804B2 (en) * | 2003-12-16 | 2007-11-27 | Micro Technology, Inc. | NROM memory cell, memory array, related devices and methods |
US7241654B2 (en) * | 2003-12-17 | 2007-07-10 | Micron Technology, Inc. | Vertical NROM NAND flash memory array |
US7157769B2 (en) * | 2003-12-18 | 2007-01-02 | Micron Technology, Inc. | Flash memory having a high-permittivity tunnel dielectric |
US6878991B1 (en) * | 2004-01-30 | 2005-04-12 | Micron Technology, Inc. | Vertical device 4F2 EEPROM memory |
US6952366B2 (en) * | 2004-02-10 | 2005-10-04 | Micron Technology, Inc. | NROM flash memory cell with integrated DRAM |
US7221018B2 (en) * | 2004-02-10 | 2007-05-22 | Micron Technology, Inc. | NROM flash memory with a high-permittivity gate dielectric |
US7075146B2 (en) * | 2004-02-24 | 2006-07-11 | Micron Technology, Inc. | 4F2 EEPROM NROM memory arrays with vertical devices |
US7072217B2 (en) * | 2004-02-24 | 2006-07-04 | Micron Technology, Inc. | Multi-state memory cell with asymmetric charge trapping |
US7102191B2 (en) * | 2004-03-24 | 2006-09-05 | Micron Technologies, Inc. | Memory device with high dielectric constant gate dielectrics and metal floating gates |
US7274068B2 (en) * | 2004-05-06 | 2007-09-25 | Micron Technology, Inc. | Ballistic direct injection NROM cell on strained silicon structures |
US7242063B1 (en) | 2004-06-29 | 2007-07-10 | Hrl Laboratories, Llc | Symmetric non-intrusive and covert technique to render a transistor permanently non-operable |
US8168487B2 (en) | 2006-09-28 | 2012-05-01 | Hrl Laboratories, Llc | Programmable connection and isolation of active regions in an integrated circuit using ambiguous features to confuse a reverse engineer |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4277881A (en) * | 1978-05-26 | 1981-07-14 | Rockwell International Corporation | Process for fabrication of high density VLSI circuits, having self-aligned gates and contacts for FET devices and conducting lines |
JPS5626470A (en) * | 1979-08-13 | 1981-03-14 | Hitachi Ltd | Field-effect transistor manufacturing process |
US4305200A (en) * | 1979-11-06 | 1981-12-15 | Hewlett-Packard Company | Method of forming self-registering source, drain, and gate contacts for FET transistor structures |
US4287661A (en) * | 1980-03-26 | 1981-09-08 | International Business Machines Corporation | Method for making an improved polysilicon conductor structure utilizing reactive-ion etching and thermal oxidation |
JPS56157056A (en) * | 1980-05-09 | 1981-12-04 | Fujitsu Ltd | Manufacture of read-only memory |
JPS5737857A (en) * | 1980-08-20 | 1982-03-02 | Fujitsu Ltd | Manufacture of semiconductor device |
EP0054102A3 (de) * | 1980-12-11 | 1983-07-27 | Rockwell International Corporation | ROM-Zellen in sehr dichter Anordnung und Herstellungsverfahren |
JPS59201461A (ja) * | 1983-04-28 | 1984-11-15 | Toshiba Corp | 読み出し専用半導体記憶装置およびその製造方法 |
-
1984
- 1984-12-25 JP JP59278410A patent/JPS61150369A/ja active Pending
-
1985
- 1985-12-09 KR KR1019850009241A patent/KR900008940B1/ko not_active IP Right Cessation
- 1985-12-18 EP EP85116126A patent/EP0186855B1/de not_active Expired
- 1985-12-18 DE DE8585116126T patent/DE3573965D1/de not_active Expired
-
1987
- 1987-09-14 US US07/096,775 patent/US4755864A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS61150369A (ja) | 1986-07-09 |
EP0186855A2 (de) | 1986-07-09 |
EP0186855B1 (de) | 1989-10-25 |
KR860005374A (ko) | 1986-07-21 |
KR900008940B1 (ko) | 1990-12-13 |
US4755864A (en) | 1988-07-05 |
EP0186855A3 (en) | 1986-10-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |