DE3573899D1 - Carrying device - Google Patents

Carrying device

Info

Publication number
DE3573899D1
DE3573899D1 DE8585105298T DE3573899T DE3573899D1 DE 3573899 D1 DE3573899 D1 DE 3573899D1 DE 8585105298 T DE8585105298 T DE 8585105298T DE 3573899 T DE3573899 T DE 3573899T DE 3573899 D1 DE3573899 D1 DE 3573899D1
Authority
DE
Germany
Prior art keywords
carrying device
carrying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8585105298T
Other languages
English (en)
Inventor
Hidetaka C O K K Tokuda Sei Jo
Munenori C O K K Tokuda Iwami
Noboru C O K K Tokuda Kuriyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KABUSHIKI KAISHA SHIBAURA SEISAKUSHO, TOKIO/TOKYO,
Original Assignee
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6447284U external-priority patent/JPS60176548U/ja
Priority claimed from JP9077684U external-priority patent/JPS619231U/ja
Priority claimed from JP18062284U external-priority patent/JPS6194558U/ja
Application filed by Tokuda Seisakusho Co Ltd filed Critical Tokuda Seisakusho Co Ltd
Application granted granted Critical
Publication of DE3573899D1 publication Critical patent/DE3573899D1/de
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/02—Heads
    • F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
    • F16M11/043—Allowing translations
    • F16M11/045—Allowing translations adapted to left-right translation movement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/02—Heads
    • F16M11/18—Heads with mechanism for moving the apparatus relatively to the stand
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/20—Undercarriages with or without wheels
    • F16M11/2007—Undercarriages with or without wheels comprising means allowing pivoting adjustment
    • F16M11/2014—Undercarriages with or without wheels comprising means allowing pivoting adjustment around a vertical axis
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M2200/00—Details of stands or supports
    • F16M2200/06—Arms
    • F16M2200/061—Scissors arms

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
DE8585105298T 1984-05-02 1985-05-01 Carrying device Expired DE3573899D1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP6447284U JPS60176548U (ja) 1984-05-02 1984-05-02 搬送装置
JP9077684U JPS619231U (ja) 1984-06-20 1984-06-20 搬送装置
JP18062284U JPS6194558U (de) 1984-11-28 1984-11-28

Publications (1)

Publication Number Publication Date
DE3573899D1 true DE3573899D1 (en) 1989-11-30

Family

ID=27298488

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585105298T Expired DE3573899D1 (en) 1984-05-02 1985-05-01 Carrying device

Country Status (2)

Country Link
EP (1) EP0160305B1 (de)
DE (1) DE3573899D1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4836733A (en) * 1986-04-28 1989-06-06 Varian Associates, Inc. Wafer transfer system
US5227708A (en) * 1989-10-20 1993-07-13 Applied Materials, Inc. Two-axis magnetically coupled robot
US5447409A (en) * 1989-10-20 1995-09-05 Applied Materials, Inc. Robot assembly
EP0858867A3 (de) * 1989-10-20 1999-03-17 Applied Materials, Inc. Robotereinrichtung
DE4017600C2 (de) * 1990-05-31 1998-07-02 Siemens Ag Handhabungsgerät für Arbeiten im Stutzenbereich eines Behälters des Primärkreises in einem Kernkraftwerk, insbesondere für zerstörungsfreie Prüfungen
JPH0773833B2 (ja) * 1992-04-23 1995-08-09 アプライド マテリアルズ インコーポレイテッド ロボット・アセンブリ
US5376862A (en) * 1993-01-28 1994-12-27 Applied Materials, Inc. Dual coaxial magnetic couplers for vacuum chamber robot assembly
US6102164A (en) * 1996-02-28 2000-08-15 Applied Materials, Inc. Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
FR2902028B1 (fr) * 2006-06-07 2008-11-14 Jean Hourdebaigt Buse d'ejection de l'eau d'un robot de lavage industriel a orientation programmee
PL381736A1 (pl) * 2007-02-12 2008-08-18 Bober Wiesław Wysięgnik dwuramienny do mocowania ekranu wyświetlającego, zwłaszcza płaskiego ekranu telewizyjnego

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH617559GA3 (de) * 1977-12-29 1980-06-13
EP0024433B1 (de) * 1979-02-22 1983-07-27 Kobe Steel Limited Arm mit gravitationswaagenfunktion
IT1155273B (it) * 1982-02-05 1987-01-28 Bisiach & Carru Robot industriale a piu assi di movimento con testa a fuoco fisso
DD209588A1 (de) * 1982-08-23 1984-05-16 Robotron Rationalisierung Vorrichtung eines flachen gelenkmanipulators als einlegegeraet
GB2145691B (en) * 1983-08-29 1987-06-03 Toshiba Kk Extendible and contractable arms

Also Published As

Publication number Publication date
EP0160305A2 (de) 1985-11-06
EP0160305A3 (en) 1986-08-27
EP0160305B1 (de) 1989-10-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: KABUSHIKI KAISHA SHIBAURA SEISAKUSHO, TOKIO/TOKYO,