DE3568154D1 - Process for the manufacture of ultrapure silicon rods - Google Patents

Process for the manufacture of ultrapure silicon rods

Info

Publication number
DE3568154D1
DE3568154D1 DE8585402054T DE3568154T DE3568154D1 DE 3568154 D1 DE3568154 D1 DE 3568154D1 DE 8585402054 T DE8585402054 T DE 8585402054T DE 3568154 T DE3568154 T DE 3568154T DE 3568154 D1 DE3568154 D1 DE 3568154D1
Authority
DE
Germany
Prior art keywords
manufacture
silicon rods
feedstream
monosilane
ultrapure silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8585402054T
Other languages
English (en)
Inventor
Serge Jacubert
Bernard Boudot
Philippe Nataf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rhodia Chimie SAS
Original Assignee
Rhone Poulenc Chimie SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9309116&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3568154(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Rhone Poulenc Chimie SA filed Critical Rhone Poulenc Chimie SA
Application granted granted Critical
Publication of DE3568154D1 publication Critical patent/DE3568154D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/24—Alloying of impurity materials, e.g. doping materials, electrode materials, with a semiconductor body
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
DE8585402054T 1984-10-30 1985-10-23 Process for the manufacture of ultrapure silicon rods Expired DE3568154D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8416544A FR2572312B1 (fr) 1984-10-30 1984-10-30 Procede de fabrication de barreaux de silicium ultra-pur

Publications (1)

Publication Number Publication Date
DE3568154D1 true DE3568154D1 (en) 1989-03-16

Family

ID=9309116

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585402054T Expired DE3568154D1 (en) 1984-10-30 1985-10-23 Process for the manufacture of ultrapure silicon rods

Country Status (8)

Country Link
US (2) US4734297A (de)
EP (1) EP0181803B1 (de)
JP (1) JPS61127617A (de)
KR (1) KR860003648A (de)
AT (1) ATE40668T1 (de)
CA (1) CA1282225C (de)
DE (1) DE3568154D1 (de)
FR (1) FR2572312B1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4826668A (en) * 1987-06-11 1989-05-02 Union Carbide Corporation Process for the production of ultra high purity polycrystalline silicon
US4805556A (en) * 1988-01-15 1989-02-21 Union Carbide Corporation Reactor system and method for forming uniformly large-diameter polycrystalline rods by the pyrolysis of silane
US5382419A (en) * 1992-09-28 1995-01-17 Advanced Silicon Materials, Inc. Production of high-purity polycrystalline silicon rod for semiconductor applications
US5478396A (en) * 1992-09-28 1995-12-26 Advanced Silicon Materials, Inc. Production of high-purity polycrystalline silicon rod for semiconductor applications
US5976481A (en) * 1996-05-21 1999-11-02 Tokuyama Corporation Polycrystal silicon rod and production process therefor
DE19882883B4 (de) 1997-12-15 2009-02-26 Advanced Silicon Materials LLC, (n.d.Ges.d.Staates Delaware), Moses Lake System für die chemische Abscheidung aus der Gasphase zum Herstellen polykristalliner Siliziumstangen
US6544333B2 (en) * 1997-12-15 2003-04-08 Advanced Silicon Materials Llc Chemical vapor deposition system for polycrystalline silicon rod production
US20090238972A1 (en) * 2008-03-24 2009-09-24 Applied Materials, Inc. Methods and apparatus for using reduced purity silane to deposit silicon
DE102008017304A1 (de) 2008-03-31 2009-10-01 Schmid Silicon Technology Gmbh Verfahren und Anlage zur Herstellung von Reinstsilizium
DE102008059408A1 (de) 2008-11-27 2010-06-02 Schmid Silicon Technology Gmbh Verfahren und Vorrichtungen zur Herstellung von Reinstsilizium
DE102010011853A1 (de) 2010-03-09 2011-09-15 Schmid Silicon Technology Gmbh Verfahren zur Herstellung von hochreinem Silizium
DE102015209008A1 (de) * 2015-05-15 2016-11-17 Schmid Silicon Technology Gmbh Verfahren und Anlage zur Zersetzung von Monosilan
JP2018065710A (ja) * 2016-10-18 2018-04-26 信越化学工業株式会社 多結晶シリコン塊、多結晶シリコン棒、および単結晶シリコンの製造方法
JP2020125242A (ja) * 2020-06-01 2020-08-20 信越化学工業株式会社 多結晶シリコン塊、多結晶シリコン棒、および単結晶シリコンの製造方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1256290A (fr) * 1959-05-04 1961-03-17 Procédé et appareil pour la fabrication de silicium très pur
NL251143A (de) * 1959-05-04
US3091517A (en) * 1959-11-25 1963-05-28 Texas Instruments Inc Method for recovery and recycling hydrogen and silicon halides from silicon deposition reactor exhaust
US3168422A (en) * 1960-05-09 1965-02-02 Merck & Co Inc Process of flushing unwanted residue from a vapor deposition system in which silicon is being deposited
NL292610A (de) * 1962-05-11 1900-01-01
NL296610A (de) * 1963-08-09
JPS5236490B2 (de) * 1972-11-27 1977-09-16
US3900597A (en) * 1973-12-19 1975-08-19 Motorola Inc System and process for deposition of polycrystalline silicon with silane in vacuum
US4207360A (en) * 1975-10-31 1980-06-10 Texas Instruments Incorporated Silicon seed production process
US4070444A (en) * 1976-07-21 1978-01-24 Motorola Inc. Low cost, high volume silicon purification process
DE2636348A1 (de) * 1976-08-12 1978-02-16 Wacker Chemitronic Verfahren zur herstellung von reinem, elementarem halbleitermaterial
JPS53106626A (en) * 1977-03-02 1978-09-16 Komatsu Mfg Co Ltd Method of making high purity rod silicon and appratus therefor
JPS53108029A (en) * 1977-03-03 1978-09-20 Komatsu Mfg Co Ltd Method of making high purity silicon having uniform shape
US4173944A (en) * 1977-05-20 1979-11-13 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Silverplated vapor deposition chamber
US4179530A (en) * 1977-05-20 1979-12-18 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Process for the deposition of pure semiconductor material
DE2912661C2 (de) * 1979-03-30 1982-06-24 Wacker-Chemitronic Gesellschaft Fuer Elektronik-Grundstoffe Mbh, 8263 Burghausen Verfahren zur Abscheidung von reinem Halbleitermaterial und Düse zur Durchführung des Verfahrens
JPS5645850A (en) * 1979-09-18 1981-04-25 Eiichi Akatsu Manufacture of flint glass having desired refractive index
US4546009A (en) * 1979-10-01 1985-10-08 Exxon Research Engineering Co High-mobility amorphous silicon displaying non-dispersive transport properties
US4341749A (en) * 1981-08-14 1982-07-27 Union Carbide Corporation Heating method for silane pyrolysis reactor
US4468283A (en) * 1982-12-17 1984-08-28 Irfan Ahmed Method for etching and controlled chemical vapor deposition
US4597989A (en) * 1984-07-30 1986-07-01 Burroughs Corporation Method of depositing silicon films with reduced structural defects

Also Published As

Publication number Publication date
KR860003648A (ko) 1986-05-28
FR2572312B1 (fr) 1989-01-20
US4831964A (en) 1989-05-23
JPS643803B2 (de) 1989-01-23
JPS61127617A (ja) 1986-06-14
EP0181803B1 (de) 1989-02-08
EP0181803A1 (de) 1986-05-21
CA1282225C (fr) 1991-04-02
FR2572312A1 (fr) 1986-05-02
US4734297A (en) 1988-03-29
ATE40668T1 (de) 1989-02-15

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8339 Ceased/non-payment of the annual fee