DE3539402C2 - - Google Patents

Info

Publication number
DE3539402C2
DE3539402C2 DE3539402A DE3539402A DE3539402C2 DE 3539402 C2 DE3539402 C2 DE 3539402C2 DE 3539402 A DE3539402 A DE 3539402A DE 3539402 A DE3539402 A DE 3539402A DE 3539402 C2 DE3539402 C2 DE 3539402C2
Authority
DE
Germany
Prior art keywords
silicon
web
heat
carrier
thermocouple
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3539402A
Other languages
German (de)
English (en)
Other versions
DE3539402A1 (de
Inventor
Hans Dipl.-Phys. Dr. 8012 Ottobrunn De Delfs
Tilmann Dipl.-Ing. 8038 Groebenzell De Betz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohde and Schwarz GmbH and Co KG
Original Assignee
Rohde and Schwarz GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohde and Schwarz GmbH and Co KG filed Critical Rohde and Schwarz GmbH and Co KG
Priority to DE19853539402 priority Critical patent/DE3539402A1/de
Priority to DE8686115466T priority patent/DE3660272D1/de
Priority to EP86115466A priority patent/EP0223163B1/de
Publication of DE3539402A1 publication Critical patent/DE3539402A1/de
Priority to US06/159,520 priority patent/US4789823A/en
Application granted granted Critical
Publication of DE3539402C2 publication Critical patent/DE3539402C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R21/00—Arrangements for measuring electric power or power factor
    • G01R21/02—Arrangements for measuring electric power or power factor by thermal methods, e.g. calorimetric
    • G01R21/04—Arrangements for measuring electric power or power factor by thermal methods, e.g. calorimetric in circuits having distributed constants

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
DE19853539402 1985-11-07 1985-11-07 Leistungsmesssensor zum messen von hochfrequenzleistung Granted DE3539402A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE19853539402 DE3539402A1 (de) 1985-11-07 1985-11-07 Leistungsmesssensor zum messen von hochfrequenzleistung
DE8686115466T DE3660272D1 (en) 1985-11-07 1986-11-07 Power measuring sensor for measuring high-frequency power
EP86115466A EP0223163B1 (de) 1985-11-07 1986-11-07 Leistungsmesssensor zum Messen von Hochfrequenzleistung
US06/159,520 US4789823A (en) 1985-11-07 1988-02-19 Power sensor for RF power measurements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19853539402 DE3539402A1 (de) 1985-11-07 1985-11-07 Leistungsmesssensor zum messen von hochfrequenzleistung

Publications (2)

Publication Number Publication Date
DE3539402A1 DE3539402A1 (de) 1987-05-21
DE3539402C2 true DE3539402C2 (zh-CN) 1988-06-16

Family

ID=6285319

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19853539402 Granted DE3539402A1 (de) 1985-11-07 1985-11-07 Leistungsmesssensor zum messen von hochfrequenzleistung
DE8686115466T Expired DE3660272D1 (en) 1985-11-07 1986-11-07 Power measuring sensor for measuring high-frequency power

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE8686115466T Expired DE3660272D1 (en) 1985-11-07 1986-11-07 Power measuring sensor for measuring high-frequency power

Country Status (3)

Country Link
US (1) US4789823A (zh-CN)
EP (1) EP0223163B1 (zh-CN)
DE (2) DE3539402A1 (zh-CN)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19527226A1 (de) * 1995-07-26 1997-01-30 Applied Precision S R O Thermoelektrischer Meßkonverter

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4943764A (en) * 1987-12-11 1990-07-24 Hewlett-Packard Company Wide dynamic range radio-frequency power sensor
US5370458A (en) * 1990-10-09 1994-12-06 Lockheed Sanders, Inc. Monolithic microwave power sensor
US5302024A (en) * 1990-10-09 1994-04-12 Lockheed Sanders, Inc. Monolithic microwave power sensor using a heat sensing diode junction
US5550526A (en) * 1994-12-27 1996-08-27 Lucent Technologies Inc. Thermal detection elements with heater
GB9522998D0 (en) * 1995-11-09 1996-01-10 Smiths Industries Ltd Current sensors
US6361207B1 (en) * 1999-06-04 2002-03-26 Florida Rf Labs, Inc. Temperature sensing termination
US6397160B1 (en) 1999-06-04 2002-05-28 Teradyne, Inc. Power sensor module for microwave test systems
FR2800470B1 (fr) * 1999-10-28 2002-01-11 Centre Nat Rech Scient Capteur d'ondes electromagnetiques.
US6759839B2 (en) * 2000-01-11 2004-07-06 Anritsu Corporation Wide-band RF signal power detecting element and power detecting device using the same
GB2374942B (en) * 2001-04-26 2004-07-28 Marconi Caswell Ltd Electrical power sensing
US6639395B2 (en) * 2001-12-21 2003-10-28 Texas Instruments Incorporated Current sensor with input/output isolation
KR100465235B1 (ko) * 2002-04-16 2005-01-13 삼성전자주식회사 정전용량에 의해 ｒｆ 신호에 대한 전력을 측정하는 ｒｆ파워센서
KR100440764B1 (ko) * 2002-09-03 2004-07-21 전자부품연구원 마이크로파 전력센서 및 그의 제조방법
US7372249B2 (en) * 2006-01-31 2008-05-13 Agilent Technologies, Inc. Load measurement for a thermal microwave power sensor

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1090613A (en) * 1963-10-21 1967-11-08 Marconi Instruments Ltd Improvements in or relating to electrical power meters
US3881181A (en) * 1973-02-22 1975-04-29 Rca Corp Semiconductor temperature sensor
US3801949A (en) * 1973-03-08 1974-04-02 Rca Corp Thermal detector and method of making the same
DE2432544C3 (de) * 1974-07-04 1978-11-23 Siemens Ag, 1000 Berlin Und 8000 Muenchen Als Halbleiterschaltung ausgebildetes Bauelement mit einem dielektrischen Träger sowie Verfahren zu seiner Herstellung
US3986196A (en) * 1975-06-30 1976-10-12 Varian Associates Through-substrate source contact for microwave FET
SU716006A1 (ru) * 1976-03-09 1980-02-15 Предприятие П/Я Г-4126 Многоэлементный бесконтактный термопреобразователь
FR2351503A1 (fr) * 1976-05-11 1977-12-09 Thomson Csf Procede de realisation d'un circuit pour ondes millimetriques comportant une diode semi-conductrice et un autre composant semi-conducteur, et dispositifs realises par ledit procede
US4044371A (en) * 1976-09-29 1977-08-23 Honeywell Inc. Plurality of precise temperature resistors formed in monolithic integrated circuits
US4229753A (en) * 1977-08-18 1980-10-21 International Business Machines Corporation Voltage compensation of temperature coefficient of resistance in an integrated circuit resistor
DD219296A1 (de) * 1983-10-28 1985-02-27 Robotron Elektronik Mikrowellenleistungsmesser

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19527226A1 (de) * 1995-07-26 1997-01-30 Applied Precision S R O Thermoelektrischer Meßkonverter

Also Published As

Publication number Publication date
EP0223163A1 (de) 1987-05-27
DE3539402A1 (de) 1987-05-21
DE3660272D1 (en) 1988-07-07
US4789823A (en) 1988-12-06
EP0223163B1 (de) 1988-06-01

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee