DE3538455C2 - Mit elektrostatischer kapazitaet arbeitender encoder - Google Patents

Mit elektrostatischer kapazitaet arbeitender encoder

Info

Publication number
DE3538455C2
DE3538455C2 DE3538455A DE3538455A DE3538455C2 DE 3538455 C2 DE3538455 C2 DE 3538455C2 DE 3538455 A DE3538455 A DE 3538455A DE 3538455 A DE3538455 A DE 3538455A DE 3538455 C2 DE3538455 C2 DE 3538455C2
Authority
DE
Germany
Prior art keywords
electrodes
electrode
disk
receiving
transmitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3538455A
Other languages
German (de)
English (en)
Other versions
DE3538455A1 (de
Inventor
Kouji Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Manufacturing Co Ltd
Original Assignee
Mitutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Manufacturing Co Ltd filed Critical Mitutoyo Manufacturing Co Ltd
Publication of DE3538455A1 publication Critical patent/DE3538455A1/de
Application granted granted Critical
Publication of DE3538455C2 publication Critical patent/DE3538455C2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/243—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the phase or frequency of AC

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE3538455A 1984-10-29 1985-10-29 Mit elektrostatischer kapazitaet arbeitender encoder Expired - Fee Related DE3538455C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59228785A JPS61105421A (ja) 1984-10-29 1984-10-29 静電容量型エンコ−ダ

Publications (2)

Publication Number Publication Date
DE3538455A1 DE3538455A1 (de) 1986-04-30
DE3538455C2 true DE3538455C2 (de) 1993-11-04

Family

ID=16881806

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3538455A Expired - Fee Related DE3538455C2 (de) 1984-10-29 1985-10-29 Mit elektrostatischer kapazitaet arbeitender encoder

Country Status (5)

Country Link
US (1) US4788546A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS61105421A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN (1) CN1008000B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3538455C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB2166554B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2176013B (en) * 1985-05-23 1989-07-19 Mitutoyo Mfg Co Ltd Variable capacitance type encoder
CH666122A5 (fr) * 1986-04-10 1988-06-30 Hans Ulrich Meyer Capteur capacitif de position.
DE3832929C1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-09-28 1989-08-24 Voest-Alpine Automotive Ges.M.B.H., Linz, At
US5028875A (en) * 1989-04-27 1991-07-02 Texas Tech University Linear rotary differential capacitance transducer
JPH0789066B2 (ja) * 1989-08-11 1995-09-27 株式会社ミツトヨ 静電容量型変位検出器
DE4124160C2 (de) * 1991-07-20 1994-07-28 Diehl Gmbh & Co Kapazitiver Drehwinkelgeber
AT398245B (de) * 1991-12-30 1994-10-25 Brasseur Georg Dr Techn Kapazitiver drehwinkelsensor
US5681990A (en) * 1995-12-07 1997-10-28 Ford Motor Company Capacitive throttle position sensor
US5736865A (en) * 1996-09-16 1998-04-07 Delco Electronics Corporation Capacitive rotary position encoder
US6351656B1 (en) * 1997-09-05 2002-02-26 Motorola, Inc. Method and apparatus for displaying a message which has been received
US6492911B1 (en) 1999-04-19 2002-12-10 Netzer Motion Sensors Ltd. Capacitive displacement encoder
IL138983A0 (en) * 2000-10-12 2001-11-25 Netzer Prec Motion Sensors Ltd Capacitive displacement encoder
JP4088073B2 (ja) * 2002-01-11 2008-05-21 株式会社ミツトヨ 絶対位置測定装置
US6892590B1 (en) * 2003-11-04 2005-05-17 Andermotion Technologies Llc Single-balanced shield electrode configuration for use in capacitive displacement sensing systems and methods
DE102004006672B3 (de) * 2004-02-11 2005-08-18 Carl Mahr Holding Gmbh Feinmessgerät zur Abstandsvermessung
US7259695B2 (en) * 2004-09-17 2007-08-21 Andermotion Technologies Llc Low-profile multi-turn encoder systems and methods
US20060176189A1 (en) * 2005-02-06 2006-08-10 David Bar-On Two Dimensional Layout, High Noise Immunity, Interleaved Channels Electrostatic Encoder
JP5022724B2 (ja) * 2006-03-07 2012-09-12 株式会社ミツトヨ 絶対位置測定装置
JP4825697B2 (ja) * 2007-01-25 2011-11-30 株式会社ミツトヨ デジタル式変位測定器
CN100547354C (zh) * 2007-11-26 2009-10-07 桂林市晶瑞传感技术有限公司 用于绝对位置测量的绝对型圆容栅传感器测量装置
DE102009043977A1 (de) 2008-12-12 2010-06-17 Fanuc Ltd. Kapazitiver Codierer
US20100148802A1 (en) 2008-12-15 2010-06-17 Fanuc Ltd Capacitance-type encoder
JP2010210351A (ja) * 2009-03-09 2010-09-24 Fanuc Ltd 励振位相検出方式静電容量型位置検出器
DE102010028718A1 (de) 2010-05-07 2011-11-10 Robert Bosch Gmbh Erfassung eines dielektrischen Objekts
WO2012001696A1 (en) * 2010-06-28 2012-01-05 Kamalabai Russeel Rajeev Electrons enhancement circuit
CN103822571B (zh) * 2014-03-19 2016-11-02 重庆理工大学 基于单排多层结构的电场式时栅直线位移传感器
CN103968750B (zh) * 2014-05-09 2017-01-18 重庆理工大学 一种电场式时栅角位移传感器
WO2016152732A1 (ja) * 2015-03-20 2016-09-29 アルプス電気株式会社 回転式入力装置
JP6417251B2 (ja) * 2015-03-20 2018-11-07 アルプス電気株式会社 回転式入力装置
CN106931873A (zh) * 2015-12-29 2017-07-07 河北长孚电气设备有限公司 容栅数显直读分度圆盘

Family Cites Families (19)

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Publication number Priority date Publication date Assignee Title
US3303701A (en) * 1962-05-08 1967-02-14 Hitachi Ltd Non-contact temperature measurement system
US3543259A (en) * 1968-01-04 1970-11-24 Bell Telephone Labor Inc Capacitive pick-up system for remote utility meter reading
FR2086854A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1970-04-10 1971-12-31 Commissariat Energie Atomique
US3668672A (en) * 1970-11-13 1972-06-06 Bausch & Lomb Capacitive transducer
US3961318A (en) * 1975-01-17 1976-06-01 Inductosyn Corporation Electrostatic position-measuring transducer
SE406642B (sv) * 1977-02-16 1979-02-19 Aga Ab Elektromekanisk legesgivare
SE411392B (sv) * 1977-12-09 1979-12-17 Inst Mikrovagsteknik Vid Tekni Metanordning for kapacitiv bestemning av det inbordes leget hos tva relativt varandra rorliga delar
GB2022267B (en) * 1978-05-31 1982-08-11 Automatic Systems Lab Ltd Rotary displacement capacitive transducers
US4238781A (en) * 1979-02-09 1980-12-09 Westinghouse Electric Corp. Capacitive angular displacement transducer for remote meter reading
FR2454083A1 (fr) * 1979-04-09 1980-11-07 Facom Dispositif de mesure de la position relative de deux objets
GB2054860A (en) * 1979-07-25 1981-02-18 Probe Eng Co Ltd Improvements relating to rotary speed transducers
US4300093A (en) * 1979-12-03 1981-11-10 Ogasawara Hiromi Device for measuring the amount of rotation of a rotating object
US4294321A (en) * 1980-02-27 1981-10-13 Rca Corporation Position sensing and display means
JPS5759101A (en) * 1980-09-26 1982-04-09 Hiromi Ogasawara Noncontacting infinitesimal displacement gauge
US4471450A (en) * 1982-02-01 1984-09-11 Schlumberger Canada Limited Register position sensing and controlling apparatus
JPS5995422A (ja) * 1982-11-22 1984-06-01 Tokyo Keiso Kk 回転変位検出装置
GB2133889A (en) * 1983-01-19 1984-08-01 Lucas Ind Plc Capacitance displacement transducers
GB2133890A (en) * 1983-01-19 1984-08-01 Lucas Ind Plc Displacement transducer
JPS59183329A (ja) * 1983-04-01 1984-10-18 Mitsutoyo Mfg Co Ltd デジタル表示測定装置

Also Published As

Publication number Publication date
GB2166554A (en) 1986-05-08
US4788546A (en) 1988-11-29
GB8526655D0 (en) 1985-12-04
JPH0477846B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-12-09
DE3538455A1 (de) 1986-04-30
CN1008000B (zh) 1990-05-16
JPS61105421A (ja) 1986-05-23
GB2166554B (en) 1988-04-07
CN85108657A (zh) 1986-06-10

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee