DE3534793C2 - - Google Patents

Info

Publication number
DE3534793C2
DE3534793C2 DE3534793A DE3534793A DE3534793C2 DE 3534793 C2 DE3534793 C2 DE 3534793C2 DE 3534793 A DE3534793 A DE 3534793A DE 3534793 A DE3534793 A DE 3534793A DE 3534793 C2 DE3534793 C2 DE 3534793C2
Authority
DE
Germany
Prior art keywords
cathode
clamping
clamping device
grooves
insulating body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3534793A
Other languages
German (de)
English (en)
Other versions
DE3534793A1 (de
Inventor
Reinhard 6472 Altenstadt De Kraft
Horst Dr. 8755 Alenau De Ranke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE19853534793 priority Critical patent/DE3534793A1/de
Priority to US06/881,635 priority patent/US4728850A/en
Priority to EP86112349A priority patent/EP0218105B1/de
Priority to DE8686112349T priority patent/DE3664976D1/de
Priority to JP23021386A priority patent/JPH0760650B2/ja
Publication of DE3534793A1 publication Critical patent/DE3534793A1/de
Application granted granted Critical
Publication of DE3534793C2 publication Critical patent/DE3534793C2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H01J1/18—Supports; Vibration-damping arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)
DE19853534793 1985-09-30 1985-09-30 Einspannvorrichtung fuer spiralfoermige drahtkatoden Granted DE3534793A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE19853534793 DE3534793A1 (de) 1985-09-30 1985-09-30 Einspannvorrichtung fuer spiralfoermige drahtkatoden
US06/881,635 US4728850A (en) 1985-09-30 1986-07-03 Mounting means for mounting spiral wire cathodes
EP86112349A EP0218105B1 (de) 1985-09-30 1986-09-06 Einspannvorrichtung für spiralförmige Drahtkatoden
DE8686112349T DE3664976D1 (en) 1985-09-30 1986-09-06 Mounting arrangement for a spiral-shaped wire cathode
JP23021386A JPH0760650B2 (ja) 1985-09-30 1986-09-30 スパイラル形のワイヤカソ−ドのための締込み装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19853534793 DE3534793A1 (de) 1985-09-30 1985-09-30 Einspannvorrichtung fuer spiralfoermige drahtkatoden

Publications (2)

Publication Number Publication Date
DE3534793A1 DE3534793A1 (de) 1987-04-02
DE3534793C2 true DE3534793C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-02-09

Family

ID=6282322

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19853534793 Granted DE3534793A1 (de) 1985-09-30 1985-09-30 Einspannvorrichtung fuer spiralfoermige drahtkatoden
DE8686112349T Expired DE3664976D1 (en) 1985-09-30 1986-09-06 Mounting arrangement for a spiral-shaped wire cathode

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE8686112349T Expired DE3664976D1 (en) 1985-09-30 1986-09-06 Mounting arrangement for a spiral-shaped wire cathode

Country Status (4)

Country Link
US (1) US4728850A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0218105B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH0760650B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (2) DE3534793A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2897155B1 (en) * 2012-09-12 2018-05-23 Shimadzu Corporation X-ray tube device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4084077A (en) * 1977-05-10 1978-04-11 Igor Antonovich Porazhinsky Cathode assembly of electron beam welding gun
DE2723891C3 (de) * 1977-05-26 1981-09-03 Institut elektrosvarki imeni E.O. Patona Akademii Nauk Ukrainskoj SSR, Kiev Katodenblock für eine Elektronenstrahl-Schweißmaschine
JPS54144170A (en) * 1978-05-02 1979-11-10 Hitachi Ltd Cathode constituent of direct heating type
JPS55102146A (en) * 1979-01-31 1980-08-05 Toshiba Corp Directly-heated cathode structure

Also Published As

Publication number Publication date
DE3534793A1 (de) 1987-04-02
DE3664976D1 (en) 1989-09-14
US4728850A (en) 1988-03-01
EP0218105A3 (en) 1988-01-07
JPH0760650B2 (ja) 1995-06-28
JPS62110242A (ja) 1987-05-21
EP0218105A2 (de) 1987-04-15
EP0218105B1 (de) 1989-08-09

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8110 Request for examination paragraph 44
8127 New person/name/address of the applicant

Owner name: LEYBOLD AG, 6450 HANAU, DE

D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee