DE3532888A1 - Anordnung zur regelung der ablenkung eines elektronenstrahls - Google Patents
Anordnung zur regelung der ablenkung eines elektronenstrahlsInfo
- Publication number
- DE3532888A1 DE3532888A1 DE19853532888 DE3532888A DE3532888A1 DE 3532888 A1 DE3532888 A1 DE 3532888A1 DE 19853532888 DE19853532888 DE 19853532888 DE 3532888 A DE3532888 A DE 3532888A DE 3532888 A1 DE3532888 A1 DE 3532888A1
- Authority
- DE
- Germany
- Prior art keywords
- magnetic field
- arrangement according
- field sensor
- deflection system
- deflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 title claims abstract description 18
- 239000003990 capacitor Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 230000001419 dependent effect Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000000110 cooling liquid Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000010079 rubber tapping Methods 0.000 claims 1
- 238000004804 winding Methods 0.000 description 4
- 230000005415 magnetization Effects 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 210000004072 lung Anatomy 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electron Sources, Ion Sources (AREA)
- Measuring Magnetic Variables (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19853532888 DE3532888A1 (de) | 1985-09-14 | 1985-09-14 | Anordnung zur regelung der ablenkung eines elektronenstrahls |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19853532888 DE3532888A1 (de) | 1985-09-14 | 1985-09-14 | Anordnung zur regelung der ablenkung eines elektronenstrahls |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3532888A1 true DE3532888A1 (de) | 1987-04-02 |
| DE3532888C2 DE3532888C2 (enExample) | 1990-06-13 |
Family
ID=6281010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19853532888 Granted DE3532888A1 (de) | 1985-09-14 | 1985-09-14 | Anordnung zur regelung der ablenkung eines elektronenstrahls |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE3532888A1 (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5532446A (en) * | 1992-03-14 | 1996-07-02 | Leybold Durferrit | Magnetic deflection system for a high-power electron beam |
| US6214408B1 (en) | 1997-10-16 | 2001-04-10 | Balzers Und Leybold Deutschland Holding Ag | Method for the operation of an electron beam |
| CN103295862A (zh) * | 2013-04-25 | 2013-09-11 | 兰州空间技术物理研究所 | 一种用于电子束轨迹控制的电磁偏转装置及其应用 |
| CN105425186A (zh) * | 2015-11-25 | 2016-03-23 | 国网宁夏电力公司电力科学研究院 | 一种用于铁心接地电流测试仪校验的磁场干扰发生装置 |
| DE102016122671A1 (de) * | 2016-11-24 | 2018-05-24 | VON ARDENNE Asset GmbH & Co. KG | Verfahren und Elektronenstrahlkanone |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1955846A1 (de) * | 1969-11-06 | 1972-01-05 | Leybold Heracus Gmbh & Co Kg | Elektronenkanone fuer die Erhitzung von Materialien in einem Vakuumbehaelter |
| US3814829A (en) * | 1971-10-26 | 1974-06-04 | B Movchan | Device for electron-beam heating of materials mainly for their melting and evaporation |
| DE2936911A1 (de) * | 1979-09-12 | 1981-04-02 | Siemens AG, 1000 Berlin und 8000 München | Verfahren und vorrichtung zur regelung eines magnetischen ablenksystems |
| EP0026578A1 (en) * | 1979-09-27 | 1981-04-08 | Abex Corporation | Railroad brake shoe |
| DE2719725C2 (de) * | 1976-05-03 | 1984-03-15 | Institut elektrosvarki imeni E.O. Patona Akademii Nauk Ukrainskoj SSR, Kiev | Einrichtung zur Elektronenstrahlerwärmung von Materialien |
-
1985
- 1985-09-14 DE DE19853532888 patent/DE3532888A1/de active Granted
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1955846A1 (de) * | 1969-11-06 | 1972-01-05 | Leybold Heracus Gmbh & Co Kg | Elektronenkanone fuer die Erhitzung von Materialien in einem Vakuumbehaelter |
| DE1955846B2 (de) * | 1969-11-06 | 1973-04-12 | Leybold Heraeus GmbH & Co KG, 5000 Köln | Elektronenkanone fuer die erhitzung von materialien in einem vakuumbehaelter |
| US3814829A (en) * | 1971-10-26 | 1974-06-04 | B Movchan | Device for electron-beam heating of materials mainly for their melting and evaporation |
| DE2719725C2 (de) * | 1976-05-03 | 1984-03-15 | Institut elektrosvarki imeni E.O. Patona Akademii Nauk Ukrainskoj SSR, Kiev | Einrichtung zur Elektronenstrahlerwärmung von Materialien |
| DE2936911A1 (de) * | 1979-09-12 | 1981-04-02 | Siemens AG, 1000 Berlin und 8000 München | Verfahren und vorrichtung zur regelung eines magnetischen ablenksystems |
| EP0026578A1 (en) * | 1979-09-27 | 1981-04-08 | Abex Corporation | Railroad brake shoe |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5532446A (en) * | 1992-03-14 | 1996-07-02 | Leybold Durferrit | Magnetic deflection system for a high-power electron beam |
| US6214408B1 (en) | 1997-10-16 | 2001-04-10 | Balzers Und Leybold Deutschland Holding Ag | Method for the operation of an electron beam |
| US6436466B2 (en) | 1997-10-16 | 2002-08-20 | Unaxis Deutschland Holding Gmbh | Method for the operation of an electron beam |
| CN103295862A (zh) * | 2013-04-25 | 2013-09-11 | 兰州空间技术物理研究所 | 一种用于电子束轨迹控制的电磁偏转装置及其应用 |
| CN105425186A (zh) * | 2015-11-25 | 2016-03-23 | 国网宁夏电力公司电力科学研究院 | 一种用于铁心接地电流测试仪校验的磁场干扰发生装置 |
| DE102016122671A1 (de) * | 2016-11-24 | 2018-05-24 | VON ARDENNE Asset GmbH & Co. KG | Verfahren und Elektronenstrahlkanone |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3532888C2 (enExample) | 1990-06-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OM8 | Search report available as to paragraph 43 lit. 1 sentence 1 patent law | ||
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8127 | New person/name/address of the applicant |
Owner name: LEYBOLD AG, 6450 HANAU, DE |
|
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |